CDG100D, CDG160D, CDG200D
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1 Visionary Sensor Technology CDG100D, CDG160D, CDG200D High Precision Vacuum Gauge Excellent erformance for high temerature alications
2 CDG100D, CDG160D, CDG200D Vacuum Gauges The INFICON heated CDG Caacitance Diahragm Gauge line is designed for stable long time erformance in harsh manufacturing environments. The temerature controlled corrosion resistant ultra-ure ceramic sensor rovides suerior san stability over many years aired with state-of-the-art zero stability. An innovative heating concet reduces ower consumtion. The heated CDG Caacitance Diahragm Gauge comes with a safe to touch surface even for the 200 C version. Advanced electronics offer the user a wide range of suitable filters yielding solutions for all alications and a choice of fieldbus interfaces. A unique sensor shield (atents granted) rotects the gauge from undesired rocess byroducts. A total Alumina coating immunizes the roduct against chemical attack. Tyical alications High temerature coating Sterilization Oxidation Dry etch General high temerature vacuum alications CVD
3 CDG working rincile Direct ressure measurement by diahragm Δd ~ Caacitance readout Δd 1 ~ Vaor ressure CDG100D, CDG160D, CDG200D Vacuum Gauges Designed for harsh and corrosive alications Advanced heating concet San stability Gauge temerature Vaor ressure Process ressure 60 C solid 200 C vaor Electrode Diahragm = ressure Temerature stabilized at ± 0.1 C Innovative isolation material - touchable surface at 200 C - small footrint Immune to ambient enviroment SEMI S2 comliant Excellent temerature stability Low ower consumtion Fast warm u Any mounting orientation Temerature Interface I/O Fully ceramic sensor Classic analog signal 0 10V Wide range ower suly Zero adjust, ush button / remote DI 2 individual setoints Status LED Diagnostic ort Fieldbus: DeviceNet, Profibus, EtherCAT, RS-232 Bonded ceramic structure combined with digital signal rocessing rovides suerior measurement erformance. DeviceNet Profibus EtherCAT Gas tye indeendence (mbar) CDG sensor technology Other tyical sensor technologies Tyical alications High temerature coating Sterilization Oxidation Dry etch General high temerature vacuum alications CVD Digital signal rocessing Gauge rotection for increased lifetime Indicated ressure Uout = a + b (a = sloe / b = off-set) Level 1 Baffle Stos coating, articles Level 2 Heater Prevents condensation / deosition Level 2 Shield Protects diahragm Level 4 Protective coating Corrosion rotection U Longtime full scale stability standard gain dynamic offset + slow fast F.S. stability The INFICON heated CDG Caacitance Diahragm Gauge line is designed for stable long time erformance in harsh manufacturing environments. The temerature controlled corrosion resistant ultra-ure ceramic sensor rovides suerior san stability over many years aired with state-of-the-art zero stability. An innovative heating concet reduces ower consumtion. The heated CDG Caacitance Diahragm Gauge comes with a safe to touch surface even for the 200 C version. Advanced electronics offer the user a wide range of suitable filters yielding solutions for all alications and a choice of fieldbus interfaces. A unique sensor shield (atents granted) rotects the gauge from undesired rocess byroducts. A total Alumina coating immunizes the roduct against chemical attack. measured at PTB True ressure (mbar) Setable outut P Digital filters Measuring oints of one gauge 10 time (years)
4 CDG100d, cdg160d, cdg200d, heated ADVANTAGES AT A GLANCE Outstanding stability Long lifetime No eriodical recalibration required Digital signal rocessing Corrosion resistant Alumina sensor Measurement ranges Full Scale (Torr) Temeratures C /0.4% Accuracy D 160D 200D 160D T D 80D 100D 80D Pressure (Torr) Temeratures to match your rocess
5 Excellent Customer Suort is a Commitment INFICON rovides a global network of sales and service centers. These centers are staffed with local service and alication exerts who can assist you in choosing the best solution for your individual roduct alication and rovide fast suort if service is needed. Asia and Pacifica CHINA INFICON Ltd. Beijing Phone: reach.china@inficon.com KOREA INFICON Ltd. Kyunggi-do Phone: reach.korea@inficon.com Americas INFICON Inc. East Syracuse, NY Phone: reach.us@inficon.com Euroe, Middle East and Africa INFICON GmbH Cologne Phone: reach.germany@inficon.com INDIA INFICON PVT. Ltd. Pune Phone: reach.india@inficon.com JAPAN INFICON Co. Ltd. Yokohama-shi, Kanagawa-ken Phone: reach.jaan@inficon.com SINGAPORE and AUSTRALIA INFICON PTE Ltd. Singaore Phone: reach.singaore@inficon.com TAIWAN INFICON Co. Ltd. Chuei City Phone: reach.taiwan@inficon.com inficon.com reachus@inficon.com Due to our continuing rogram of roduct imrovements, secifications are subject to change without notice. tibc22e INFICON
Visionary Sensor Technology CDG045D. High Precision Vacuum Gauge. True pressure measurement
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Porter. CDG020D vacuum gauge. Big performance - small size Rely on our cost effective solution for precise measurement after easy installation
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