Sensors. May

Transcription

1 Sensors May

2 Future Technology Center Technology Trends Statistical trend analysis of technologies (patents & papers) and markets Analysis and assessment of industrial roadmaps Workshops with technology leaders and business innovators Business Assessment Matching future technologies with individual business lines Selection and assessment business opportunities and future innovations Strategic business partners in the field Concept Creation Defining innovation routes and new product concepts Conceptual elaboration of specific innovative productlines Development & implementation Business case assessment Technological feasibility Partnerships and system engineering for further development and implementation May

3 Outline why lab on chip, mems sensors and rf-sensors several examples, commercial & in development performance data (indicative) some future concepts for defense ideas for cooperation May

4 Lab on chip, microlab (fluidic) Rapid, Specific and Sensitive Micro (Fluidic) Detection System Bench Process Book Size System Watch Size System m Micro System dm Several micro system platforms 1) Si (CMOS) 2) Glass/ceramic (high temperature) 3) Plastic (low cost, disposable) cm mm May

5 ...and MEMS MEMS are physically small and integrate electrical, mechanical and sensoric components (micro electro mechanical systems) Inertial Measurement Units 4.0 mm Airbag Accelerometers 500 um Fuel Injection Nozzle Accelerometer 1 micron beams Platforms 1) Si (CMOS) 2) Glass/ceramic (high temperature) Tire Pressure Sensors Microelectromechanical Systems: Advanced Materials and Fabrication Methods 0.5mm May

6 Why Lab on chip Thanks to miniaturisation down to micron & nano level: small dimensions (mm, µm, nm) function integration possible (dsp, rf-wireless) efficient thermal and material transport cheap, easy for mass production portable, point of analysis disposable small sample volume (µl, nl, pl) fast response high throughput multi parallel analysis, matrix array single cell/molecule detection less chemical waste high sensor-sample ratio high sensitivity high signal to noise ENIAC ~1950 Jornada ~2000 Shrink volume by 10 8 Improve power efficiency by 10 8 Stan Williams, HP May

7 Why nanostructures for sensing Magnetic bead DNA-coated pad Nanocalorimeter; Roukes CIT Magnetoresistive strip Signal to noise improvements: Shorting metal Field generation wire GMR Biosensor; Whitman/Prinz, NRL Cantilever Sensor; Thundat ORNL yocto(10-24 ) joule, atto(10-18 ) newton, femto (10-15 ) mol/l, ppb, single molecule Miniaturization size/weight - arrays Lower power, potentially scavenged Locally process data into information + 15 μ NanoAu Chemiresistor; Snow NRL Lab-on-a-chip; Sandia May

8 Cantilever Array-based Artificial Nose Gases and Vapours - ppm range M.K. Baller, et al., Ultramicroscopy 82, 1 (2000); F.M. Battiston, et al., Sensors & Actuators 77, 122 (2001) May

9 Gas sensor array metal oxide type, NRL Gases and Vapors - ppb level NO2, H2O, NH3, CH4, SO2, CO2, H2S, alcohols, aromatics Detection limits at C 100 detection limit [ppb] propanol benzene toluene 2-nitrotoluene Cross-section of a 3X3.5 mm 2 microarray with 16 sensor segments G a s e s SE1 SE2 SE3 Substrate: Si/SiO 2 or Al 2 O 3 Gradient membrane SiO 2 or Al 2 O 3 Thickness 2 to 20 nm Platinum electrodes Thickness 1 µm Gas detector layer SnO 2 or WO 3, Pt-endowed, approx. 150 nm Heater (Pt) Temperature gradient 50 C / 2mm May

10 Microfluidic lab-on-chip systems May

11 Sample preparation & sensing, csmise, tno Genetically engineered cell amplifier Body fluid filter Genetically engineered cell sensor Micro pump Micro sensor Outlet May

12 Droplet based microfluidics, csmise Droplet-based microfluidics Electrically control surface tension to drive droplets Reconfigurable digital microfluidic circuits Fluorescence or magnetic bead detection May

13 Bacteriological DNA fingerprinting, caltech, tno 500 nm 1.5 μm Sample preparation DNA / RNA cell lysis peristaltic pump micro valve E. coli sample DNA sensor lysis reagent probe solution wash solution drain substrate solution enzyme solution May

14 Micro flowcytometer (cell counter) counting and measuring cells one by one measuring level of soluble factor by fluorescent labeling : hormones, antibodies, antigens, DNA quick and accurate compact tool for cells diagnostics micro optical mechanical device (MOMS) May

15 Micro X-ray source & detector (amptek) Miniature carbon nanotube field emission X- ray tube May

16 Spectrometer on a chip (B-I) Microspectrometer on chip by Boehringer-Ingelheim May

17 SPR surface plasmon resonance SPR detects changes in refractive index in the immediate vicinity of the surface layer of a sensor chip. The SPR angle shifts when biomolecules bind to the surface. SPR is non-invasive (process reactor, fluidic chip) May

18 Gas sensing with carbon nanotubes Chemiresistor for volatiles Biosensor for in situ life detection, biomedical applications May

19 Micro gaschromatograph, C2V, tno Dimensions: 7x7x7 mm3 Det. limit: <1 ppm Response time: 25ms Int. volume: < 1 µl Dead volume: 0.1 µl Temperature: 80 / 150 C May

20 HPLC on Chip (Tai, Caltech) Gradient Pumps Passive Mixer Column agilent 1 cm Sample Injector Electrodes ESI Nozzle Total 9 Extrated Individual Peptides The chip performance is as good as commercial system May

21 Caltech: Integrated Large-Scale Micro/Nano Fluidics Micro Active Valve 100 μm Check Valve Thermal Flow Sensor Micro Pump Parylene Channel Electrolysis Pump In-Channel Check Valve Reaction Chamber or Reservoir May

22 Single molecule detection, Wang JHU Fluidic manipulation plus quantum-dot fluorescence in optical cavity channel Sample preparation, Microfluidics, Optical cavity fluidic channel & Biosensing Chips Electrical Molecular Manipulation and Positioning Single Molecule Detection Single Molecule Dynamics Quatum dot fluorescence May

23 Indicative sensitivities bio(molecule)sensor Technology Fluorescence Magnetic Mechanical/acoustic Electrical Electrochemical Other optical Principle PCR (polymerase chain reaction) Elisa (enzyme linked immunoabsorbent assay) GMR/nanobeads (in development) concentration step (to be developed) Cantilever resonator (tuning fork) Nanotube/nanowire resonators SAW (surface acoustic waves) Membrane (catalytic hybridization) Enzymatic assisted charge transfer SPR (surface plasmon resonance) PWG (planar waveguide fluorescence, in dev) THz (early experimental phase, in dev) Sensitivity (mol/liter) 10-10/ / /16 ppm (gaseous) ppb (gaseous) ppm, / / / (10-14 ) Chemical Thermal Metal oxide nanostructures, nanotubes/wires Calorimetric ppb (gaseous) 10-3/4 May

24 Future: senstenna, passive RF-readable sensor RF-antenna circuit with reactive polymer or sensitized nanotubes (TNO) Passive RFID-tag with integrated sensor function Semi-active credit card sized sensor with logic/battery Applications: health monitoring, BC sensing, food quality Operates without battery, activated by RF reader PDA, mobile with ZigBee, Bluetooth May

25 Future: B/C sensing with conductive polymers in passive or semi active system May

26 Body sensor functionalities Body condition T (core temperature, skin temperature) Heart rate ECG(electrocardiogram) sensor for monitoring heart activity EEG (electroencephalography) sensor for monitoring brain electrical activity EMG (electromyography) sensor for monitoring muscle activity Hydratation Moisture level of wounds Bacterial contanimation Glucose/lactate level in blood Drug delivery, need for medication Ph value of sweat, body fluids Chemical and bio influences Air quality, breath sensing Blood pressure sensor Body position/motion Motion, acceleration Positioning body (indoor/outdoor) Body parts position Body environment (B/C/N/T/humidity/air) May

27 Body sensors, BAN IMEC human++, UWB BAN May

28 Body sensors, BAN May

29 Body sensors, medical BAN May

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40 END Thank you! Thank you May