Micro and Nano technologies for Health sensors development (part.2)

Transcription

1 Micro and Nano technologies for Health sensors development (part.2) Nadia Madaoui Lionel Rousseau : (lionel.rousseau@esiee.fr) Laurie Valbin : (laurie.valbin@esiee.fr) Olivier Français (olivier.francais@esiee.fr) Patrick Poulichet (patrick.poulichet@esiee.fr) Gaëlle Lissorgues : (gaelle.lissorgues@esiee.fr )

2 Insulating layer Physiologic liquid Neuroscience Glass Ring Retinal Implant Tissue Metal 3D Electrodes Planar electrodes Substrate Recording Tissue : 1cm / 1mm 2

3 IMPLANTS Brain Machine Interface (BMI) Implant sous rétinien Implant 64 Implant 16 Implant 32 PCB électrodes 3 3

4 IMPLANTS Brain Machine Interface (BMI) Decrease of impedance over time because the retina sticks gradually to the implant 27/11 J+12 S1 Retina 10/12 J+25 S3 Retina Implant (microelectrodes facing upward) 4 Implant (microelectrodes facing upward)

5 5 Graphene Cortical Implant

6 second skin development Piezoelectric Sensors Patch II : Electronic patch (reusable) Electrodes / Electrochemical sensors SKIN Patch I : Sensors patch (Disposable ) 6

7 second skin development Soft array of capacitor (Sébastien Nazeer Post doc) Principle : read pressure on 3 axes Polymer 2 PDMS Polymer 1 7

8 second skin development Piezoelectric material Validation of concept: development of piezoelectric sensor embedded in polymer. Thickness below : 10 µm Piezoelectric layer Polymer Electrodes This process is compatible with CMOS technology, and could be transfer in classical cleanroom manufacturing 2 Patents : «Procédé de fabrication d un capteur piézoélectrique souple» 8

9 second skin development On vivo measurements - Correlation between ECG and piezoelectric signal - Systematic delay between ECG and piezoelectric signal Pulse wave velocity calculation This technology has been selected by ESA to be used on the ISS to investigate mechanical properties changes of the spationaute arteries and is currently under validation for a future mission. 9

10 second skin development Projet est piloté par le : - MEDES( Institut de Médecine et de Physiologie Spatiales) - l ESA (European Space Agency). Projet «EVERYWEAR» pour le suivi des paramètres physiologiques des spationautes. ECG Capteur 10

11 Projet Informed INFORMED : An integrated Pilot Line for Medical Devices Additive technology for soft electronic on polymer film for skin sensors - Coupling sensors and electronic (ECG, Thermal etc.) 11

12 Micro fluidic technology MicroChanel Silicon or glass Etching silicon or glass (both) Bonding Glass / silicon PDMS microfluidic) PDMS casting Bonding Glass/PDMS silicon/pdms SU8 microchanel Lithography Support Verre / Silicium 12

13 Microfluidic Thermal micro mixer Thermal microfluidic devices Droplet microsystem 13

14 Saw device fabrication for mass detection (ADN ) LiTaO 3 Substrate Freq : 120 MHz / 400 MHz RF department We designed a SAW (100 / 400 Mhz) for detection of chemical species in liquid environment Grafting and Hybridization DNA (36-mer) DNA probe grafting DNA Hybridization Sensibility : 6.3 Hz/ng 14

15 Diamond Electrochemistry sensors CV in blood sheep Direct Activation in media (blood) Urine 1. Uric acid 2. Ascorbic acid (patented process) No activation 15

16 Micro NRM (Nuclear Resonance Magnetic) Planar Micro-antenea insert in rat brain Copper : Height16 µm B 0 = 4.7 T 16

17 Conclusion 350 m² 650 m² clean room facility dedicate for MEMS development and packaging Fabrication technology - Rigid substrate: silicon, glass - Polymer : SU8, PDMS, BCB, Polymide, Parylene Development of specific process for soft sensors Know how for ex vivo and in vivo applications Development of disruptive technology (piezo, diamond, graphene) Electronic could be also developed (analogic, digital, RF) 3 start up has been created : - Pixium vision (Retinal implant) - Ophtimalia (medical devices in the field of ophthalmology) - Neurallys (dispositifs médicaux au service de la neurologie : PIC) R&D center for the start-up Bodycap (Sensors for monitoring physiological parameters) 17