Innovative sensors and systems for the molecular Point-of-Care diagnostics
|
|
- Noel Kevin Goodman
- 6 years ago
- Views:
Transcription
1 Innovative sensors and systems for the molecular Point-of-Care diagnostics AIT Austrian Institute of Technology GmbH Health & Environment Department Molecular Diagnostics Contact
2 AIT Austrian Institute of Technology GmbH AIT headquarter Schönbrunn palace Largest research center in Austria (~1150 employees) Half public, half private Five departments: Energy Mobility Safety & Security Health & Environment Innovation Systems 2
3 Organizational chart of AIT
4 Business Unit Molecular Diagnostics Biomarker Development Assay Development Diagnostic Biosensors Molecular Diagnostics Systems Integration Point-of-Care Bioinformatics 4
5 Automated immunoassays for monitoring at intensive care units Project leader Dr. Johannes Peham PhD topic of Helene Zirath 5
6 Automated immunoassays: microfluidic design Disposable thermoplastic chip Reaction chamber: 20 µl, air-free filling, storing of magnetic beads Chip-integrated micro-syringes: Actuation of detection antibody and sample, onchip storage of detection antibody Outlet Inlets and outlet for reagents Mixing channel for substrate Reaction chamber (20 µl) with magnetic beads 6
7 Automated immunoassays: analysis process 1. Chip prefilled with magnetic beads, detection antibody and plasma 2. Sample incubation 3 min + wash 3. Detection antibody-biotin 3 min + wash 4. SA poly-hrp 3 min + wash 5. Chemiluminescent substrate (mixed on-chip) & read signal Zirath H, Proc MicroTAS, 2014 Zirath H, Proc Eng,
8 Luminescence Units Automated immunoassays: measurement range On-chip IL-8 ELISA IL-8 biomarker in 10 % plasma (pg/ml) On-chip IL-8 ELISA Signal blank Limit of detection LOD on-chip: 10 pg/ml IL-8 detected at concentrations between 10 pg/ml and 2000 pg/ml within only 30 minutes These concentrations correspond to the clinical need by requiring only 3μL blood plasma for the measurement Zirath H, Proc MicroTAS, 2014 Zirath H, Proc Eng,
9 Summary Automated immunoassays for monitoring at intensive care units Rapid <30 minutes Compact demonstrator: 20x20cm testchip: 2x2cm Outlook: Validate with patient samples Develop multiplex system Sensitive <= 50µL whole blood LOD ~ 10pg/mL Cost-effective reagents/marker 1.1 cartridge ~<1 device < 1000 planned Patent pending EP Project leader Dr. Johannes Peham johannes.peham@ait.ac.at PhD topic of Helene Zirath 9
10 Nanoparticle-based homogeneous biosensing Project leader Dr. Jörg Schotter 10
11 Nanoparticle-based homogeneous biosensing Mix & measure detection principle sample + functionalized nanoparticles cuvette 11
12 Nanoparticle-based homogeneous biosensing Mix & measure detection principle Analyte molecule specifically binds to functionalized nanoparticle 12
13 Nanoparticle-based homogeneous biosensing Mix & measure detection principle Analyte molecule specifically binds to functionalized nanoparticle On analyte binding, a measureable physical property of the nanoparticle changes 13
14 Nanoparticle-based homogeneous biosensing Optical detection of nanoparticle phase lag in external rotating magnetic field hybrid magnetic-core / Au-shell nanorods absorption allows optical detection of nanoparticle orientation which depends on surface coverage by selectively bound target molecules Illustration by Darragh Crotty, S. Schrittwieser et al., ACS Nano 6 (2012) 791
15 Nanoparticle-based homogeneous biosensing Measurement setup & typical raw signals PC sample audio amplifier Lock-in amplifier photodetector small coil shunt signal (V) voltage (V) photodetector signal (V) 2.34 small coil shunt voltage (V) 2 laser diode photodetector coil pairs Laboratory setup φ time (ms) 2f-optical signal due to symmetry of nanorods Phase lag is measured by lock-in amplifier and re-calculated to 1f -1 15
16 Summary Nanoparticle-based homogeneous biosensing Simple mix & measure technique Minimal sample preparation Method applicable sensing in serum and saliva Fast Reduced incubation time due to 3d diffusion Continuous monitoring of binding events (Real-time measurements) Cost-effective Easy to integrate & simple instrumentation Small sample volumes Ideally suited for point-of-care applications Patent status Austrian AT European EP Chinese CN US application US Other applications Results can be modeled and understood by theory Size analysis of bound proteins Measurement of kynetic parameters possible S. Schrittwieser et al., Small 10 (2014) 407 Project leader Dr. Jörg Schotter 16
17 Integrated optical waveguide biosensing Project leader Dr. Rainer Hainberger 17
18 The photonic sensing principle: MZI waveguide side view Bio-sensitive layer on top of waveguide provides selective binding and enrichment of biomolecules on sensor surface Light intensity analyte sensing layer n sl core layer n wg binding events change phase velocity of light in sensing arm Intensity Concentration substrate n s waveguide front view w~600nm Si 3 N 4 H~250nm SiO 2 18
19 The photonic sensing principle: MZI 19
20 light power (µw) The photonic sensing principle: MZI 2,0 1,5 1,0 interference 0,5 0,0 1,00 1,25 1,50 1,75 2,00 2,25 time (min) ~1cm bound target molecules biofunctional layer with capture molecules 20
21 Measurement setup 21
22 Miniaturization: optoelectronic integration =850nm input grating optical sensor element output grating silicon dioxid µm Si-photodiodes optoelectronic layer Si 3 N 4 waveguides fabricated by CMOS compatible process TSV silicon substrate 22
23 Miniaturization: optoelectronic integration SOI PECVD-Si 3 N 4 Silicon as waveguide material Silicon nitride (Si 3 N 4 ) as waveguide material Wavelength of 1310nm Wavelength of 850nm Requires special SiGe photodiodes Co-integration with optoelectronics requires wafer-bonding process Integration of standard Si photodiodes possible Direct PECVD deposition on Si-optoelectronics possible 23
24 optical power (dbm) Experimental results: low-loss 1cm 0.86dB/cm (<18% of optical power lost over 1 cm) =850nm;TM 24
25 normalized power (1) Experimental results: sensitivity & biosensing Si 3 N 4 wire waveguides thickness 250nm 1cm 1,0 0,9 0,8 0,7 0,6 0,5 0,4 0,3 0,2 0,1 0,0 with NaCl-solution n=~9e time (sec) S-Protein/S-Peptide measurement
26 Compact PECVD-Si3N4 MZI spirals (L=3cm) 470µm
27 Technology for OCT applications Austrian national project aiming to realize a prototype with following characteristics: Scalable Suitable for mass production Using a light source with a wavelength of 850nm Integrated detector on chip Integrated analog optoelectronics High efficient coupling and waveguiding
28 Summary Integrated optical waveguide biosensing Mach-Zehnder Interferometer biosensing Suitable for proteins, peptides, DNA, antibodies CMOS compatible low-loss Si 3 N 4 waveguide platform Suitable for point-of-care applications Other possible applications: OCT, Telecommunications Reduction of sensing area by integrating spiral-shaped waveguides Multiplex sensing Project leader Dr. Rainer Hainberger rainer.hainberger@ait.ac.at 28
29 Micro- & nanotechnology equipment Microfluidic milling machine LPKF Protomat Wire bonder F+K Delvotec, manual operation Evaporation chamber Leybold Univex 450, 2 thermal sources, 1 e-gun source Argon ion beam etching Roth+Rau, IonSys 500, 4 ion source Hiden mass spectrometer for end point detection Plasma asher Diener Electronics, Femto Optical lithography EVG 620 mask aligner, 4 SEM & e-beam lithography Zeiss Supra 40, Raith e-beam writing tool Cleanroom 42m², resist processing and wet chemical etching Atomic Force Microscope Molecular Imaging, Pico Plus Profilometer Tencor, Alpha Step Magnetron sputtering Leybold, Univex 450 C cluster system, 11 Targets, 4, DC/RF sputtering Materials inkjet printer FujiFilm Dimatix DMP-2831
30 Electrical, magnetic & optical characterization Analytical Probe System SUSS PM5, electrical DC-HF measurements on 6 wafers or single substrates, compatible with two-axis (in-plane) magnetic field application for magnetoresistance characterization Precision Semiconductor Parameter Analyzer Agilent 4156C, for frequency-dependent LRC-measurements Probe station for magnetoresistance characterization in arbitrary magnetic field direction (up to 40 mt) Setup for linear AC and rotating magnetic fields up to 2 khz frequency and 5 mt amplitude including optical detection Setup for optical waveguide characterization various laser sources (850nm, tunable lasers nm, nm), polarization control, automated alignment & automated liquid handling Monochromomator VIS, NIR, IR SUSS PM5 Analytical Probe System
31 Photonic design & characterization Photonic simulation cluster: 256 cores with 488GB RAM 3D FDTD simulation of photonic wire Bragg reflector 1TB high performance SSD array and 5TB raid-5 HDD storage with automated backup 2D/3D finite difference time domain simulation packages variational mode matching tools for eigenmode calculation Floquet-Bloch solver for simulating waveguide grating couplers Fully equipped set-up for waveguide device characterization and biosensing experiments Temperature controlled sample holder and programmable fluid control system with five fluid reservoirs 31
32 Thank you for your attention!!! Contact AIT Austrian Institute of Technology Health & Environment Department Molecular Diagnostics
Compact hybrid plasmonic-si waveguide structures utilizing Albanova E-beam lithography system
Compact hybrid plasmonic-si waveguide structures utilizing Albanova E-beam lithography system Introduction Xu Sun Laboratory of Photonics and Microwave Engineering, Royal Institute of Technology (KTH),
More informationNanophotonics: principle and application. Khai Q. Le Lecture 11 Optical biosensors
Nanophotonics: principle and application Khai Q. Le Lecture 11 Optical biosensors Outline Biosensors: Introduction Optical Biosensors Label-Free Biosensor: Ringresonator Theory Measurements: Bulk sensing
More informationPYTHIA: Monolithically integrated interferometric biochips for label-free early detection of Human diseases
PYTHIA: Monolithically integrated interferometric biochips for label-free early detection of Human diseases Ioannis Raptis, IMEL NCSR Demokritos raptis@imel.demokritos.gr www.pythia-project.eu The Problem
More informationPhotonic Crystal Microarray Nanoplatform for High-Throughput Detection of Biomolecules
Photonic Crystal Microarray Nanoplatform for High-Throughput Detection of Biomolecules Swapnajit Chakravarty 1, Wei-Cheng Lai 2, Kathryn Moncivais 3, Xiaolong (Alan) Wang 1, Che-Yun Lin 2, Zhiwen J. Zhang
More informationP. Bienstman, E. Hallynck, C. Lerma Acre, S. Werquin, J.- W. Hoste, D. Martens PHOTONICS RESEARCH GROUP 1
PHOTONICS RESEARCH GROUP P. Bienstman, E. Hallynck, C. Lerma Acre, S. Werquin, J.- W. Hoste, D. Martens PHOTONICS RESEARCH GROUP 1 Overview Silicon nanophotonics biosensors Applications: Conformational
More informationLecture 5. SOI Micromachining. SOI MUMPs. SOI Micromachining. Silicon-on-Insulator Microstructures. Agenda:
EEL6935 Advanced MEMS (Spring 2005) Instructor: Dr. Huikai Xie SOI Micromachining Agenda: SOI Micromachining SOI MUMPs Multi-level structures Lecture 5 Silicon-on-Insulator Microstructures Single-crystal
More informationCase Studies of Micro-Biosensors
Case Studies of Micro-Biosensors Lecture April 18 Jeff T.H.Wang website: http://pegasus.me.jhu.edu/~thwang/ New course : BioMEMS and BioSensing (Spring 04 ) Advantages of Micro Biosensors Bench process
More informationPROJECT PERIODIC REPORT
PROJECT PERIODIC REPORT Grant Agreement number: 619456 Project acronym: SITOGA Project title: Silicon CMOS compatible transition metal oxide technology for boosting highly integrated photonic devices with
More informationNanostructured Plasmonic Interferometers for Ultrasensitive Label-Free Biosensing. Fil Bartoli Lehigh University 4/9/2014
Nanostructured Plasmonic Interferometers for Ultrasensitive Label-Free Biosensing Fil Bartoli Lehigh University 4/9/2014 P.C. Rossin College of Engineering and Applied Science Department of Electrical
More informationH I B I S C U S. Executive Summary
Executive Summary H I B I S C U S HIBISCUS (Hybrid Integrated BIophotonic Sensors Created by Ultrafast laser Systems) is an FP6 STREP project within the IST Priority. It is coordinated by Prof. Giulio
More informationGE Sensing & Inspection Technologies MEMS. Global Solutions for Microsystems
GE Sensing & Inspection Technologies MEMS Global Solutions for Microsystems g Global research, development and manufacturing excellence Groby, United Kingdom MEMS Design and Manufacturing Center Advanced
More informationFraunhofer ENAS Current results and future approaches in Wafer-level-packaging FRANK ROSCHER
Fraunhofer ENAS - Current results and future approaches in Wafer-level-packaging FRANK ROSCHER Fraunhofer ENAS Chemnitz System Packaging Page 1 System Packaging Outline: Wafer level packaging for MEMS
More informationHigh Sensitivity of Phase-based Surface Plasmon Resonance in Nano-cylinder Array
PIERS ONLINE, VOL. 4, NO. 7, 2008 746 High Sensitivity of Phase-based Surface Plasmon Resonance in Nano-cylinder Array Bing-Hung Chen, Yih-Chau Wang, and Jia-Hung Lin Institute of Electronic Engineering,
More informationNanoFabrication Systems DPN. Nanofabrication Systems. A complete line of instruments and tools for micro and nanopatterning applications
DPN Nanofabrication Systems A complete line of instruments and tools for micro and nanopatterning applications DPN Nanofabrication Systems A complete line of instruments and tools for micro and nanopatterning
More informationChapter 3 Silicon Device Fabrication Technology
Chapter 3 Silicon Device Fabrication Technology Over 10 15 transistors (or 100,000 for every person in the world) are manufactured every year. VLSI (Very Large Scale Integration) ULSI (Ultra Large Scale
More informationTrench Structure Improvement of Thermo-Optic Waveguides
International Journal of Applied Science and Engineering 2007. 5, 1: 1-5 Trench Structure Improvement of Thermo-Optic Waveguides Fang-Lin Chao * Chaoyang University of Technology, Wufong, Taichung County
More informationPlasmonics using Metal Nanoparticles. Tammy K. Lee and Parama Pal ECE 580 Nano-Electro-Opto-Bio
Plasmonics using Metal Nanoparticles Tammy K. Lee and Parama Pal ECE 580 Nano-Electro-Opto-Bio April 1, 2007 Motivation Why study plasmonics? Miniaturization of optics and photonics to subwavelength scales
More informationSilicon photonics biosensing: different packaging platforms and applications ABSTRACT 1. REACTION TUBES AS A PLATFORM FOR RING RESONATOR SENSORS.
Silicon photonics biosensing: different packaging platforms and applications C. Lerma Arce a,b, E. Hallynck a,b, S. Werquin a,b, J.W. Hoste a,b, D. Martens a,b, P. Bienstman a,b,* a Photonics Research
More informationTackling the optical interconnection challenge for the Integrated Photonics Revolution
Tackling the optical interconnection challenge for the Integrated Photonics Revolution Dr. Ir. TU Delft, Precision and Microsystems Engineering m.tichem@tudelft.nl Microfabrication and MEMS Si microfabrication
More information2.3 Quantum Dots (QDs)
2.3 Quantum Dots (QDs) QDs are inorganic nanocrystals, approximately 1 10 nm in size, with unique optical properties of broad excitation, narrow size-tunable emission spectra, high photochemical stability,
More informationPreface Preface to First Edition
Contents Foreword Preface Preface to First Edition xiii xv xix CHAPTER 1 MEMS: A Technology from Lilliput 1 The Promise of Technology 1 What Are MEMS or MST? 2 What Is Micromachining? 3 Applications and
More informationModeling Of A Diffraction Grating Coupled Waveguide Based Biosensor For Microfluidic Applications Yixuan Wu* 1, Mark L. Adams 1 1
Modeling Of A Diffraction Grating Coupled Waveguide Based Biosensor For Microfluidic Applications Yixuan Wu* 1, Mark L. Adams 1 1 Auburn University *yzw0040@auburn.edu Abstract: A diffraction grating coupled
More informationMicro/nanophotonics at VTT
Micro/nanophotonics at VTT Timo Aalto (timo.aalto@vtt.fi) VTT Technical Research Centre of Finland Micro and nanotechnology seminar, St Petersburg, 16 th Nov 2010 2 Outline Overview of micro and nanophotonics
More informationChapter 2 Capacitive Sensing Electrodes
Chapter 2 Capacitive Sensing Electrodes The capacitive sensing electrodes on the top of a CMOS chip serve as an interface between the microelectronic readout system and the biological/chemical analyte.
More informationFABRICATION ENGINEERING MICRO- NANOSCALE ATTHE AND. Fourth Edition STEPHEN A. CAMPBELL. of Minnesota. University OXFORD UNIVERSITY PRESS
AND FABRICATION ENGINEERING ATTHE MICRO- NANOSCALE Fourth Edition STEPHEN A. CAMPBELL University of Minnesota New York Oxford OXFORD UNIVERSITY PRESS CONTENTS Preface xiii prrt i OVERVIEW AND MATERIALS
More informationInterferometric optical biosensor. Xingwei Wang
Interferometric optical biosensor Xingwei Wang 1 Light Transverse electromagnetic wave Reflection Refraction Diffraction Interference 2 Fabry-Perot interferometer 3 Interferometer Two waves that coincide
More informationIntegrated Photonic Devices for Sensing
Integrated Photonic Devices for Sensing Benjamin L. Miller Departments of Dermatology, Biochemistry and Biophysics, and Biomedical Engineering University of Rochester Rochester, NY 14642 USA Benjamin_miller@urmc.rochester.edu
More informationIntlvac Nanochrome I Sputter System (intlvac_sputter)
1. Intlvac_Sputter Specifications The Intlvac Nanochrome I sputter system is configured for DC, AC (40 khz), and RF (13.56 MHz) magnetron sputtering. They system has in-situ quartz lamp heating up to 200C,
More informationNanotechnology Commercialization Success Story Professor Ray T. Chen The University of Texas, Austin
Nanotechnology Commercialization Success Story Professor Ray T. Chen The University of Texas, Austin chen@ece.utexas.edu Description of the nanotechnology-enabled product or service Through the AFOSR MURI
More informationSensor. Device that converts a non-electrical physical or chemical quantity into an electrical signal. Sensor Processor Display Output signal
Microsensors Outline Sensor & microsensor Force and pressure microsensors Position and speed microsensors Acceleration microsensors Chemical microsensors Biosensors Temperature sensors Sensor Device that
More informationIntroduction to CMOS VLSI Design. Layout, Fabrication, and Elementary Logic Design
Introduction to CMOS VLSI Design Layout, Fabrication, and Elementary Logic Design CMOS Fabrication CMOS transistors are fabricated on silicon wafer Lithography process similar to printing press On each
More informationAn expedition to modern optical bio-diagnostic tools
An expedition to modern optical bio-diagnostic tools Advisor Prof. James F. Rusling Dhanuka Wasalathanthri CHEM 5395 How sensitive it is? Prostate Specific Antigen (PSA) in serum (normal) - 0.5 to 2 ng
More informationMICROSTRUCTURE-BASED ANALYTICS AND SENSOR TECHNOLOGY
MICROSTRUCTURE-BASED ANALYTICS AND SENSOR TECHNOLOGY 1 CTCelect: Isolation of single CTCs 2 Diagnostic fluidic chip 3 Fluidic chip for cell isolation 4 Helium detector 5 MEMS micro densitometer 1 APPLICATION
More informationCENTRIFUGAL MICROFLUIDICS
CENTRIFUGAL MICROFLUIDICS Yoon-Kyoung Cho School of Nano-Bioscience and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Republic of Korea ABSTRACT Lab-on-a-disc, in which
More informationSilicon nanophotonic biosensors
PHOTONICS RESEARCH GROUP Silicon nanophotonic biosensors Peter Bienstman Peter.Bienstman@UGent.be PHOTONICS RESEARCH GROUP 1 THE VISION PHOTONICS RESEARCH GROUP 2 Deaths by infectious diseases www.worldmapper.com
More informationSUPPLEMENTAL INFORMATION: 1. Supplemental methods 2. Supplemental figure legends 3. Supplemental figures
Supplementary Material (ESI) for Lab on a Chip This journal is The Royal Society of Chemistry 2008 A microfluidics-based turning assay reveals complex growth cone responses to integrated gradients of substrate-bound
More informationReview of CMOS Processing Technology
- Scaling and Integration Moore s Law Unit processes Thin Film Deposition Etching Ion Implantation Photolithography Chemical Mechanical Polishing 1. Thin Film Deposition Layer of materials ranging from
More informationSurface micromachining and Process flow part 1
Surface micromachining and Process flow part 1 Identify the basic steps of a generic surface micromachining process Identify the critical requirements needed to create a MEMS using surface micromachining
More informationNANO-FABRICATION FOR MESOSCOPIC PHYSICS
NANO-FABRICATION FOR MESOSCOPIC PHYSICS Frédéric Pierre CNRS, Laboratory of Photonics and Nanostructures (LPN), Marcoussis, France ϕ Nano Team LPN PLAN Overview Electron beam lithography Step by step realization
More informationLow-cost, deterministic quasi-periodic photonic structures for light trapping in thin film silicon solar cells
Low-cost, deterministic quasi-periodic photonic structures for light trapping in thin film silicon solar cells The MIT Faculty has made this article openly available. Please share how this access benefits
More informationOLED/OPD transducer for point-of-use diagnostics
OLED/OPD transducer for point-of-use diagnostics Overview 1. CDT overview + Biosensor platform overview CDT overview Absorbance based lateral flow device (LFD) basics and advantages Abingdon Health collaboration
More informationSurface Plasmon Resonance Analyzer
Surface Plasmon Resonance Analyzer 5 6 SPR System Based on Microfluidics Wide Dynamic Range Kinetic Analysis by Detection of Association /Dissociation of Bio-Molecules Measuring of Mass Change below
More informationBio MEMS Class -1 st week
Bio MEMS Class -1 st week Jang, Jaesung Ref: Bashir ADDR Review paper, 2004. 1 Introduction Bio-MEMS: devices or systems, constructed using techniques inspired from micro/nano-scale fabrication, that are
More informationEECS130 Integrated Circuit Devices
EECS130 Integrated Circuit Devices Professor Ali Javey 9/13/2007 Fabrication Technology Lecture 1 Silicon Device Fabrication Technology Over 10 15 transistors (or 100,000 for every person in the world)
More informationUsing ULS24 CMOS Bio-imager as a Readout Sensor for Chemiluminescence Immunoassay and DNA Hybridization Assay
Using ULS24 CMOS Bio-imager as a Readout Sensor for Chemiluminescence Immunoassay and DNA Hybridization Assay Updated: Nov 11, 2016 Introduction Immunoassay is a widely used method for detecting the presence
More informationEV Group 300mm Wafer Bonding Technology July 16, 2008
EV Group 300mm Wafer Bonding Technology July 16, 2008 EV Group in a Nutshell st Our philosophy Our mission in serving next generation application in semiconductor technology Equipment supplier for the
More informationToday s Class. Materials for MEMS
Lecture 2: VLSI-based Fabrication for MEMS: Fundamentals Prasanna S. Gandhi Assistant Professor, Department of Mechanical Engineering, Indian Institute of Technology, Bombay, Recap: Last Class What is
More informationFABRICATION OF CMOS INTEGRATED CIRCUITS. Dr. Mohammed M. Farag
FABRICATION OF CMOS INTEGRATED CIRCUITS Dr. Mohammed M. Farag Outline Overview of CMOS Fabrication Processes The CMOS Fabrication Process Flow Design Rules EE 432 VLSI Modeling and Design 2 CMOS Fabrication
More informationGeneral Introduction to Microstructure Technology p. 1 What is Microstructure Technology? p. 1 From Microstructure Technology to Microsystems
General Introduction to Microstructure Technology p. 1 What is Microstructure Technology? p. 1 From Microstructure Technology to Microsystems Technology p. 9 The Parallels to Microelectronics p. 15 The
More informationPROCESS FLOW AN INSIGHT INTO CMOS FABRICATION PROCESS
Contents: VI Sem ECE 06EC63: Analog and Mixed Mode VLSI Design PROCESS FLOW AN INSIGHT INTO CMOS FABRICATION PROCESS 1. Introduction 2. CMOS Fabrication 3. Simplified View of Fabrication Process 3.1 Alternative
More informationMicro- and Nano-Technology... for Optics
Micro- and Nano-Technology...... for Optics 3.2 Lithography U.D. Zeitner Fraunhofer Institut für Angewandte Optik und Feinmechanik Jena Electron Beam Column electron gun beam on/of control magnetic deflection
More informationSurface Micromachining
Surface Micromachining Micro Actuators, Sensors, Systems Group University of Illinois at Urbana-Champaign Outline Definition of surface micromachining Most common surface micromachining materials - polysilicon
More informationMOLECULAR DIAGNOSTICS. AIT Austrian Institute of Technology GmbH Center for Health & Bioresources
MOLECULAR DIAGNOSTICS AIT Austrian Institute of Technology GmbH Center for Health & Bioresources AIT AUSTRIAN INSTITUTE OF TECHNOLOGY OWNERSHIP STRUCTURE 49,54% FEDERATION OF AUSTRIAN INDUSTRIES 50,46%
More informationNanoSystemsEngineering: NanoNose Final Status, March 2011
1 NanoSystemsEngineering: NanoNose Final Status, March 2011 The Nanonose project is based on four research projects (VCSELs, 3D nanolithography, coatings and system integration). Below, the major achievements
More informationFemtosecond micromachining in polymers
Femtosecond micromachining in polymers Prof. Dr Cleber R. Mendonca Daniel S. Corrêa Prakriti Tayalia Dr. Tobias Voss Dr. Tommaso Baldacchini Prof. Dr. Eric Mazur fs-micromachining focus laser beam inside
More informationMagCore Automated Nucleic Acid Extractor Overview
MagCore Automated Nucleic Acid Extractor Overview Cost -Effective Cost-Effective MagCore HF16 New Generation MagCore HF16 Plus New! Spectrophotometer Built-in MagCore Super New! Economical and Space Saving
More informationOn-chip MEMS for automated chip-to-chip assembly
On-chip MEMS for automated chip-to-chip assembly Dr. Ir. Marcel Tichem, Ir. Tjitte-Jelte Peters, Kai Wu MSc TU Delft, Precision and Microsystems Engineering Photonics Event, Koningshof, Veldhoven, 2 June
More informationS C I E N T I F I C E N G I N E E R
SCIENTIF IC ENGINEER SUMMARY: Research Scientist with a PHD in Engineering Physics with numerous Publications, and Patents. Extensive R&D experience. Expertise includes working with nano and measurement
More informationLect. 2: Basics of Si Technology
Unit processes Thin Film Deposition Etching Ion Implantation Photolithography Chemical Mechanical Polishing 1. Thin Film Deposition Layer of materials ranging from fractions of nanometer to several micro-meters
More informationDPN 5000 System. Figure 1: The DPN 5000 System. Page 1 of 5. Created on 9/9/2011 Revision
Introduction NanoInk s is a dedicated, versatile instrument capable of nanopatterning a variety of materials with nanoscale accuracy and precision. With NanoInk s proprietary MEMs devices and deposition
More informationSUPPLEMENTARY INFORMATION
SUPPLEMENTARY INFORMATION doi:.38/nphoton..7 Supplementary Information On-chip optical isolation in monolithically integrated nonreciprocal optical resonators Lei Bi *, Juejun Hu, Peng Jiang, Dong Hun
More informationFabrication Process. Crystal Growth Doping Deposition Patterning Lithography Oxidation Ion Implementation CONCORDIA VLSI DESIGN LAB
Fabrication Process Crystal Growth Doping Deposition Patterning Lithography Oxidation Ion Implementation 1 Fabrication- CMOS Process Starting Material Preparation 1. Produce Metallurgical Grade Silicon
More informationIntegrated photonic devices for sensing and optical communication in the near- and mid- IR
Integrated photonic devices for sensing and optical communication in the near- and mid- IR Dr. Senthil M Ganapathy (smg@orc.soton.ac.uk) Prof. James S Wilkinson (jsw@orc.soton.ac.uk) Motivation: Integrated
More informationREAGENTLESS SENSORS WAVEGUIDE GRATING COUPLING SENSORS MACH-ZEHNDER INTERFEROMETER SENSORS SURFACE PLASMON RESONANCE SENSORS
REAGENTLESS SENSORS WAVEGUIDE GRATING COUPLING SENSORS MACH-ZEHNDER INTERFEROMETER SENSORS SURFACE PLASMON RESONANCE SENSORS Reagentless Grating Coupler Sensor Angle, θ, is related to the analyte refractive
More informationExamples of dry etching and plasma deposition at Glasgow University
Examples of dry etching and plasma deposition at Glasgow University Glasgow has pioneered and established many novel research activities involving the development of new dry etch processes and dry etch
More informationLab-on-a-Chip (LOC) Miniaturization on micro- and nanoscale.
Lab-on-a-Chip (LOC) Miniaturization on micro- and nanoscale http://nanob2a.cin2.es/publication/articles/integrated-optical-devices-for-lab-on-a-chip-biosensing-applications, downloaded 14.04.16 www.kit.edu
More informationCMOS Fabrication. Dr. Bassam Jamil. Adopted from slides of the textbook
CMOS Fabrication Dr. Bassam Jamil Adopted from slides of the textbook CMOS Fabrication CMOS transistors are fabricated on silicon wafer Lithography process similar to printing press On each step, different
More informationTEPZZ 5 Z 6A_T EP A1 (19) (11) EP A1 (12) EUROPEAN PATENT APPLICATION. (43) Date of publication: Bulletin 2012/46
(19) (12) EUROPEAN PATENT APPLICATION TEPZZ 5 Z 6A_T (11) EP 2 523 026 A1 (43) Date of publication: 14.11.2012 Bulletin 2012/46 (21) Application number: 12167332.1 (51) Int Cl.: G02B 6/12 (2006.01) G02B
More informationMultiphoton lithography based 3D micro/nano printing Dr Qin Hu
Multiphoton lithography based 3D micro/nano printing Dr Qin Hu EPSRC Centre for Innovative Manufacturing in Additive Manufacturing University of Nottingham Multiphoton lithography Also known as direct
More informationMouth Guards, Sweatbands, and Bandages: On-body Chemical Sensors. Christopher Salthouse, Dev and Linda Gupta Professor of Electrical Engineering
Mouth Guards, Sweatbands, and Bandages: On-body Chemical Sensors Christopher Salthouse, Dev and Linda Gupta Professor of Electrical Engineering Know Your Health Continuous Chemical Monitoring Bandage Sweatband
More information5.8 Diaphragm Uniaxial Optical Accelerometer
5.8 Diaphragm Uniaxial Optical Accelerometer Optical accelerometers are based on the BESOI (Bond and Etch back Silicon On Insulator) wafers, supplied by Shin-Etsu with (100) orientation, 4 diameter and
More information200mm Next Generation MEMS Technology update. Florent Ducrot
200mm Next Generation MEMS Technology update Florent Ducrot The Most Exciting Industries on Earth Semiconductor Display Solar 20,000,000x reduction in COST PER TRANSISTOR in 30 years 1 20x reduction in
More informationPower Vision Ltd. PV Research. Power Vision Ltd. Unit R2, Herald Park, Crewe, Cheshire, CW1 6EA, UK Tel:
Power Vision Ltd PV Research Power Vision Ltd Unit R2, Herald Park, Crewe, Cheshire, CW1 6EA, UK www.pvoptical.com Tel: +44 1270 253000 Flexible Whether it be fast AR coating onto temperature sensitive
More informationAIT - Austrian Institute of Technology
BIOMARKER DISCOVERY, BIOINFORMATICS, AND BIOSENSOR DEVELOPMENT Technology Experience AIT Austrian Institute of Technology Low-Emission Transport AIT - Austrian Institute of Technology Energy Health & Bioresources
More informationCenter for Integrated Sensor Systems, Danube University Krems, Krems an der Donau, Austria; 2
Proceedings Electromagnetic Characterization and Simulation of a Carbonate Buffer System on a Microwave Biosensor Lisa-Marie Wagner 1, *, Florian Strasser 2, Eva Melnik 2 and Martin Brandl 1 1 Center for
More informationEnhancement of electrochemical biosensor performances using redox cycling at 3D sub-micrometer scale electrode architectures.
Enhancement of electrochemical biosensor performances using redox cycling at 3D sub-micrometer scale electrode architectures Heungjoo Shin School of Mechanical and Nuclear Engineering Contents 1 Introduction
More informationNear- and mid- infrared group IV photonics
Near- and mid- infrared group IV photonics C. G. Littlejohns 1,2, M. Saïd Rouifed 1, H. Qiu 1, T. Guo Xin 1, T. Hu 1, T. Dominguez Bucio 2, M. Nedeljkovic 2, G. Z. Mashanovich 2, G. T. Reed 2, F. Y. Gardes
More informationThomas M. Adams Richard A. Layton. Introductory MEMS. Fabrication and Applications. Springer
Thomas M. Adams Richard A. Layton Introductory MEMS Fabrication and Applications Springer Contents Preface xiü Part I Fabrication Chapter 1: Introduction 3 1.1 What are MEMS? 3 1.2 Why MEMS? 4 1.2.1. Low
More informationMicrofabrication of Heterogeneous, Optimized Compliant Mechanisms SUNFEST 2001 Luo Chen Advisor: Professor G.K. Ananthasuresh
Microfabrication of Heterogeneous, Optimized Compliant Mechanisms SUNFEST 2001 Luo Chen Advisor: Professor G.K. Ananthasuresh Fig. 1. Single-material Heatuator with selective doping on one arm (G.K. Ananthasuresh)
More informationWide Dynamic Range Sensing in Photonic Crystal Microcavity. Biosensors
Wide Dynamic Range Sensing in Photonic Crystal Microcavity Biosensors Chun-Ju Yang 1 *, Hai Yan 1,Yi Zou 1, Swapnajit Chakravarty 2 *, Naimei Tang 2, Zheng Wang 1, Ray T. Chen 1, 2 * 1 Dept. Electrical
More informationDiffusion Doped Plasma Dispersion Silicon Modulators
Diffusion Doped Plasma Dispersion Silicon Modulators Vadivukkarasi Jeyaselvan a and Shankar Kumar Selvaraja a a Centre for Nano Science and engineering, Indian Institute of Science, Bengaluru, India ABSTRACT
More informationMonolithic Microphotonic Optical Isolator
Monolithic Microphotonic Optical Isolator Lei Bi, Juejun Hu, Dong Hun Kim, Peng Jiang, Gerald F Dionne, Caroline A Ross, L.C. Kimerling Dept. of Materials Science and Engineering Massachusetts Institute
More informationEE 5344 Introduction to MEMS. CHAPTER 3 Conventional Si Processing
3. Conventional licon Processing Micromachining, Microfabrication. EE 5344 Introduction to MEMS CHAPTER 3 Conventional Processing Why silicon? Abundant, cheap, easy to process. licon planar Integrated
More informationFabrication of Micro and Nano Structures in Glass using Ultrafast Lasers
Fabrication of Micro and Nano Structures in Glass using Ultrafast Lasers Denise M. Krol University of California, Davis IMI Glass Workshop Washington DC April 15-17, 2007 Femtosecond laser modification
More informationINTEGRATED OPTICAL ISOLATOR
INTEGRATED OPTICAL ISOLATOR Presented by Gokhan Ozgur Advisor: Dr. Gary Evans July 02, 2004 Electrical Engineering - SMU INTRODUCTION They are used to eliminate light that is back-reflected, from splices
More informationEnzyme based biosensors
Enzyme based biosensors Brief history; how it all started? 1916 First report on immobilization of proteins : adsorption of invertase on activated charcoal 1922 First glass ph electrode 1956 Clark published
More informationThe Physical Structure (NMOS)
The Physical Structure (NMOS) Al SiO2 Field Oxide Gate oxide S n+ Polysilicon Gate Al SiO2 SiO2 D n+ L channel P Substrate Field Oxide contact Metal (S) n+ (G) L W n+ (D) Poly 1 3D Perspective 2 3 Fabrication
More informationOptical Fiber Sensors for Biomedical Applications
Optical Fiber Sensors for Biomedical Applications Xingwei (Vivian) Wang, Ph.D. Assistant Professor Department of Electrical and Computer Engineering University of Massachusetts Lowell Phone: (978) 934-1981
More informationCharacteristics of Heat-Annealed Silicon Homojunction Infrared Photodetector Fabricated by Plasma-Assisted Technique
PHOTONIC SENSORS / Vol. 6, No. 4, 216: 345 35 Characteristics of Heat-Annealed Silicon Homojunction Infrared Photodetector Fabricated by Plasma-Assisted Technique Oday A. HAMMADI * Department of Physics,
More informationPRICE LIST 3IT.NANO 2017
This price list is valid from July 1st to December 31,. Rates may be subject to change. LNN AREA - CLEANROOM class 100 Access fee and operator hourly rate LNN access fee Operator hourly rate Equipment
More informationWelcome MNT Conference 1 Albuquerque, NM - May 2010
Welcome MNT Conference 1 Albuquerque, NM - May 2010 Introduction to Design Outline What is MEMs Design General Considerations Application Packaging Process Flow What s available Sandia SUMMiT Overview
More informationCharacterisation of Fe-Ni amorphous thin films for possible magnetostrictive sensor applications
Characterisation of Fe-Ni amorphous thin films for possible magnetostrictive sensor applications Contents 9.1 Introduction 9.2 Experiment 9.3 Results and Discussions 9.4 Conclusion 9.1 Introduction Magnetostrictive
More informationWhy Probes Look the Way They Do Concepts and Technologies of AFM Probes Manufacturing
Agilent Technologies AFM e-seminar: Understanding and Choosing the Correct Cantilever for Your Application Oliver Krause NanoWorld Services GmbH All mentioned company names and trademarks are property
More informationProcedure to deposit Gold only on the sidewalls of rectangular nanostructures and its applications
Procedure to deposit Gold only on the sidewalls of rectangular nanostructures and its applications Zain Zaidi, Saara Khan, James Conway, J Provine, Michelle Rincon, Roger Howe Stanford University, USA
More informationSUPPLEMENTARY MATERIALS. An Integrated Microfluidic Platform for In-situ Cellular Cytokine Secretion Immunophenotyping
SUPPLEMENTARY MATERIALS An Integrated Microfluidic Platform for In-situ Cellular Cytokine Secretion Immunophenotyping Nien-Tsu Huang a #, Weiqiang Chen a,b #, Bo-Ram Oh a, Timothy T. Cornell c, Thomas
More informationThin Films: Sputtering Systems (Jaeger Ch 6 & Ruska Ch 7,) Can deposit any material on any substrate (in principal) Start with pumping down to high
Thin Films: Sputtering Systems (Jaeger Ch 6 & Ruska Ch 7,) Can deposit any material on any substrate (in principal) Start with pumping down to high vacuum ~10-7 torr Removes residual gases eg oxygen from
More informationSupporting Information
Supporting Information Fast-Response, Sensitivitive and Low-Powered Chemosensors by Fusing Nanostructured Porous Thin Film and IDEs-Microheater Chip Zhengfei Dai,, Lei Xu,#,, Guotao Duan *,, Tie Li *,,
More informationEMBG Resonators Based on Carbon Nanotubes for DNA Detection
ROMANIAN JOURNAL OF INFORMATION SCIENCE AND TECHNOLOGY Volume 14, Number 3, 2011, 212 221 EMBG Resonators Based on Carbon Nanotubes for DNA Detection Alina CISMARU 1, Marius VOICU 1, Antonio RADOI 1, Adrian
More informationDirected Assembly of Nanoparticles for Biosensing Applications
NSF Nanoscale Science and Engineering Center for High-rate Nanomanufacturing (CHN) www.nano.neu.edu Directed Assembly of Nanoparticles for Biosensing Applications Ahmed Busnaina, Director, NSF Nanoscale
More informationPEAK EFFICIENCIES WITH FALLING MANUFACTURING COSTS
PEAK EFFICIENCIES WITH FALLING MANUFACTURING COSTS Simple and cost-effective introduction of PERC technology into the mass production of solar cells Kerstin Strauch, Florian Schwarz, Sebastian Gatz 1 Introduction
More information