is a registered trade mark of 3M company, Vespel is a registered trade mark of DUPONT, ELGILOY is a registered trade mark of ELGILOY Company.

Transcription

1 HOW TO ORDER PART NUMBER M4.1 Example : M4.1V MT 2V1 l / K A/B : B1/4 MS Valve Series and Surface Finish M4.1U Ra 0,15μm EP (6 μin Ra) M4.1V Ra 0,25μm EP (10 μin Ra) M4.1S Ra 0,4μm nonep (15 μin Ra) 3 - Valve Configurations 2V1 2 ports in line See below for other configurations 5 - Seat Material K PCTFE (Kel-F ) V PI (Vespel ) P PVDF M Metal (on request) 7 - Options MS Valve fitted with locking service FT Panel mounting Back mounting CI Electric limit switch (LP actuators onl GAZEL -Female (face seal)* Valve configurations GAZEL -Male (face seal)* 2 - Valve Actuation (Standard: Normally Closed=NC) QT Manually actuated - Quarter Turn MT Manually actuated - Multi Turn LP Pneumatically actuated - Low Pressure HP Pneumatically actuated - High Pressure (Add - NO - for Normally Open version) (Add - NF - for Normally Close version) Standard colour: for handles: white (other colours on request) for LP actuators: NO=green NF=blue for HP actuators: NO/NF=white 4 - Body Material (others on request) A AISI 316L, VAR I AISI 316L H Hastelloy (on request) 6 - End Connections V1/4-F GAZEL 1/4" - Female (Face Seal)* V1/4-M GAZEL 1/4" - Male (Face Seal)* B1/4 BWO 1/4" - Standard (Orbital Weld) B6 BWO 6 mm (Orbital Weld) RDB 6 SAGALOK Double ring Fittings: 6 mm RDB 1/4 SAGALOK Double ring Fitting: 1/4 BWO for standard welding heads SAGALOK Double ring Fitting *All GAZEL Face Seals are VCR compatible. VCR is a registered trade mark of CAJON CO., HASTELLOY is a registered trade mark of CABOT Corp., Kel-F is a registered trade mark of 3M company, Vespel is a registered trade mark of DUPONT, ELGILOY is a registered trade mark of ELGILOY Company. M4.1 SPRINGLESS DIAPHRAGM VALVES FOR HP AND UHP APPLICATIONS M(STANDARD AND GAS SPECIFIC) A total component solution, from source to process 4.1 M4.1-leaf L-7505 Lintgen, G.-D. of Luxembourg Tel , fax , M4.1-leaf 09-2

2 FEATURE a unique proven design M4.1 M4.1 Individual Serial number, for full traceability Compact size Precision electropolishing of all internal surfaces Laser welded diaphragm for maximum reliability Low particule generation Unique high pressure outboard leak test port Selected Stainless Steels for low sulfur content as well as optimized impurity levels Assembling, testing & Packaging in cleanroom Cl. 10 Visual Open/Close indicator (ON/OFF window on Multiturn version) Fully functional from vacuum to rated pressure Tied diaphragm design for positive seat opening and retraction Excellent purgeability Aerodynamic fully swept flow passage Fluid Media Standard, High and Ultra High Purity, corrosive and non-corrosive gases Max working pressure M4.1 Manual vacuum to 240 bar (3500 PSI) M4.1 Pneumatic - Low Pressure 17 bar (250 PSI) M4.1 Pneumatic - High Pressure 200 bar (2900 PSI) Pneumatic actuator opening pressure 5-7 bar ( PSI) Temperature range -20 C to + 80 C (-4 F to 176 F) Burst Pressure 850 bar (12500 PSI) Flow Capacity (C v ) M4.1 Manual C v = 0.26 M4.1 Pneumatic C v = 0.26 Certified max. Helium inboard leak rate < mbar.l/sec Certified max. Helium outboard leak rate (at max. pressure) < mbar.l/sec Certified max. Helium across the seat leak rate (at max. pressure) < mbar.l/sec Wetted volume < 1.2 cc Mounting Panel or back mounting Nominal seatdiameter 4 mm (0,16 ) Manufactured to the THREE STAR PROCESS CONSTRUCTION MATERIALS Valve Grade & Materials Parts M4.1S M4.1V M4.1U Body SS 316L SS 316L SS 316L VAR Wetted parts Surface Finish < 0,4 μm non EP (15μin Ra) < 0,25 μm EP (10μin Ra) < 0,15 μm EP (6μin Ra) Diaphragm Hastelloy Seat Material Kel-F (Vespel, PVDF, metal on request) Non-wetted Backup diaphragms Elgiloy parts all others Stainless Steel or alloys Manual Actuation Pneumatic Actuation M4.1 - Pneumatic Valve Low Pressure M4.1 Multiturn valve (MT) with open/ close window Parts for all valve grades Parts Low Pressure High Pressure Upper spindle Handle Brass Aluminum or Extruded Plastic Stainless Steel or Alloys Actuator Body SS 316 L Aluminum Piston Aluminum O-rings NBR - PC 851 Stainless Steel or Alloys M4.1 - Pneumatic valve High Pressure M4.1 bottom view M4.1-leaf 09-2 M4.1 - Quarter turn (QT) valve M4.1-leaf 09-2

3 H PART NUMBER Example : M4SI V BP 2V1 K A/B:B1/ Valve Series, Surface finish & Body material M4-SI V - Ra 0.25 μm EP (10 μin Ra)-316 L VAR M4-SI S - Ra 0.4 μm (15 μin Ra)-316 L low sulf. 2 - Valve Actuation BM Multi-Turn Handwheel (8.6bar) LM Multi-Turn Handwheel (20bar) HM Multi-Turn Handwheel (240bar) BPNF Pneumatically actuated (8.6bar) LPNF/LPNO* Pneumatically actuated (20bar) HPNF/HPNO*Pneumatically actuated (240bar) BQ Quarter-Turn Handwheel (8.6bar) LQ Quarter-Turn Handwheel (20bar) *NF=normally closed /NO=normally open 3 - Valve Configurations 2V1 2 ports in line See below for other configurations GAZEL -Female (face seal)* Valve Configurations GAZEL -Male (face seal)* BWO for standard welding heads 4 - Seat Material K PCTFE (Kel-F ) V Pi (Vespel ) (optional) P PVDF (optional) 5 - End Connections V 1/4 F GAZEL 1/4" - Female (Face Seal*) V 1/4 M GAZEL 1/4" - Male (Face Seal*) B 1/4 BWO 1/4" (Butt Orbital Weld) B 6 BWO 6 mm (Butt Orbital Weld) 6 - Options FT Panel Mounting CI Electric limit switch Standard Colors BM,LM,HM : BPNF LPNF LPNO HPNF/HPNO BQ,LQ SAGALOK Double ring Fitting Blue Blue Blue Green White Black M4-SI - 24 rue de Diekirch, B.P.19, L-7505 Lintgen, Luxembourg Tel , fax , salesequipment@rotarex.com *All GAZEL Face Seals are VCR compatible. VCR is a registered trade mark of CAJON CO., Kel-F is a registered trade mark of 3M company, Vespel is a registered trade mark of DuPont. All rights of change reserved. M4-SI-leaf 06-4 M4-SI (Reverse seat) DIAPHRAGM LINE VALVES FOR HP AND UHP APPLICATIONS M(STANDARD AND GAS SPECIFIC) A total component solution, from source to process 4-SI

4 FEATURE a unique proven design M4-SI M4-SI Individual Serial number, for full traceability Compact size Precision electropolishing of all internal surfaces Long life technology Low particule generation Selected Stainless Steels for low sulfur content as well as optimized impurity levels Manufactured to the THREE STAR PROCESS Assembling, testing & Packaging in cleanroom Cl. 10 Visual Open/Close Indicator (ON/OFF window on Multiturn version) Fully functional from vacuum to rated pressure Aerodynamic fully swept flow passage Excellent purgeability Fluid Media Standard, HP, UHP, corrosive and non-corrosive gases Max working pressure M4-SI manual multiturn MT 3500 PSI (240 bar) or 290 PSI (20 bar) or 125 PSI (8.6bar) M4-SI pneumatic BPNF 125 PSI (8.6 bar) M4-SI pneumatic LPNF - LPNO 290 PSI (20 bar) M4-SI 1/4 turn QT 125 PSI (8.6 bar) or 290 PSI (20 bar) M4-SI pneumatic HPNF - HPNO 3500 PSI (240 bar) Pneumatic actuator opening pressure 5-7 bar (75 to 105 PSI) Temperature range -20 C to+65 C (-4 F to 149 F)(Vespel seat to:155 C/311 F) Burst pressure PSI (850 bar) Flow Capacity Cv = 0.2 Certified max. Helium inboard leak rate < mbar.l/sec Certified max. Helium outboard leak rate (at max. pressure) < mbar.l/sec Certified max. Helium across the seat leak rate (at max. pressure) < mbar.l/sec Wetted volume < 1.2 cc Mounting Back mounting or optional Panel mounting Nominal seat diameter 4 mm (0.16 ) CONSTRUCTION MATERIALS Valve Grade & Materials Parts M4-SI S M4-SI V Body SS 316 L SS 316 L VAR Wetted Parts Surface Finish < 0,4 μm (15μin Ra) < 0,25 μm EP (10μin Ra) Diaphragm Polished Nickel Alloy Seat material Kel-F (PVDF or Vespel on request ) Non-wetted parts Backup diaphragms Nickel Alloy Stainless Steel or alloys M4-SI Multiturn valve (MT) with open/close window M4-SI - Quarter turn (QT) valve Air connector 1/8 NPT M4-SI bottom view Air connector 1/8 NPT Manual Actuation Pneumatic Actuation Parts for all valve grades Upper Spindel Brass Handle Plastic(Alu.optional for MT) Stainless Steel Parts Actuator Body Aluminium Piston Brass O-rings NBR-PC 851 Stainless Steel M4-SI-leaf 07-3 M4-SI - Pneumatic valve Medium Pressure (LPNF, LPNO) M4-SI Pneumatic valve Low pressure (BPNF) M4-SI Pneumatic valve High Pressure (HPNF, HPNO) M4-SI-leaf 06-4

5 M8.1-leaf 09-2 Valves & Fittings HOW TO ORDER PART NUMBER Example : M8.1S MT 2V1 l / K A/B:B3/8 MS Valve Series and Surface Finish M8.1U Ra 0,15μm EP (6 μin Ra) M8.1V Ra 0,25μm EP (10 μin Ra) M8.1S Ra 0,4μm nonep (15 μin Ra) 3 - Valve Configurations 2V1 2 ports in line See below for other configurations 5 - Seat Material K PCTFE (Kel-F ) V PI (Vespel ) P PVDF M Metal (on request) 7 - Options MS Valve fitted with locking device (manual) FT Panel mounting Back mounting CI Electric limit switch (LP actuators only) GAZEL -Female (face seal)* Valve Configurations GAZEL -Male (face seal)* 4 - Body Material (others on request) A AISI 316L, VAR I AISI 316L H Hastelloy (on request) 6 - End Connections V3/8-F GAZEL 3/8 - Female (Face Seal)* V3/8-M GAZEL 3/8 - Male (Face Seal)* B3/8 BWO 3/8" - Standard (Orbital Weld) B1/2 BWO 1/2" - (Orbital Weld) B10 BWO 10 mm (Orbital Weld) B12 BWO 12 mm (Orbital Weld) RDB 10 SAGALOK Double ring fitting: 10 mm RDB 12 SAGALOK Double ring fitting: 12 mm RDB 1/2 SAGALOK Double ring fitting: 1/2 RDB 3/8 SAGALOK Double ring fitting: 3/8 -V A-Valves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg Tel. * , fax * , info@selfa.rotarex.com M Valve Actuation (Standard: Normally closed) QT Manually actuated - Quarter Turn MT Manually actuated - Multi Turn LP Pneumatically actuated - Low Pressure HP Pneumatically actuated - High Pressure (Add - NO - for Normally Open version) (Add - NF - for normally close version) Standard colour: for handles: white (other colours on request) for LP actuators: NO=green NF=blue for HP actuators: NO/NF=white BWO for standard welding heads SAGALOK Double ring fitting *All GAZEL Face Seals are VCR compatible. VCR is a registered trade mark of CAJON CO., HASTELLOY is a registered trade mark of CABOT Corp., Kel-F is a registered trade mark of 3M company, Vespel is a registered trade mark of DUPONT, ELGILOY is a registered trade mark of ELGILOY Company. M8.1-leaf 09-2 Valves & Fittings M8.1 SPRINGLESS DIAPHRAGM VALVES FOR HP AND UHP APPLICATIONS M(STANDARD AND GAS SPECIFIC) A total component solution, from source to process 8.1

6 Valves & Fittings Valves & Fittings FEATURE a unique proven design M8.1 M8.1 The M8-1 was designed in response to the industry s needs for a compact HIGH FLOW high/low pressure valve dedicated to gas distribution techniques that require high flow rates. This valve is ideal for handling high flow gases such as HCl, N 2 O, etc. upstream and downstream of the source regulator. Its compact size and standard panel mount holes enable it to be integrated into gas supply systems where previously only standard valves with low Cv s could be used. Individual Serial number, for full traceability Compact size Precision electropolishing of all internal surfaces Low particule generation Excellent purgeability Laser welded diaphragm for maximum reliability Selected Stainless Steels for low sulfur content as well as optimized impurity levels Assembling, testing & Packaging in cleanroom Cl. 10 Visual Open/Close indicator Unique high pressure outboard leak test port Fully functional from vacuum to rated pressure Tied diaphragm design for positive seat opening and retractation Aerodynamic fully swept flow passage Fluid Media Standard, High and Ultra High Purity, corrosive and non-corrosive gases Max working pressure M8.1 Manual vacuum to 240 bar (3500 PSI) M8.1 Pneumatic - Low Pressure 17 bar (250 PSI) M8.1 Pneumatic - High Pressure 200 bar (2900 PSI) Pneumatic actuator operating pressure 5-7 bar ( PSI) Temperature range -20 C to + 80 C (-2 F to 176 F) Burst Pressure 850 bar (12500 PSI) Flow Capacity (C v ) M8.1 Manual C v = 0.53 M8.1 Pneumatic C v = 0.53 Certified max. Helium inboard leak rate < mbar.l/sec Certified max. Helium outboard leak rate (at max. pressure) < mbar.l/sec Certified max. Helium across the seat leak rate (at max. pressure) < mbar.l/sec Wetted volume < 1.6 cc Mounting Front or back mounting Nominal seat Diameter 8 mm (0,32 ) Manufactured to the THREE STAR PROCESS CONSTRUCTION MATERIALS Valve Grade & Materials Parts M8.1S M8.1V M8.1U Body SS 316L SS 316L SS 316L VAR Wetted parts Surface Finish < 0,4 μm non EP (15μin Ra) < 0,25 μm EP (10μin Ra) < 0,15 μm EP (6μin Ra) Diaphragm Hastelloy Seat Material Kel-F (Vespel, PVDF, metal on request) Non-wetted Backup diaphragms Elgiloy parts all others Stainless Steel or alloys M8.1 Quarter turn (QT) valve Manual Actuation Pneumatic Actuation M8.1- Pneumatic valve Low Pressure M8.1-leaf 09-2 Parts for all valve grades Upper spindle Brass Handle Aluminum or Extruded Plastic Stainless Steel or Alloys Parts Low Pressure High Pressure Actuator Body SS 316 L Aluminum Piston Aluminum O-rings NBR - PC 851 Stainless Steel or Alloys M8.1 Multi turn valve (MT) with on/off window ø 25.4 (1.0) M8.1 Bottom view ( 1.14 ) M8.1- High Pressure Pneumatic valve M8.1-leaf 09-2

7 EQUIPMENT HOW TO ORDER M8SI EQUIPMENT PART NUMBER Example : M8SI V BPNF 2V1 K A/B:B3/ Valve Series & Surface finish M8SI V - Ra 0.25 μm (10 μin Ra) EP M8SI S - Ra 0.4 μm (15 μin Ra) Non EP (with tube fittings only) Standard Valve Actuation LM Multi-Turn Handwheel (20 bar) BPNF/BPNO* Pneumatically actuated (10 bar) LQ Quarter-Turn Handwheel (20 bar) *NF=normally closed / NO=normally open Standard End Connections V 3/8-F GAZEL 3/8 - Female (Face Seal) V 3/8-M GAZEL 3/8 - Male (Face Seal) non swivel B 3/8 BWO 3/8 (Orbital Welding) B 1/2 BWO 1/2 (Orbital Welding) B 10 BWO 10 mm (Orbital Welding) B 12 BWO 12 mm (Orbital Welding) RDB 3/8 Tube fitting: 3/8 RDB 1/2 Tube fitting: 1/ Optional End Connections A total component solution, from source to process M8SI (Reverse seat) DN8 DIAPHRAGM VALVE FOR HP AND UHP APPLICATIONS MANUAL AND AIR OPERATED PN10 & PN Optional Valve Actuation LQS Quarter turn short lever (20 bar) RDB 10 RDB 12 Tube fitting: 10 mm Tube fitting: 12mm 3 - Standard Valve Configurations 2V1 2 ports in line 3V4 3 ports T configuration See below for other configurations, on request 4 - Seat Material K PCTFE (Kel-F ) Valve Configurations on request 6 - Options FT Panel Mounting (LQ only) Standard colors LM Blue BPNF Blue BPNO Green LQ Blue Equipment BP.19 - L-7505 Lintgen, Luxembourg Tel , fax , info@rotarex.com Kel-F is a registered trademark of 3M company. M8SI-leaf M8SI

8 EQUIPMENT EQUIPMENT FEATURE a unique proven design M8SI M8SI Metal/Metal Tightness to the atmosphere Ultra High Purity Cleaning according to Specifications Long life time technology Individual serial number, for full traceability Compact size Precision electropolishing of all internal surfaces Low particule generation Spring-less, O-ring-less, thread-less design Double tightness for integral He leak testing Selected Stainless Steels for low sulfur content as well as optimized impurity levels Individual Helium leak Pmax - Semaspec # B-STD, testing method Assembling, testing & packaging in cleanroom Class ISO4/ISO7 Visual Open/Close Indicator on manual valves Fully functional from vacuum to rated pressure Aerodynamic fully swept flow passage Excellent purgeability Fluid Media* Standard, HP, UHP, corrosive and non-corrosive gases Max working pressure M8-SI manual multiturn LM 290 PSI (20 bar) M8-SI manual quarter turn LQ 290 PSI (20 bar) M8-SI BPNF -BPNO 140 PSI (10 bar) Pneumatic actuator operating pressure 5-7 bar (75 to 105 PSI) Temperature range -20 C/-4 F to +65 C/149 F (standard) Burst pressure 6500 PSI (450 bar) Flow Capacity M8SI manual LM, pneumatic Cv = 0.5 M8SI manual LQ Cv = 0.4 Certified max. Helium inboard leak rate < mbar.l/sec Certified max. Helium outboard leak rate (at max. pressure) < mbar.l/sec Acc to SEMASPEC # B-STD testing method Certified max. Helium across the seat leak rate (at max. pressure) < mbar.l/sec Wetted volume < 1.6 cc Mounting Back mounting (standard) or panel mounting (optional for LQ only) Nominal seat diameter 8 mm (0.32 ) *acc. to ISO non metallic material gas compatibility Manufactured to the THREE STAR PROCESS MATERIALS Valve Grade & Materials Parts M8-SI S (with tube fittings only) M8-SI V Body SS 316 L low sulfur Wetted Parts Surface Finish < 0,4 μm (15μin Ra) non EP < 0,25 μm (10μin Ra) EP Diaphragm UNS R30003 Seat material Kel-F Non-wetted parts Backup diaphragms UNS R30003 Stainless Steel Quarterturn LQ Multiturn LM Pneumatic BP Manual Actuation Pneumatic Actuation Parts for all valve grades Parts Upper Spindel Brass Actuator Body SS 303 /Aluminium Handle Aluminium Piston Brass /Aluminium /Stainless steel Stainless Steel 316L O-rings NBR Stainless Steel 316L M8SI-leaf Quarterturn LQS Quarterturn LQ, option FT

9 Valves & Fittings HOW TO ORDER M4.1/ / M8.1VB PART NUMBER Example : M4.1VB U MT/MT A K A/B:B 1 / 4 C:V1/4MMS 1 2/ Valves & Fittings A total component solution, from source to process M4-8.1VB-leaf Valve Series and Surface Finish M4.1/M8.1VB U Ra 0,15μm EP (6 μin Ra) M4.1/M8.1VB V Ra 0,25μm EP (10 μin Ra) M4.1/M8.1VB S Ra 0,4μm nonep (15 μin Ra) VB= Standard vertical purge block VT= Vee-Block with transverse purge port VTD= Vee-Block with right-hand purge port VTG= Vee-Block with left-hand purge port 5 - M4.1 VB - End Connections - Port A-B-C-D V 1/4-F GAZEL 1/4" - Female (face seal)* V 1/4-M GAZEL 1/4" - Male (face seal)* B 1/4 BWO 1/4" - Standard (Butt Weld Orbital) B 6 BWO 6 mm - Butt Weld Orbital 5 - M8.1 VB - End Connections - Port A-B-C-D V 3/8-F GAZEL 3/8" - Female (face seal)* V 3/8-M GAZEL 3/8" - Male (face seal)* B 1/2 BWO 1/2" - Standard (Butt Weld Orbital) B 3/8 BWO 3/8" - Butt Weld Orbital SAGALOK Double ring fitting on request A= Inlet Connection B= Outlet Connection C= Vertical Purge (right-hand purge for VT versions) D= Left-hand Purge (when applicable) End Connection GAZEL -Male (face seal)* GAZEL -Female (face seal)* BWO 1/4" (orbital weld) 2 - Valve Actuation (Standard: Normally closed) MT Manually actuated - Multi Turn QT Manually actuated - Quarter Turn LP Pneumatically actuated - Low Pressure HP Pneumatically actuated - High Pressure (Add - NO - for Normally Open version) (Add - NF - for normally close version) 3 - Body Material (others on request) I AISI 316L A AISI 316L, VAR H Hastelloy (on request) 4 - Seat Material K PCTFE (Kel-F ) V PI (Vespel ) P PVDF M Metal (on request) 6 - Options MS Valve fitted with locking device (manual) FT Panel mounting Back mounting CI Electric limit switch (LP actuators only) Dimensions mm (inches) L1 L2 L3 L3VT ,3 M4.1VB (2.40") (2.40") (3.58") (1.39") 54,5 54,5 M8.1VB (2.14") (2.14") M4.1VB M8.1VB ,3 (2.05") (2.05") (2.95") (1.39") 54,5 54,5 (2.14") (2.14") ,2 35,3 (1.81") (1.81") (3.27") (1.39") top port Note: All purge ports in 1/4" side port -V A-Valves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg Tel. * , fax * , info@selfa.rotarex.com *All GAZEL Face Seals are VCR compatible. VCR is a registered trade mark of CAJON CO., HASTELLOY is a registered trade mark of CABOT Corp., Kel-F is a registered trade mark of 3M company, Vespel is a registered trade mark of DUPONT, ELGILOY is a registered trade mark of ELGILOY Company. M4-8.1VB-leaf 09-2 M4.1 / M8.1 VB IN LINE VALVE VEE BLOCK M 4.1 VB 8.1 VB

10 Valves & Fittings Valves & Fittings FEATURE a unique proven design M4.1/ M8.1VB M 4.1/ M8.1VB Individual Serial number, for full traceability Developed from proven M4.1/m8.1 valve technology Gas specific solutions (body and seat materials) No spring in the wetted area for zero particle emission Controlled (PC) electropolishing for better corrosion resistance Assembling, testing & Packaging in cleanroom Class 10 Pneumatic and manual actuation available Unique high pressure leak test port Fluid Media Standard, High and Ultra High Purity, corrosive and non-corrosive gases Max working pressure M4.1/ M8.1VB Manual-Multi-turn -1/4 Turn 240 bar (3500 PSI) M4.1/ M8.1VB Pneumatic - Low Pressure 17 bar (250 PSI) Pneumatic actuator operating pressure 5-7 bar ( PSI) Temperature range -20 C to + 80 C (-2 F to 176 F) Burst Pressure 850 bar (12500 PSI) Flow Capacity (C v ) M4.1/ M8.1VB Manual M4.1VB:C v = 0.26 / M8.1VB:C v = 0.53 M4.1/ M8.1VB Pneumatic M4.1VB:C v = 0.26 / M8.1VB:C v = 0.53 Certified max. Helium inboard leak rate < mbar.l/sec Certified max. Helium outboard leak rate (at max. pressure) < mbar.l/sec Certified max. Helium across the seat leak rate (at max. pressure) < mbar.l/sec Manufactured to the THREE STAR PROCESS CONSTRUCTION MATERIALS Valve Grade & Materials Parts M4.1/ M8.1 VB S M4.1/ M8.1 VB V M4.1/ M8.1 VB U Body SS 316L SS 316L SS 316L VAR Wetted parts Surface Finish < 0,4 μm non EP (15μin Ra) < 0,25 μm EP (10μin Ra) < 0,15 μm EP (6μin Ra) Diaphragm Hastelloy Seat Material Kel-F (Vespel, PVDF, metal on request) Non-wetted Backup diaphragms Elgiloy parts all others Stainless Steel or alloys Refer to last page for L1, L2, L3 and L3VT For right-hand purge only: please order under ref. M4.1-M8.1 VTD For left-hand purge only: please order under ref. M4.1-M8.1 VTG Manual Actuation Pneumatic Actuation Parts for all valve grades Upper spindle Stainless Steel Handle Aluminum or Extruded Plastic Stainless Steel or Alloys Parts Low Pressure High Pressure Actuator Body SS 316 L Aluminum Piston Aluminum O-rings NBR - PC 851 Stainless Steel or Alloys Handwheel with on/off window Pneumatic Actuator 4 mounting holes M5 thread located 45 from center line on a 1.00 (25.4) circle M4-8.1VB-leaf 09-2 M4-8.1VB-leaf 09-2

11 Valves & Fittings HOW TO ORDER PART NUMBER Example : M12 U MT 2V1 I / K A/B : B1/2 FT Valve Series 2 - Valve Actuation M12 Valves & Fittings A total component solution, from source to process M12-U M12-V M12-S UHP - Ra 0.15 μm Ep. (6 μin Ra) HP/UHP - Ra 0.25 μm Ep. (10 μin Ra) HP Version - Ra 0.4 μm non EP (15 μin Ra) MT PP2 Multi-Turn Handwheel Pneumatically actuated (Normally close version) Standard colour: for handles: white (other colours on request) for pneumatic actuators: blue M12 SPRINGLESS DIAPHRAGM VALVES FOR HP AND UHP APPLICATIONS (STANDARD AND GAS SPECIFIC) 3 - Valve Configuration 2V1 2 ports in line 2VPEG 2 Ports in line, upstream purge port - left side 2VPSG 2 Ports in line, downstream purge port - left side 2V1P2 2 Ports in line, 2 purge ports upstream/ downstream/left side 3VT 2 ports in line, full passage, downstream branch ( Te Valve) 3VTPS 2 ports in line, full passage, downstream branch, downstream purge port 5 - Seat Material K PCTFE (Kel-F ) V PI (Vespel ) P PVDF 7 - Options FT Panel Mounting Back Mounting CI Electric Limit Switch (PP2 actuators) GAZEL -Female (face seal)* Configuration with purge ports GAZEL -Male (face seal)* 4 - Body Material (others on request) I AISI 316 L H Hastelloy (on request) 6a - End Connections for 2VPEG/2VPSG/2V1P2/2VI V 1/2-F GAZEL 1/2" - Female (Face Seal*) V 1/2-M GAZEL 1/2" - Male (Face Seal*) B 1/2 BWO 1/2" - (Butt Orbital Weld) B 3/4 BWO 3/4" (Butt Orbital Weld) SAGALOK (Double Ring Fittings on request) Metric BWO available on request Purge port available as BWO 1/4 or GAZEL 1/4 male 6b - End Connections for 3VT/3VTPS B 1/2 BWO 1/2" - (Butt Orbital Weld) B 3/4 BWO 3/4" (Butt Orbital Weld) B1 BWO 1 (Butt Orbital Weld) V1/2-F GAZEL 1/2" - Female (Face Seal*) V1/2-M GAZEL 1/2" - Male (Face Seal*) V3/4-M GAZEL 3/4" - Male (Face Seal*) V3/4-F GAZEL 3/4" - Female (Face Seal*) SAGALOK (Double Ring Fittings on request) Branch available as GAZEL 1/4 or BWO 1/4 or 1/2 Metric BWO available on request Purge port available as GAZEL 1/4 male BWO for standard welding heads Configuration 3VT *All GAZEL Face Seals are VCR compatible. VCR is a registered trade mark of CAJON CO., HASTELLOY is a registered trade mark of CABOT Corp., Kel-F is a registered trade mark of 3M company, Vespel is a registered trade mark of DUPONT, ELGILOY is a registered trade mark of ELGILOY Company. M12 12 M12-leaf V A-Valves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg Tel. * , fax * , info@selfa.rotarex.com M12-leaf 09-2

12 Valves & Fittings Valves & Fittings FEATURE a unique proven design M12 M12 Individual serial number for full traceability Low particle emission Fully swept flow path Reduced gas absorption and desorption from seat material Tied diaphragm design for positive seat opening and retractation Assembling, testing and packaging in cleanroom class 10 Small internal volume Easy purgeability Selected Stainless Steels for low sulfur content as well as optimized impurity levels Fluid Media High Purity and UHP, corrosive and non-corrosive gases Max operating pressure M12 MT manual 15 bar (215 PSI) M12 PP2 pneumatic 15 bar (215 PSI) Min. operating pressure Vacuum (for manual only) Actuator opening pressure 5 to 7 bar (75 to 105 PSI) Temperature range -20 C to +80 C (-4 F to 176 F) Flow coefficient Cv = 1,75 Certified max. Helium inboard leak rate (at max. pressure) <10-9 mbar.l/sec Certified max. Helium outboard leak rate (at max. pressure) <10-9 mbar.l/sec Certified max. Helium leak rate across the seat (at max. pressure) < mbar.l/sec Nominal Seat Diameter 12 mm (0.47 ) Weight M12 MT 1,4 kg M12 PP2 3,1 kg Clean operation, no rubbing Excellent flow coefficient Fully contained Seat Manufactured to the THREE STAR PROCESS Metal to Metal sealing to atmosphere M12-Bottom view CONSTRUCTION MATERIALS Wetted parts Non-wetted parts Valve Grade & Materials Parts S V U Body Stainless Steel 316L Body Surface Finish < 0,4 μm (15μin Ra) non EP < 0,25 μm (10μin Ra) EP < 0,15 μm (6μin Ra) EP Diaphragms Elgiloy Seat material PCTFE (Kel-F ) / PVDF or Vespel (on request) Backup diaphragm Elgiloy Stainless Steel or alloys Manual Actuation Pneumatic Actuation M12-PP2 Upper Spindle Handle Stainless Steel Aluminum Stainless Steel or Alloys Parts O-ring Actuator Body PP2 NBR Aluminum Anodized M12-leaf 09-2 M12-MT M12-leaf 09-2

13 Valves & Fittings HOW TO ORDER PART NUMBER Example : M20 U MT 2V1 I / K A/B : B3/4 FT Valve Series M20-U UHP - Ra 0.15μm Ep. (6μin Ra) M20-V HP/UHP - Ra 0.25μm Ep. (10μin Ra) M20-S HP Version - Ra 0.4μm (15μin Ra) non EP 2 - Valve Actuation MT Multi-Turn Handwheel PP2 Pneumatically actuated (Normally close version) M20 Valves & Fittings A total component solution, from source to process 3 - Valve Configurations 2V1 2 ports in line 2VPEG 2 Ports in line, upstream purge port - left side 2VPSG 2 Ports in line, downstream purge port - left side 2V1P2 2 Ports in line, 2 purge ports upstream/ downstream/left side For Tee configurations please refer to M Seat Material K PCTFE (Kel-F ) V PI (Vespel ) P PVDF 7 - Options FT Panel Mounting Back Mounting CI Electric Limit Switch (PP2 actuators) GAZEL -Female (face seal)* GAZEL -Male (face seal)* Standard colour for handles: white (other colours on request) for pneumatic actuators: blue 4 - Body Material (others on request) I AISI 316 L H Hastelloy (on request) 6 - End Connections for 2VPEG/2VPSG/2V1P2/2VI V 3/4-F GAZEL 3/4" - Female (Face Seal*) V 3/4-M GAZEL 3/4" - Male (Face Seal*) B 3/4 BWO 3/4" (Butt Orbital Weld) B1 BWO 1 (Butt Orbital Weld) V1-M GAZEL 1 - Male (Face Seal*) SAGALOK Double Ring Fittings on request Metric BWO available on request Purge port available as GAZEL 1/4 male BWO for standard welding heads Configuration with purge ports *All GAZEL Face Seals are VCR compatible. VCR is a registered trade mark of CAJON CO., HASTELLOY is a registered trade mark of CABOT Corp., Kel-F is a registered trade mark of 3M company, Vespel is a registered trade mark of DUPONT, ELGILOY is a registered trade mark of ELGILOY Company. M20 20 M20 SPRINGLESS DIAPHRAGM VALVES FOR HP AND UHP APPLICATIONS (STANDARD AND GAS SPECIFIC) M20-leaf V A-Valves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg Tel. * , fax * , info@selfa.rotarex.com M20-leaf 09-2

14 Valves & Fittings Valves & Fittings FEATURE a unique proven design M20 M20 Tied diaphragm design for positive seat opening and retractation Fluid Media High and Ultra High Purity, corrosive and non-corrosive gases Max operating pressure M20 MT manual 15 bar (215 PSI) M20 PP2 pneumatic 15 bar (215 PSI) Individual serial number for full traceability Assembling, testing and packaging in cleanroom class 10 Min. operating pressure Actuator opening pressure Temperature range Vacuum (for manual only) 5 to 7 bar (75 to 105 PSI) -20 C to + 80 C (-4 F to 176 F) Low particle emission Fully swept flow path Reduced gas absorption and desorption from seat material Small internal volume Easy purgeability Selected Stainless Steels for low sulfur content as well as optimized impurity levels Flow Coefficient Cv = 3,5 Certified max. Helium inboard leak rate (at max. pressure) < 10-9 mbar.l/sec Certified max. Helium outboard leak rate (at max. pressure) < 10-9 mbar.l/sec Certified max. Helium across the seat leak rate (at max. pressure) < mbar.l/sec Nominal Seat Diameter 20 mm (0.79 ) Clean operation, no rubbing Excellent flow coefficient Fully contained Seat Manufactured to the THREE STAR PROCESS Metal to Metal sealing to atmosphere M20-Bottom view CONSTRUCTION MATERIALS Wetted parts Non-wetted parts Valve Grade & Materials Parts S V U Body Stainless Steel 316L Body Surface Finish < 0,4 μm (15μin Ra) non EP < 0,25 μm (10μin Ra) EP < 0,15 μm (6μin Ra) EP Diaphragms Elgiloy Seat material PCTFE (Kel-F ) / PVDF or Vespel (on request) Backup diaphragm Elgiloy Stainless Steel or alloys Manual Actuation Pneumatic Actuation M20-PP2 Upper Spindle Handle Stainless Steel Aluminum Stainless Steel or Alloys Parts O-ring Actuator Body PP2 NBR Aluminum Anodized M20-leaf 09-2 M20-MT M20-leaf 09-2

15 Valves & Fittings HOW TO ORDER PART NUMBER Example : M20LT U MT 2V1 I / K A/B : B3/4 CI Valve Series M20LT-U UHP - Ra 0.15 m Ep. (6 in Ra) M20LT-V HP/UHP - Ra 0.25 m Ep. (10 in Ra) M20LT-S HP Version - Ra 0.4 m (15 in Ra) non EP 2 - Valve Actuation MT Multi-Turn Handwheel PP2 Pneumatically actuated(nc) PP2NO Pneumatically actuated(no) M20 LT Valves & Fittings A total component solution, from source to process 3 - Valve Configurations 2V1 2 ports in line 2VPEG 2 Ports in line, upstream purge port - left side 2VPSG 2 Ports in line, downstream purge port - left side 2V1P2 2 Ports in line, 2 purge ports upstream/ downstream/left side 5 - Seat Material K PCTFE (Kel-F ) V PI (Vespel ) P PVDF 7 - Options Back Mounting CI Electric Limit Switch (PP2 actuators) GAZEL -Female (face seal)* GAZEL -Male (face seal)* Standard colour for handles: BLUE (other colours on request) for pneumatic actuators: blue 4 - Body Material (others on request) I AISI 316 L H Hastelloy (on request) 6 - End Connections for 2VPEG/2VPSG/2V1P2/2VI B 1/2 BWO 1/2" (Butt Orbital Weld) V 1/2-F GAZEL 1/2" - Female (Face Seal*) V 1/2-M GAZEL 1/2" - Male (Face Seal*) B 3/4 BWO 3/4" (Butt Orbital Weld) V 3/4-F GAZEL 3/4" - Female (Face Seal*) V 3/4-M GAZEL 3/4" - Male (Face Seal*) B1 BWO 1 (Butt Orbital Weld) SAGALOK Double Ring Fittings on request Metric BWO available on request V 1/4 MI GAZEL 1/4" - Male fix(face Seal*) Purge Port V 1/4 MI* GAZEL 1/4" - Male fix(face Seal*) Purge Port with SS316L plug BWO for standard welding heads Configuration with purge ports *All GAZEL Face Seals are VCR compatible. VCR is a registered trade mark of SWAGELOK COMPANY, HASTELLOY is a registered trade mark of CABOT Corp., Kel-F is a registered trade mark of 3M company, Vespel is a registered trade mark of DUPONT M20 L 20 LT M20 LT SPRINGLESS DIAPHRAGM VALVES FOR LONG CYCLE LIFE TIME HP AND UHP APPLICATIONS (STANDARD AND GAS SPECIFIC) M20lt-leaf 10-9 CEODEUX S.A. B.P.19 - L-7505 Lintgen, G.-D. of Luxembourg Tel , fax , info@selfa.rotarex.com M20lt-leaf 10-9

16 Valves & Fittings Valves & Fittings FEATURE a unique proven design M20 LT M20 LT Tied diaphragm design for positive seat opening and retraction Long Cycle Life Time (up to 7 mio. cycles) Fluid Media Max operating pressure Min. operating pressure High and Ultra High Purity, corrosive and non-corrosive gases 15 bar (215 PSI) Vacuum (for manual and PP2) Individual serial number for full traceability Low particle emission (threadless, springless design) threaded leakage detection port Assembling, testing and packaging in cleanroom class 10 Actuator opening pressure 5 to 7 bar (75 to 105 PSI) Temperature range -20 C to + 80 C (-4 F to 176 F) Flow Coefficient Cv = 1,75 Certified max. Helium inboard leak rate (at max. pressure) < 10-9 mbar.l/sec Certified max. Helium outboard leak rate (at max. pressure) < 10-9 mbar.l/sec Certified max. Helium across the seat leak rate (at max. pressure) < mbar.l/sec Fully swept flow path Small internal volume Nominal Seat Diameter 20 mm (0.79 ) Reduced gas absorption and desorption from seat material Clean operation, no rubbing Easy purgeability Selected Stainless Steels for low sulfur content as well as optimized impurity levels Fully contained Seat Manufactured to the THREE STAR PROCESS Metal to Metal sealing to atmosphere Air connector 1/8"NPT M20LT-Bottom view CONSTRUCTION MATERIALS 58 ( 2.28") Valve Grade & Materials 142 ( 5.59") Parts S V U Wetted parts Non-wetted parts Body Stainless Steel 316L Body Surface Finish < 0,4 m (15 in Ra) non EP < 0,25 m (10 in Ra) EP < 0,15 m (6 in Ra) EP Diaphragm UNS R30003 Seat material PCTFE (Kel-F ) / PVDF or Vespel (on request) Backup diaphragm UNS R30003 Stainless Steel or alloys leakage detection port 17,5 ( 0.69") 50 ( 1.96") Manual Actuation Pneumatic Actuation M20LT-PP2 Upper Spindle Handle Stainless Steel Aluminum Stainless Steel or Alloys Actuator Body Pistons O-ring Anodized Aluminum Stainless steel and Aluminum NBR Stainless Steel or Alloys M20lt-leaf 10-9 M20LT-MT M20lt-leaf 10-9

17 SI15-leaf 09-2 HOW TO ORDER SI 15 Valves & Fittings PART NUMBER Example : SI 15U 2V1 A / K 8b A/B : V-M Serie & Surface Finish SI 15 U Ra 0,15μm Ep. (6μin Ra) SI 15 V Ra 0,25μm Ep. (10μin Ra) SI 15 S Ra 0,4μm nonep(15μin Ra) 3 - Body Material (others on request) A AISI 316L, VAR (on request) I AISI 316L H Hastelloy (on request) 5 - Outlet Regulated Pressure 8b 8 bar psi Note: Inlet Pressure = upto 25 bar (360 psi) Configurations 2 - Ports Configurations 2V1 2 ports in line See below for other ports configurations 4 - Seat Material N NBR 6 - End Connections V-F GAZEL 1/2" - Female (face seal)* V-M GAZEL 1/2" - Male (face seal)* V-FI GAZEL 1/2" - Internal (face seal)* -V A-Valves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg Tel. * , fax * , info@selfa.rotarex.com *All GAZEL Face Seals are VCR compatible. VCR is a registered trade mark of CAJON CO., HASTELLOY is a registered trade mark of CABOT Corp., Kel-F is a registered trade mark of 3M company, Vespel is a registered trade mark of DUPONT, ELGILOY is a registered trade mark of ELGILOY Company. SI15-leaf 09-2 A total component solution, from source to process SI SI 15 Valves & Fittings SI 15 HIGH FLOW DIAPHRAGM PRESSURE REGULATOR FOR HP & UHP APPLICATIONS

18 Valves & Fittings Valves & Fittings FEATURE a unique proven design SI 15 SI 15 The SI 15 Regulator was created in response to the industry s needs for High Flow Applications (tipically 1/2") for specialty source gas service, i.e. gas cabinets. The balanced valve minimizes the effect of inlet pressure fluctuations on outlet pressure and reduces the efforts on the seat to increase life time of the regulator Precise control of the gas discharge with minimum deviation caused by the supply pressure effect. Excellent performance characteristics A unique spherical ball pressure pad to give ultra smooth delivery pressure adjustment Delivery pressure of 8 bar (120 psi) Individual Serial number, for full traceability Assembling, testing & Packaging in cleanroom Cl. 10 Fluid Media Standard, High and Ultra High Purity, corrosive and non-corrosive gases Inlet pressure 25 bar (360 PSI) Outlet pressure 8 bar (120 PSI) Temperature range -20 C to + 60 C (-2F to 140F) Nominal Flow 840 slpm (N 2 ) Certified max. Helium inboard leak rate < mbar.l/sec Certified max. Helium outboard leak rate (at max. pressure) < mbar.l/sec Certified max. Helium across the seat leak rate (at max. pressure) < mbar.l/sec Number of ports 2, 3, 4, 5 or 6 Ergonomic Design Spherical ball for ultra smooth control Sealed bonnet for extra protection Controlled (PC) electropolishing for better corrosion resistance 2,3,4 or 6 ports options available Seat design for high flow uses FLOW CURVES Minimal wetted surfaces for optimal purging Excellent response (droop, hysteresis, creep) Manufactured to the THREE STAR PROCESS CONSTRUCTION MATERIALS Parts Materials Wetted parts Body AISI 316L, VAR, Hastelloy Diaphragm AISI 304 Seat NBR Poppet AISI 316L, VAR, Hastelloy Non-wetted parts Bonnet Nickel Plated Brass Handle Extruded Plastic Others Stainless Steel or others SURFACE FINISH U: < Ra 0,15μm Ep. (6μin Ra) V: < Ra 0,25μm Ep. (10μin Ra) S:< Ra 0,4μm nonep(15μin Ra) SI15-leaf 09-2 SI15-leaf 09-2

19 SIR100-leaf 09-2 SIR SIR SIR SIR SIR HOW TO ORDER Valves & Fittings PART NUMBER Example : SIR 100 U 2V1 A / K 7b A/B:V1/4M Series & Surface finish SIR 100 U - Ra 0.15μm Ep. (6μin Ra) SIR 100 V - Ra 0.25μm Ep. (10μin Ra) SIR 100 S - Ra 0.4μm non Ep. (15μin Ra) 3 - Body Material (others on request) A AISI 316L, VAR I AISI 316L H Hastelloy on request 5 - Outlet regulated pressure 2b 2 bar - 30 psig 4b 4 bar - 60 psig 7b 7 bar psig Inlet pressure upto 50 bar (725 psig) Configurations 2 - Ports configurations 2V1 2 ports in line See below for other ports configurations 4 - Seat Material K PCTFE (Kel-F ) V PI (Vespel ) P PVDF 6 - End Connections V 1/4-F GAZEL 1/4" - Female (Face Seal*) V 1/4-M GAZEL 1/4" - Male (Face Seal*) V 1/4-FI GAZEL 1/4" - Internal (Face Seal*) B 1/4 BWO 1/4" - Standard (Orbital Weld) B 6 BWO 6 mm (Orbital Weld) NPT FI 1/4 NPT - Inlet threads -V A-Valves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg Tel. * , fax * , info@selfa.rotarex.com SIR100 *All GAZEL Face Seals are VCR compatible. VCR is a registered trade mark of CAJON CO., HASTELLOY is a registered trade mark of CABOT Corp., Kel-F is a registered trade mark of 3M company, Vespel is a registered trade mark of DUPONT, ELGILOY is a registered trade mark of ELGILOY Company. SIR100-leaf 09-2 A total component solution, from source to process 100 Valves & Fittings SIR 100 DIAPHRAGM PRESSURE REGULATOR FOR HP & UHP APPLICATIONS

20 Valves & Fittings Valves & Fittings FEATURE a unique proven design SIR100 SIR100 Ergonomic Design Spherical ball for ultra smooth control Metal to metal seal to atmosphere The SIR 100 Regulator was created in response to the industry s needs for a low pressure non tied diaphragm regulator for specialty source gas service, i.e. gas cabinets. The design and material of construction, plus some unique features make it an ideal choice for gas source applications with the reactive and hazardous gases the Semiconductor and Allied Industries use. Individual Serial number, for full traceability Minimal wetted surfaces for optimal purging Gas specific solutions (Body and seat materials) Assembling, testing & Packaging in cleanroom Cl. 10 Controlled (PC) electropolishing for better corrosion resistance 2,3,4,5, or 6 ports options available diaphragm counter balance springs Excellent response at low pressures (droop, hysteresis, creep) Fluid Media Standard, HP, UHP, corrosive and non-corrosive gases Inlet pressure 50 bar (725 PSI) Outlet pressure bar ( PSI) Temperature range -20 C to + 65 C (-4 F to 150 F) Flow Coefficient C V = 0.2 Certified max. Helium inboard leak rate (at max. pressure) < mbar.l/sec Cerified max. Helium outboard leak rate (at max. pressure) < mbar.l/sec Cerified max. Helium across the seat leak rate (at max. pressure) < mbar.l/sec Number of ports 2, 3, 4, 5 or 6 FLOW CURVES Manufactured to the THREE STAR PROCESS CONSTRUCTION MATERIALS Parts Materials Body AISI 316L, VAR Wetted Parts Diaphragm Hastelloy Seat PCTFE (Kel-F ) / PI (Vespel ) /PVDF Poppet AISI 316L, VAR Bonnet Nickel Plated Brass Non-wetted parts Handle Extruded Plastic Others Stainless Steel or alloys SURFACE FINISH U: <Ra 0.15μm Ep. (6μin Ra) V: <Ra 0.25μm Ep. (10μin Ra) S: <Ra 0.4μm non Ep. (15μin Ra) SIR100-leaf 09-2 SIR100-leaf 09-2

21 SIR200-leaf 10-5 SIR SIR SIR SIR SIR HOW TO ORDER Valves & Fittings PART NUMBER Example : SIR 200 U 2V1 A / K 7b A/B:V1/4M Series & Surface finish SIR 200 U - Ra 0.15 m Ep. (6 in Ra) SIR 200 V - Ra 0.25 m Ep. (10 in Ra) SIR 200 S - Ra 0.4 m non Ep. (15 in Ra) 3 - Body Material (others on request) A AISI 316L, VAR I AISI 316L H Hastelloy on request 5 - Outlet regulated pressure 2b 2 bar - 30 psig 4b 4 bar - 60 psig 7b 7 bar psig Inlet pressure upto 200 bar (2900 psi) Configurations 2 - Ports configurations 2V1 2 ports in line See below for other ports configurations 4 - Seat Material K PCTFE (Kel-F ) V PI (Vespel ) P PVDF 6 - End Connections V 1/4-F GAZEL 1/4" - Female (Face Seal*) V 1/4-M GAZEL 1/4" - Male (Face Seal*) V 1/4-FI GAZEL 1/4" - Internal (Face Seal*) B 1/4 BWO 1/4" - Standard (Orbital Weld) B 6 BWO 6 mm (Orbital Weld) NPT FI 1/4 NPT - Inlet threads -V A-Valves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg Tel. * , fax * , info@selfa.rotarex.com SIR200 *All GAZEL Face Seals are VCR compatible. VCR is a registered trade mark of CAJON CO., HASTELLOY is a registered trade mark of CABOT Corp., Kel-F is a registered trade mark of 3M company, Vespel is a registered trade mark of DUPONT, ELGILOY is a registered trade mark of ELGILOY Company. SIR200-leaf 10-5 A total component solution, from source to process 200 Valves & Fittings SIR 200 DIAPHRAGM PRESSURE REGULATOR FOR HP & UHP APPLICATIONS

22 Valves & Fittings Valves & Fittings FEATURE a unique proven design SIR200 SIR200 Ergonomic Design Spherical ball for ultra smooth control Metal to metal seal to atmosphere The SIR 200 Regulator was created in response to the industry s needs for a high pressure non tied diaphragm regulator for specialty source gas service, i.e. gas cabinets. The design and material of construction, plus some unique features make it an ideal choice for gas source applications with the reactive and hazardous gases the Semiconductor and Allied Industries use. Individual Serial number, for full traceability Minimal wetted surfaces for optimal purging Gas specific solutions (Body and seat materials) Assembling, testing & Packaging in cleanroom Cl. 10 Controlled (PC) electropolishing for better corrosion resistance 2,3,4,5, or 6 ports options available diaphragm counter balance springs Excellent response at low pressures (droop, hysteresis, creep) Fluid Media Standard, HP, UHP, corrosive and non-corrosive gases Inlet pressure 200 bar (2900 PSI) Outlet pressure bar ( PSI) Temperature range -20 C to + 65 C (-4 F to 150 F) Flow Coefficient C V = 0.2 Certified max. Helium inboard leak rate (at max. pressure) < mbar.l/sec Cerified max. Helium outboard leak rate (at max. pressure) < mbar.l/sec Cerified max. Helium across the seat leak rate (at max. pressure) < mbar.l/sec Number of ports 2, 3, 4, 5 or 6 FLOW CURVES Manufactured to the THREE STAR PROCESS CONSTRUCTION MATERIALS Parts Materials Body AISI 316L, VAR Wetted Parts Diaphragm Hastelloy Seat PCTFE (Kel-F ) / PI (Vespel ) /PVDF Poppet AISI 316L, VAR Bonnet Nickel Plated Brass Non-wetted parts Handle Extruded Plastic Others Stainless Steel or alloys SURFACE FINISH U: <Ra 0.15 m Ep. (6 in Ra) V: <Ra 0.25 m Ep. (10 in Ra) S: <Ra 0.4 m non Ep. (15 in Ra) SIR200-leaf 10-5 SIR200-leaf 10-5

23 Valves & Fittings HOW TO ORDER PART NUMBER Example : SI 220U 2V1 A / K 10 b A/B : V-3/8 F SI 220 Valves & Fittings A total component solution, from source to process 1 - Serie & Surface Finish SI 220 U Ra 0,15μm Ep. (6μin Ra) SI 220 V Ra 0,25μm Ep. (10μin Ra) SI 220 S Ra 0,4μm nonep(15μin Ra) 3 - Body Material (others on request) A AISI 316L, VAR I AISI 316L H Hastelloy (on request) 5 - Outlet regulated Pressure 3b 3 bar - 45 PSI 8b 8 bar PSI 10b 10 bar PSI 15b 15 bar PSI 25b 25 bar PSI 50b 50 bar PSI Note : Inlet Pressure: upto 240 bar (3500 PSI) Configurations 2 - Ports Configurations 2V1 2 ports in line See below for other ports configurations 4 - Seat Material K PCTFE (Kel-F ) 6 - End Connections V-1/4 F GAZEL 1/4" - Female (face seal) V-3/8 F GAZEL 3/8" - Female (face seal) V 1/4 M GAZEL 1/4" - Male (face seal) V-3/8 M GAZEL 3/8" - Male (face seal) V-FI GAZEL 1/4" - Internal Female (face seal) *All GAZEL Face Seals are VCR compatible. VCR is a registered trade mark of CAJON CO., HASTELLOY is a registered trade mark of CABOT Corp., Kel-F is a registered trade mark of 3M company, Vespel is a registered trade mark of DUPONT, ELGILOY is a registered trade mark of ELGILOY Company. SI SI 220 SI220-leaf V A-Valves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg Tel. * , fax * , info@selfa.rotarex.com SI220-leaf 09-2 SI 220 DIAPHRAGM PRESSURE REGULATOR FOR HP & UHP APPLICATIONS

24 Valves & Fittings Valves & Fittings FEATURE a unique proven design SI 220 SI 220 The SI 220 Regulator was created in response to the industry s need for a Highflow, High Pressure, Springless, Tied Diaphragm Regulator for specialty source gas service, i.e. gas cabinets.the design and materials of construction, plus some unique features make it an ideal choice for gas source applications with reactive and hazardous gases the Semiconductor and Allied Industries use. Unique features include a special leak test port that enables the diaphragm seal to be outboard leak tested 10-9 mbar.l/sec range at high pressure. Precise control of the gas discharge with minimum deviation caused by the supply pressure effect. Counter balance springs outside the gas stream to ensure the unit functions correctly with downstream vacuum and upstream high pressure A unique spherical ball pressure pad to give ultra smooth delivery pressure adjustment Choice of delivery pressure: 3, 8, 10, 15, 25 or 50 bar / 45, 116, 145, 217, 365 or 725 psi Individual Serial number, for full traceability Ergonomic Design Spherical ball for ultra smooth control Metal to metal seal to Atmosphere Sealed bonnet for extra protection Minimal wetted surfaces for optimal purging Gas specific solutions (Body and Seat Materials) Assembling, testing & Packaging in cleanroom Cl. 10 Controlled (PC) electropolishing for better corrosion resistance No spring in the wetted area for zero particle emission 2,3,4 or 6 ports options available diaphragm counter balance springs Excellent response at high and low pressures (droop, hysteresis, creep) Fluid Media Standard, High and Ultra High Purity, corrosive and non-corrosive gases Inlet pressure 240 bar (3500 PSI) Outlet pressure bar ( PSI) Temperature range -20 C to + 60 C (-2F to 140F) Nominal Flow 170 slpm (N 2 ) Flow Coefficient (C v ) C V = 0,2 Certified max. Helium inboard leak rate < mbar.l/sec Certified max. Helium outboard leak rate (at max. pressure) < mbar.l/sec Certified max. Helium across the seat leak rate (at max. pressure) < mbar.l/sec Number of ports 2, 3, 4, 5 or 6 FLOW CURVES Manufactured to the THREE STAR PROCESS CONSTRUCTION MATERIALS Parts Materials Wetted parts Body AISI 316L, VAR, Hastelloy Diaphragm Hastelloy Seat PCTFE (Kel-F ) Poppet AISI 316L, VAR, Hastelloy Non-wetted parts Bonnet Nickel Plated Brass Handle Extruded Plastic Others Stainless Steel or others SURFACE FINISH U: < Ra 0,15μm Ep. (6μin Ra) V: < Ra 0,25μm Ep. (10μin Ra) S:< Ra 0,4μm nonep(15μin Ra) SI220-leaf 09-2 SI220-leaf 09-2

25 Valves & Fittings HOW TO ORDER SI 220 TRITON PART NUMBER Example : SI 220 Triton U 2V1 A / K 10 b A/B : V-3/8 F Valves & Fittings A total component solution, from source to process SI220tr-leaf Serie & Surface Finish SI 220 Triton U Ra 0,15 m Ep. (6 in Ra) SI 220 Triton V Ra 0,25 m Ep. (10 in Ra) SI 220 Triton S Ra 0,4 m nonep(15 in Ra) 3 - Body Material (others on request) A AISI 316L, VAR I AISI 316L H Hastelloy (on request) 5 - Outlet regulated Pressure 3b 3 bar - 45 PSI 8b 8 bar PSI 10b 10 bar PSI 15b 15 bar PSI 25b 25 bar PSI 50b 50 bar PSI Note : Inlet Pressure: up to 240 bar (3500 PSI) 1/4" 3/8" Configurations A GAZEL male fix 47 mm 1.85" 51 mm 2.0" OUTLET - INLET DESIGN B GAZEL male swivel 51 mm 2.0" 60.5 mm 2.38" 2 - Ports Configurations 2V1 2 ports in line See below for other ports configurations 4 - Seat Material K PCTFE (Kel-F ) P PVDF (optional) V PI (Vespel optional) 6 - End Connections V-1/4 F GAZEL 1/4" - Female (face seal) V-3/8 F GAZEL 3/8" - Female (face seal) V 1/4 M GAZEL 1/4" - Male (face seal) V-3/8 M GAZEL 3/8" - Male (face seal) V-FI GAZEL 1/4" - Internal Female (face seal) for gauge connections only GAZEL female 47 mm 1.85" 60.5 mm 2.38" GAUGE CONNECTION GAZEL female internal CEODEUX S.A. B.P L-7505 Lintgen, G.-D. of Luxembourg Tel , Fax , info@selfa.rotarex.com C D 1/4" 14.4 mm 0.57" *All GAZEL Face Seals are VCR compatible. VCR is a registered trade mark of SWAGELOK COMPANY., HASTELLOY is a registered trade mark of CABOT Corp., Kel-F is a registered trade mark of 3M company, Vespel is a registered trade mark of DUPONT SI220tr-leaf 10-8 SI 220 TRITON SI 220 TRITON TIED DIAPHRAGM PRESSURE REGULATOR FOR HP & UHP NF3 AND REACTIVE GAS APPLICATIONS

26 Valves & Fittings Valves & Fittings FEATURE a unique proven design SI 220 TRITON SI 220 TRITON The SI 220 TRITON Regulator was created in response to the industry s need for a Highflow, High Pressure, Springless, Tied Diaphragm Regulator for specialty source gas service, i.e. gas cabinets.the design and materials of construction, plus some unique features make it an ideal choice for gas source applications with reactive and hazardous gases the Semiconductor and Allied Industries use. Unique features include a special leak test port that enables the diaphragm seal to be outboard leak tested 10-9 mbar.l/sec range at high pressure. Precise control of the gas discharge with minimum deviation caused by the supply pressure effect. Counter balance springs outside the gas stream to ensure the unit functions correctly with downstream vacuum and upstream high pressure A unique spherical ball pressure pad to give ultra smooth delivery pressure adjustment Choice of delivery pressure: 3, 8, 10, 15, 25 or 50 bar / 45, 116, 145, 217, 365 or 725 psi Individual Serial number, for full traceability Ergonomic Design Spherical ball for ultra smooth control Metal to metal seal to Atmosphere Sealed bonnet for extra protection Minimal wetted surfaces for easy purging Gas specific solutions (Body and Seat Materials) Assembling, testing & Packaging in cleanroom Cl. 10 Controlled (PC) electropolishing for better corrosion resistance Springless & threadless for zero particle emission 2,3,4,5 or 6 ports options available diaphragm counter balance springs Excellent response at high and low pressures (droop, hysteresis, creep) Fluid Media Standard, High and Ultra High Purity, corrosive and oxydizing gases (NF3, F2,...) Inlet pressure (PCTFE seat) 240 bar (3500 PSI) Inlet pressure (PVDF seat) 25 bar (365 PSI) Outlet pressure bar ( PSI) Temperature range -20 C to + 60 C (-2 F to 140 F) Nominal Flow 90 slpm (N 2 ) Flow Coefficient (C v ) C V = 0,1 Certified max. Helium inboard leak rate < mbar.l/sec Certified max. Helium outboard leak rate (at max. pressure) < mbar.l/sec Certified max. Helium across the seat leak rate (at max. pressure) < mbar.l/sec Number of ports 2, 3, 4, 5 or 6 Manufactured to the THREE STAR PROCESS CONSTRUCTION MATERIALS Parts Materials Wetted parts Body AISI 316L, VAR, Hastelloy 2 holes M5x7-6H Diaphragm Hastelloy Seat PCTFE (Kel-F ), on request: PI(Vespel ) or PVDF Poppet AISI 316L, on request: Hastelloy Non-wetted parts Bonnet Chrome Plated Brass Handle Aluminium Others Stainless Steel or others " 6,3" " standard: 54 2,13" 94 mm 3.7" SI220tr-leaf mm 4.0" 121 mm 4.75" SI220tr-leaf 10-8

27 SI leaf 09-2 HOW TO ORDER SI 240 / 260 Valves & Fittings PART NUMBER Example : SI 240 U 2V1 A / K 7b A/B : V-M Serie & Surface Finish SI 240/260 U Ra 0,15μm Ep. (6μin Ra) SI 240/260 V Ra 0,25μm Ep. (10μin Ra) SI 240/260 S Ra 0,4μm nonep(15μin Ra) 3 - Body Material (others on request) A AISI 316L, VAR I AISI 316L H Hastelloy (on request) 5 - Outlet regulated Pressure 2b 2 bar - 30 PSI 4b 4 bar - 60 PSI 7b 7bar PSI Note : Inlet Pressure: upto 240 bar (3500 PSI) Configurations 2 - Ports Configurations 2V1 2 ports in line See below for other ports configurations 4 - Seat Material K PCTFE (Kel-F ) V PI (Vespel ) P PVDF 6 - End Connections V-F GAZEL 1/4" - Female (face seal)* V-M GAZEL 1/4" - Male (face seal)* V-FI GAZEL 1/4" - Internal (face seal)* -V A-Valves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg Tel. * , fax * , info@selfa.rotarex.com *All GAZEL Face Seals are VCR compatible. VCR is a registered trade mark of CAJON CO., HASTELLOY is a registered trade mark of CABOT Corp., Kel-F is a registered trade mark of 3M company, Vespel is a registered trade mark of DUPONT, ELGILOY is a registered trade mark of ELGILOY Company. SI leaf 09-2 A total component solution, from source to process SI SI 240 SI 260 Valves & Fittings SI 240 /260 SPRINGLESS TIED DIAPHRAGM PRESSURE REGULATOR FOR UHP APPLICATIONS

28 Valves & Fittings Valves & Fittings FEATURE a unique proven design SI 240 / 260 SI 240 / 260 The SI 240 Regulator was created in response to the industry s need for a High Pressure, Springless, Tied Diaphragm Regulator and the SI 260 Regulator for a High Flow, High Pressure, Springless, Tied Diaphragm Regulator for specialty source gas service, i.e. gas cabinets.the design and materials of construction, plus some unique features make it an ideal choice for gas source applications with reactive and hazardous gases the Semiconductor and Allied Industries use. Unique features include a special leak test port that enables the diaphragm seal to be outboard leak tested 10-9 mbar.l/sec range at high pressure. Precise control of the gas discharge with minimum deviation caused by the supply pressure effect. Counter balance springs outside the gas stream to ensure the unit functions correctly with downstream vacuum and upstream high pressure A unique spherical ball pressure pad to give ultra smooth delivery pressure adjustment Choice of delivery pressure: 2, 4 or 7 bar / 30, 60 or 100 psi The SI 240 regulator is designed with minimum face to face dimensions, to meet the requirements of all gas system manufacturers. The SI 260 regulator is designed for high flow rates of HCl and N 2 O etc. Individual Serial number, for full traceability Assembling, testing & Packaging in cleanroom Cl. 10 Fluid Media Standard, High and Ultra High Purity, corrosive and non-corrosive gases Inlet pressure 240 bar (3500 PSI) Outlet pressure bar ( PSI) Temperature range -20 C to + 80 C (-2F to 176F) Nominal Flow 150 slpm (N 2 ) Flow Coefficient (C v ) SI 240: C V = 0,09 / SI 260: C V = 0,2 Certified max. Helium inboard leak rate < mbar.l/sec Certified max. Helium outboard leak rate (at max. pressure) < mbar.l/sec Certified max. Helium across the seat leak rate (at max. pressure) < mbar.l/sec Number of ports 2, 3, 4, 5 or 6 Ergonomic Design Metal to metal seal to atmosphere Spherical ball for ultra smooth control Controlled (PC) electropolishing for better corrosion resistance No spring in the wetted area for zero particle emission FLOW CURVES Sealed bonnet for extra protection Minimal wetted surfaces for optimal purging 2,3,4 or 6 ports options available diaphragm counter balance springs Gas specific solutions (Body and Seat Materials) Excellent response at high and low pressures (droop, hysteresis, creep) SI 240 SI 260 Manufactured to the THREE STAR PROCESS CONSTRUCTION MATERIALS Parts Materials Wetted parts Body AISI 316L, VAR, Hastelloy Diaphragm Hastelloy Seat PCTFE (Kel-F ) / PI (Vespel ) / PVDF Poppet AISI 316L, VAR, Hastelloy Non-wetted parts Bonnet Nickel Plated Brass Handle Others Extruded Plastic Stainless Steel or others SURFACE FINISH U: < Ra 0,15μm Ep. (6μin Ra) V: < Ra 0,25μm Ep. (10μin Ra) S:< Ra 0,4μm nonep(15μin Ra) SI leaf 09-2 Rotarex UK Ltd Redland Close, Coventry, West Midlands, CV2 2NP Tel: Fax: info@rotarex.co.uk SI leaf 09-2