Probes and Accessories. Innovation with Integrity

Transcription

1 2012 Probes and Accessories Innovation with Integrity AFM Probes 1

2 How to Order Americas Order online (USA only): Phone Orders: +1 (800) Option 6 Purchase Order by Fax: +1 (805) Purchase Order by afmprobeorders@bruker-nano.com Technical Information: +1 (800) x2080 or probesinfo@bruker-nano.com AFM Tech Support: +1 (800) or afmsupport@bruker-nano.com International Europe Phone Orders: Purchase Order by Fax: Purchase Order by orders.france@bruker-nano.com Technical Information: probesinfo.uk@bruker-nano.com Asia Pacific Phone Orders: Purchase Order by Fax: Technical Information: info@bruker.com.sg Japan Phone Orders: Purchase Order by Fax: Purchase Order by Probeshop-J@bruker-axs.jp Technical Information: Probeinfo-J@bruker-axs.jp Bruker AFM Probes A s the worldwide leader in scanning probe microscope (SPM) and atomic force microscope (AFM) instrumentation, Bruker is consistently driving and shaping the future of the industry. Over the past year, we have developed new industry-leading AFM systems for life sciences and materials research, new software and applications capabilities, and revolutionary imaging techniques and modes. Bruker is the only major AFM/SPM equipment manufacturer that also owns and operates a probes nanofabrication facility. Being one of the world s largest probe users, we have an intimate understanding of the value of every single component in a high-performance AFM system. Our dedication to manufacturing probes, coupled with our expertise in AFM, ensures that we are uniquely equipped to deliver the most complete AFM solution for the widest variety of applications. The Bruker AFM Probes Nanofabrication Center features: Class 100 clean rooms Advanced design and fabrication process toolset An in-house probes design team that collaborates with Bruker AFM scientists and engineers An agile production team that produces a wide variety of different probes A comprehensive quality system ensuring industry-leading probe performance Your data depends on repeatable probe performance and quality, from one probe to the next. With our tightly controlled nanofabrication, comprehensive quality testing, and AFM expertise, you can be confident that our probes will deliver the results you require, not only for your current applications, but also for the emerging research of tomorrow. Image Credits Front Cover: Leftmost image Polypropylene + pluronic imaged in Peak Force Tapping mode by Natalia Erina on a MultiMode 8 using an SNL probe. Center image Polyethylene oxide + syndiotactic polypropylene imaged in Peak Force Tapping mode by Natalia Erina on a MultiMode 8 with heater stage using an SNL probe. Right image Blend of polyethylene oxide and polypropylene imaged in Peak Force Tapping mode by Natalia Erina on a MultiMode 8 using an SNL probe. Back Cover: Leftmost image Polydimethylsiloxane liquid crystals imaged in Peak Force Tapping mode by Natalia Erina on a MultiMode 8 using an SNL probe. Center image C60 imaged in Peak Force Tapping mode by Lin Huang on an Icon using a ScanAsyst-Air probe. Right image Collagen imaged in Peak Force Tapping mode by Lin Huang on an Icon using a ScanAsyst-Fluid probe Copyright Bruker Corporation. All rights reserved. 2 3

3 Table of Contents How to Order 2 Bruker AFM Probes Introduction 3 AFM Systems 8 Dimension FastScan AFM 10 Dimension Icon AFM 11 Dimension Edge AFM 12 MultiMode 8 AFM 13 Innova AFM 14 BioScope Catalyst AFM 15 Integrated AFM-Raman Imaging Systems 16 InSight 3D AFM 17 Dimension AFP 18 Imaging Modes 20 SPM Operation 21 Contact Mode AFM 22 TappingMode AFM 23 Peak Force Tapping 24 ScanAsyst 25 TappingMode & PhaseImaging 26 PeakForce QNM 27 LiftMode 28 Magnetic Force Microscopy - MFM 29 Electrostatic Force Microscopy - EFM 30 Surface Potential Microscopy - SPoM 31 Scanning Tunneling Microscopy - STM 32 Scanning Electrochemical Potential Microscopy - SECPM 33 Torsional Resonance 34 PeakForce TUNA & Conductive AFM 35 Scanning Spreading Resistance Microscopy - SSRM 36 Scanning Capacitance Microscopy - SCM 37 Scanning Thermal Microscopies 38 Piezoresponse Microscopy 39 Critical Dimension Atomic Force Microscopy - CDAFM 40 Deep Trench Mode 41 Table of Contents Probes 44 Bruker AFM Probes 10-Pack Policy 45 Quality and Performance - Silicon Nitride Probes 46 Silicon Nitride Probe Cantilever Layouts 47 Probes Application Selector Guide - Commonly Used Probes 48 Silicon Probes 52 Silicon Nitride Probes 78 Magnetic Probes 98 Supersharp Probes 104 Electrical Probes 110 Critical Dimension Probes 114 Spike Automated Probes 118 Nanoindentation Probes 124 Active Probe 126 STM Probes 128 Thermal Probes 130 Helpful Equations 132 AFM Accessories 134 Introduction 135 All AFM Accessories 136 Dimension Accessories 143 Innova Accessories 149 MultiMode Accessories 156 Catalyst Accessories 161 Caliber Accessories 164 EnviroScope Accessories 165 BioScope Accessories 168 Index 170 All Products Alphabetical 170 Probes By Type 183 Accessories By System 191 Bruker AFM Probes Terms & Conditions for Sale 196 Nanoscale World Community

4 AFM Systems Innovation with Integrity AFM Probes 6 7

5 AFM Systems Table of Contents Dimension FastScan AFM 10 Dimension Icon AFM 11 Dimension Edge AFM 12 MultiMode 8 AFM 13 Innova AFM 14 BioScope Catalyst AFM 15 Integrated AFM-Raman Imaging Systems 16 InSight 3D AFM 17 Dimension AFP 18 The AFM Performance and Technology Leader B ruker atomic force microscopes (AFMs) are used in the forefront of nanoscale research and discovery in life science, materials science, semiconductor, electrochemistry, and many other applications. Bruker has developed proprietary, application-specific product suites that deliver unparalleled accuracy and resolution at price points for every budget. Based on decades of experience in AFM innovation and design optimization, our systems make the technology easier and more accessible to all AFM users. Utilizing over 20 imaging modes including the revolutionary technology advances of Peak Force Tapping, ScanAsyst and PeakForce QNM Bruker s AFMs, probes, and accessories enable increased productivity, helping you obtain quantifiable results faster and easier. Bruker is uniquely equipped to offer a complete, high-performance solution tailored to your specific application. Our unrivaled local Applications and Technical specialists will assist you every step along the way, from product, probe and accessory selection through application support and next-generation technique development TappingMode and AFM imaging in liquids 1994 Closed-loop SPM First AFM for life science applications (BioScope ) 1995 PhaseImaging and LiftMode 1999 Electrical application modules X faster imaging 2001 High-temperature polymer imaging 2002 AFM for force spectroscopy (PicoForce ) 2003 Torsional Resonance mode (TR-Mode ) The Bruker Innovation Timeline 2006 Single harmonic imaging 2008 HarmoniX real-time material property mapping 2009 Peak Force Tapping PeakForce QNM Imaging Mode ScanAsyst Imaging Mode 2010 PeakForce TUNA quantitative nanoscale electrical characterization 2011 World s fastest, high-resolution AFM (Dimension FastScan ) High-speed, AFM self-optimizing image mode (ScanAsyst-HR) IRIS AFM-Raman integration 8 9

6 Dimension FastScan AFM The Benchmark for AFM Speed Dimension Icon AFM AFM Performance and Productivity Redefined T Features & Benefits Extreme Imaging Speed on Any Sample High-Resolution Imaging at High-Speed Scan Rates ScanAsyst for Ease of Use Applications See FastScan Application Videos at Dynamics Studies at Nanometer Resolution Materials Polymer Chemistry Life Sciences Measurements he Dimension FastScan Atomic Force Microscope (AFM) delivers, for the first time, extreme imaging speed without sacrificing legendary Dimension Icon resolution and performance. This breakthrough innovation enables radically faster time to publishable data for all levels of AFM expertise. Now, with the Dimension FastScan system you achieve immediate AFM images with the expected high resolution of a highperformance AFM, all in one system. Whether you scan at >125Hz when surveying a sample to find the region of interest, or at time rates of 1-second per image frame in air or fluid, FastScan redefines the AFM experience. Dimension FastScan is the first AFM to achieve the perfect balance of scanspeed, resolution, accuracy, drift, and noise, making fast scanning atomic force microscopy a commercial reality. Contact Bruker to learn how you can upgrade your Dimension Icon to a FastScan or explore how you can measure your samples using the Bruker leading AFM technology. T Features & Benefits Ultimate Performance Exceptional Productivity ScanAsyst for Ease of Use PeakForce QNM for Nanoscale Mechanical Mapping Applications Materials Polymer Chemistry Electrical Materials Characterization Life Sciences Measurements Electro Chemistry AFM Heating and Cooling Studies he Dimension Icon established new levels of performance in AFM, functionality and AFM accessibility to nanoscale researchers in science and industry. The ultra-stable Icon platform enables previously unachievable measurements with ultra low drift and the lowest tip/sample force control of any commercially available open-platform, tip-scanning AFM. New AFM researchers can now perform exceptionally repeatable, high-resolution experiments that previously were only accessible by highly experienced users. Icon allows new and experienced users to achieve artifact-free images in minutes instead of hours, enabling increased productivity. If you are a using an older model Dimension AFM, please contact Bruker to see for yourself how Icon is achieving the highest resolution images possible in a tip-scanning system, all in minutes instead of hours. brukerafmprobes.com/fastscan brukerafmprobes.com/icon 10 11

7 Dimension Edge AFM The Performance and Value AFM Solution MultiMode 8 AFM Highest Resolution and Unmatched Publication Record T Features & Benefits Best Value Closed-Loop AFM Accurate, High- Resolution Results Solutions for All Applications on Any Sample Advanced Nanoscale Capabilities for Beginners and Experts Applications Materials Characterization Polymers Chemistry Electrical Materials Characterization Life Sciences Measurements he Dimension Edge incorporates Bruker s latest technology advances to provide the highest levels of performance, functionality, and accessibility in its class. Based on the ultimate Dimension Icon scanner, the Edge is a large-sample platform designed from top to bottom to deliver the performance necessary to reach decisions on materials formulation and design, or achieve publication-ready data in minutes instead of hours. It does all of this at price points well below expectations for such performance. In addition, integrated visual feedback and preconfigured settings enable expert-level results simply and consistently, making the most advanced large-sample atomic force microscopy capabilities and techniques available to every facility and user. If you already own an older model Dimension AFM, Bruker would like to help you identify an upgrade path to a brand new Dimension Edge, so you can continue to experience the best available AFM performance and service. brukerafmprobes.com/edge T Features & Benefits Superior Resolution and Performance Versatility for Widest Range of Applications Proven Productivity and Reliability ScanAsyst for Ease of Use PeakForce QNM for Mapping Mechanical Properties Applications Materials Science Research Life Sciences Measurements Electrochemistry Studies hough best known for its performance leading resolution, today s MultiMode 8 leverages Bruker s exclusive Peak Force Tapping technology to provide new information, faster results and greatly improved ease of use. Bruker s exclusive ScanAsyst mode makes imaging easier, faster, and more consistent by directly controlling the tip-sample interaction force and automatically optimizing imaging parameters. And now ScanAsyst-HR enables up to 6X faster scanning for even greater productivity. New quantitative material property mapping is made possible using PeakForce QNM, which analyzes each tip-sample interaction to extract nanomechanical properties including modulus, adhesion, deformation, and dissipation. This can be combined with the new PeakForce TUNA mode to perform conductivity mapping on even the most delicate samples. With these features and many others, the MultiMode 8 has the versatility to help you excel in virtually any field of research. Contact Bruker to find out how you can upgrade to the MultiMode 8 at a fraction of the cost of a new system. brukerafmprobes.com/multimode

8 Innova AFM Superior Research Performance and Versatility BioScope Catalyst AFM Complete Integration of AFM and Light Microscopy T Features & Benefits High-Resolution Closed-Loop System Fast, Easy Tip and Sample Exchange Versatility and Value Powerful Research Flexibility Applications Materials Characterization Nanolithography Life Sciences Measurements Polymer Chemistry Device Characterization he Innova introduces an unmatched combination of productivity, ease of use, and application flexibility for the most demanding scientific research, all at a moderate cost. It offers a unique, state-of-the-art closed-loop scan linearization system that ensures accurate measurements and noise levels approaching those of open-loop operation. Innova delivers atomic resolution with great ease and scans up to 90 microns without the need to change scanner hardware. The integrated, high-resolution color optics and programmable, motorized Z-stage make finding features and changing tips or samples fast and easy. brukerafmprobes.com/innova T Features & Benefits Uncompromised Performance from Both Techniques Increased Productivity and Ease of Use Simple, Effective Solutions for Biological Samples Applications Live Cell Imaging Force and Bio- Mechanical Studies High-Resolution, Molecular-Scale Imaging he BioScope Catalyst has been designed from top to bottom to make it easier than ever to realize the full benefits of combining AFM and light microscopy. Its unique design delivers high-performance AFM results for both imaging and force measurement applications while integrating seamlessly with standard inverted light microscopes. Bruker s exclusive MIRO software enables true functional integration of the two techniques, allowing AFM imaging and force curves to be guided by optical images to automatically generate spatially registered and overlaid optical and AFM images. The full functionality of the BioScope Catalyst is made more productive with a variety of ease-of-use features. The NanoScope software presents a simple workflow to help guide users through their measurements, and the Catalyst hardware is designed to make such routine tasks as probe exchange and laser alignment simple and fast. Bruker s proprietary ScanAsyst Mode with automatic image optimization technology provides easier, faster, and more consistent imaging results. Its performance, productivity, and integrated design make the BioScope Catalyst the best, easiest to use life science AFM available today. brukerafmprobes.com/catalyst 14 15

9 Integrated AFM-Raman Imaging Systems Seamless Integration of AFM and Raman Spectroscopy InSight 3D AFM Production-Based 3D Reference Metrology for 45nm and Below C Features & Benefits Easy-to-Use AFMs for Spectroscopy in Materials and Life Sciences Highest Performance, Most Complete AFM Capabilities TERS-Ready AFM- Raman System Integration True Nanoscale Spectroscopy Targeted to Your Application Applications Nanoscale Materials Characterization Life Sciences Measurements Tip-Enhanced Raman Spectroscopy (TERS) Biomaterials atalyst-iris (Integrated AFM-Raman Imaging System) and Innova-IRIS systems enable researchers to easily and affordably combine chemical or crystallographic information from Raman spectroscopy, at high spatial and spectral resolution, with the most advanced nanoscale mechanical, electrical, and thermal AFM characterization. The IRIS models leverage the unique capabilities of the Catalyst and Innova platforms to provide TERSready performance that can be tailored to specific application requirements without sacrificing ease of use. The Catalyst-IRIS is compatible with Zeiss, Leica, Olympus, and Nikon inverted optical microscopes, and both systems fully support leading Raman instruments from Renishaw, HORIBA Scientific, and Princeton Instruments. brukerafmprobes.com/iris T Features & Benefits Unique, Non-Destructive, 3D Metrology, (LER, LWR, SWA) High-Throughput Depth Metrology for Production and Process Development Fab-Based, Production- Level Reliability and Automation Applications Reference Metrology for CD-SEM and Optical CD 3D Characterization of Advanced Lithography Production-Based Depth and CD Metrology for Etch Processes Non-Destructive Measurement of Contacts, Line End and Isolated Structures Applications in Semiconductor, Photomask, Data Storage and LED industries he InSight 3D AFM provides the unparalleled accuracy and precision required for non-destructive, high-resolution 3D measurements of critical semiconductor features. It enables an entirely new approach to in-line 3D metrology, delivering both unique 3D Metrology (LWR, LER) and the lowest measurement uncertainty for CD, Depth and Sidewall Angle on critical layers, such as Shallow Trench Isolation, Gate and FinFet structures. These features allow the system to overcome the limitations of CD-SEM and Optical CD technologies, which suffer from bias variation issues that negatively impact CD measurements. brukerafmprobes.com/insight3dafm 16 17

10 Dimension AFP Chemical Mechanical Planarization and Etch Metrology at 65nm Features & Benefits Fastest CMP Profiling Throughput Exceptional Productivity Fab-Based, Production-Level Reliability and Automation T Applications CMP Process Characterization (CU, W, STI Dielectric, Poly) Industry-Leading Repeatability for CMP and Etch Depth Metrology Profiling and High- Aspect-Ratio Depth Measurements in a Single Platform Applications in Semiconductor, Data Storage and LED Industries he Dimension AFP is the world s only fab-based metrology tool specifically designed for both CMP profiling and etch depth metrology for current and advanced technology nodes. The system combines the superb resolution of an AFM with the long-scan capability of an atomic force profiler to monitor etch depth and dishing and erosion on submicron features with unsurpassed repeatability. Replacing costly wafer crosssectioning, the Dimension AFP offers the highest performance available for device characterization. Imaging Modes brukerafmprobes.com/dafp Innovation with Integrity AFM Probes 18 19

11 Applications Table of Contents SPM Operation SPM Operation 21 Contact Mode AFM 22 Detector Signal TappingMode AFM 23 Peak Force Tapping 24 ScanAsyst 25 TappingMode & PhaseImaging 26 Probe PeakForce QNM 27 LiftMode 28 Sample Magnetic Force Microscopy - MFM 29 Electrostatic Force Microscopy - EFM 30 Surface Potential Microscopy - SPoM 31 Z X Y Feedback Loop Output Signal Adjusts Z Position Raster Scan Scanning Tunneling Microscopy - STM 32 Scanning Electrochemical Potential Microscopy - SECPM 33 Torsional Resonance 34 PeakForce TUNA & Conductive AFM 35 Scanning Spreading Resistance Microscopy - SSRM 36 Scanning Probe Microscopy (SPM) is a technique to provide spatially localized three-dimensional information by raster scanning a sharp probe and a surface in close proximity relative to each other and monitoring probe-sample interactions. Depending on the interaction, a variety of surface properties can be measured in addition to topographic information, such as electrical, magnetic, and nanomechanical data. The main SPM scan modes are contact mode, TappingMode, and Peak Force Tapping mode, and these build the foundation of all advanced scanning techniques. Scanning Capacitance Microscopy - SCM 37 Scanning Thermal Microscopies 38 Piezoresponse Microscopy 39 Critical Dimension Atomic Force Microscopy - CDAFM 40 Deep Trench Mode 41 Protein molecules in liquid before and after force pulling with AFM Probes: TESP pg 64 MPP (RTESP) pg 68 ESP pg 52 SNL-10 pg 108 DNP-10 pg 84 MLCT pg 80 MSNL-10 pg 106

12 Contact Mode AFM TappingMode AFM Feedback Loop Maintains Constant Cantilever Deflection Detector Signal Feedback Loop Maintains Constant Cantilever Amplitude Drive Signal Z Feedback Loop Output Signal Adjusts Z Position Z Feedback Loop Output Signal Adjusts Z Position Raster Scan X Y Raster Scan X Y Contact mode is a primary AFM mode. The probe is a microfabricated cantilever with a sharp tip. Tip and sample are in perpetual contact during the raster-scan. Detector signal is a measure of cantilever deflection in Z. In feedback mode, output signal usually adjusts the Z position of the scanner to maintain a deflection setpoint. This mode enables numerous secondary modes, including LFM, Force Modulation, SCM, SSRM, TUNA, and CAFM. TappingMode is a primary AFM mode. The probe is a microfabricated cantilever with a sharp tip. A drive signal, applied to the tapping piezo, mechanically oscillates the probe at or near its resonance frequency (usually the fundamental resonance). Detector signal is cantilever oscillation amplitude, or phase (relative to drive signal). In feedback mode, output signal usually adjusts the Z position of the scanner to maintain an (rms) amplitude setpoint. TappingMode enables numerous secondary modes, including PhaseImaging, EFM, MFM, and Surface Potential imaging. Native Collagen fibrils exhibiting the typical 67nm Probes: banding pattern. ESP pg 52 MPP pg 56 SNL-10 pg 108 DNP-10 pg 84 MLCT pg 80 MSNL-10 pg 106 Topography of antimony dendrites on graphite. Probes AIR: MPP (RTESP) pg 68 TESP pg 64 OTESPA pg 70 FESP pg 58 Probes FLUID: SNL-10 pg 108 DNP-10 pg 84 MLCT pg 80 MSNL-10 pg

13 Peak Force Tapping ScanAsyst C A approach B Time D withdraw E A PeakForce Tapping C + B E Auto Optimization of: Set Point Gain Scan Rate = approach D withdraw Z - Limit Time A B C D E Peak Force Tapping is Bruker s exclusive core technology that enables many of our most recent AFM innovations, including ScanAsyst, PeakForce QNM, PeakForce TUNA and ScanAsyst-HR. Like TappingMode, Peak Force Tapping is an AC imaging technique, i.e., the cantilever is oscillated, and therefore very gentle on even delicate samples. What makes Peak Force Tapping technology unique is that the probe is oscillated well below its resonance frequency. By doing so, every interaction between the tip and sample can be measured, generating a continuous series of force-distance curves. Rather than the feedback loop controlling the cantilever amplitude (i.e., like TappingMode), it is the peak force of each tip-sample interaction that is held constant. This allows Peak Force Tapping to operate at much lower forces and makes its operation inherently more stable in both air and liquid. It also makes it possible to measure nanomechanical and nanoelectrical properties during each interaction. Probes: ScanAsyst-Air pg 88 ScanAsyst-Fluid pg 88 ScanAsyst-Fluid+ pg 88 ScanAsyst is an exclusive imaging mode based on Peak Force Tapping technology that automatically optimizes imaging parameters including setpoint, feedback gains, and scan rate. This makes it faster and easier to obtain consistent high-quality results. Because the tip-sample interaction force is directly controlled, ScanAsyst is very gentle on samples in both air and liquid. Faster imaging is now possible using ScanAsyst with the Dimension FastScan AFM or using ScanAsyst-HR on the MultiMode 8 AFM. Polymer brush sample imaged on a MultiMode 8 using ScanAsyst. Sample courtesy of S. Sheiko, University of North Carolina, Chapel Hill. Probes: ScanAsyst-Air pg 88 ScanAsyst-Fluid pg 88 ScanAsyst-Fluid+ pg 88 ScanAsyst-Air-HR pg

14 TappingMode & PhaseImaging PeakForce QNM Detector Signal Detector Signal DMT fit for modulus Drive Signal Drive Signal Adhesion Peak Force Deformation Dissipation Tip-sample Separation 2 Baseline Attractive Forces Peak Force & Deformation Adhesion Baseline 1 Modulus Dissipation TappingMode AFM is an AC technique in which the cantilever is operated at or near its resonance frequency. Forces between tip and sample cause a change of the initial resonance behavior. Typically a reduction in the free air amplitude is maintained to track the sample topography. By simultaneously monitoring the phase shift between drive signal to the cantilever and its response, a so-called phase image can be generated that provides very high spatial information based on various material properties. PeakForce QNM is another exclusive imaging mode based on Peak Force Tapping technology. Here each tip-sample interaction is analyzed to extract quantitative nanomechanical properties including elastic modulus, adhesion, deformation, and dissipation. This allows each of these properties to be mapped quantitatively and at high resolution while still collecting standard topography images at normal imaging rates. Unlike some competing technologies based on old contact mode technology, PeakForce QNM works well on a wide range of sample types from soft delicate materials with modulus <1MPa all the way up to materials with modulus >50GPa. Probes: MPP (RTESP) pg 68 TESP pg 64 OTESPA pg 70 FESP pg 58 TappingMode phase image clearly shows microphase separation in SBS tri-block copolymer. Modulus image of a multi-component polymer blend. Three components are clearly identified by their modulus. Probes: MPP (RTESPA) pg 68 MPP pg 68 MPP pg 68 PDNISP-HS pg 124 ScanAsyst-Air pg

15 LiftMode Magnetic Force Microscopy - MFM LiftMode Scan LiftMode Scan Magnetic Probe Lift Height Magnetic Forces Cause Phase Shift over Different Domains during the LiftMode Scan = Phase Shift Lift Height TappingMode Height Data Height Data LiftMode is not an imaging mode, as it by itself does not measure a new quantity to reveal new information, but rather a technique that enables other modes such as MFM, EFM, and SCM. In LiftMode the sample is scanned first in a regular topographic mode: Contact, TappingMode or Peak Force Tapping. The following line, the lift line, traces the previously acquired topography back and adds a Z-offset. As the feedback laser is not necessarily needed during the lift line, experiments that would be influenced by laser light can be enabled (DarkLift). Magnetic Force Microscopy (MFM) uses a combination of TappingMode, LiftMode and a properly prepared tip to gather information about the magnetic field above a sample. Each line of the sample is first scanned in TappingMode operation to obtain the sample topography. The topographic information is stored and retraced with a userselectable height offset in LiftMode, during which the magnetic data are collected. Typical lift heights in MFM range from nm. MFM and EFM samples. Magnetic domains in a steel sample. Probes: MESP pg 98 SCM-PIT pg 112 SCM-PIC pg 112 Probes: MESP pg 98 MESP-HM pg 98 MESP-LM pg 98 MESP-RC pg

16 Electrostatic Force Microscopy - EFM Surface Potential Microscopy - SPoM 2V Potential Data 0V -1V LiftMode Scan Conductive Probe LiftMode Scan Conductive Probe Electric Forces Cause Phase Shift over Different Domains during the LiftMode Scan = Phase Shift Lift Height Lift Height Height Data Height Data Single Pass (Dual Frequency) is also available Electrostatic Force Microscopy (EFM) uses a combination of TappingMode, LiftMode and a conductive tip to gather information about the electric field above a sample. Each line of the sample is first scanned in TappingMode operation to obtain the sample topography. The topographic information is stored and retraced with a userselectable height offset in LiftMode, during which the electrical data is collected. Typical lift heights in EFM range from nm. Single Pass (Dual Frequency) Capacity is also available Surface Potential Microscopy (SPoM) is based on the macroscopic Kelvin method. SPoM is able to measure surface topography and surface potential (VDC) information simultaneously. Topography is acquired using TappingMode operation but with a conductive tip. The electrical information is extracted by applying AC and DC voltages to the tip. The total voltage acting on the tip is: V = VDC + VAC sin (W t). A dedicated feedback loop adjusts the DC voltage to the tip to zero the contact potential difference between the tip and surface at each pixel, making DC a measure of the surface potential. SPoM can be carried out using LiftMode or in a dualfrequency one-pass fashion. Carbon black aggregates in a rubber matrix visualized by utilizing their electric properties. Composite image of Height and Surface potential of a laser diode (8 μm scan). Probes: SCM-PIT pg 112 MESP pg 98 MESP-RC pg 100 OSCM-PT pg 112 Probes: SCM-PIT pg 112 MESP pg 98 MESP-RC pg 100 OSCM-PT pg

17 Scanning Tunneling Microscopy - STM Scanning Electrochemical Potential Microscopy - SECPM Feedback Loop Maintains Constant Tunneling Current Tunneling Current Amplifier Potentiometer Potentiostat Counter Electrode DC Bias Feedback Loop Output Signal Adjusts Z Position Reference Electrode Z X Y XY Raster Scan Working Electrode = Sample STM is a primary AFM mode. The probe is a metal needle. Detector signal is the tunneling current between the tip and sample when an electrical bias, V, is applied. In feedback mode, output signal usually adjusts the Z position of the scanner to maintain a tunneling current setpoint. STM is the highest resolution AFM mode. The probe in SECPM is a sharp metal needle. Detector signal is electric potential difference between tip and sample (or between tip and a reference electrode) in an ionic or polar liquid, where an electric double-layer exists at the liquid/sample interface. SECPM maps the electric potential profile across the depth of the double-layer (versus Z, the tip-sample distance) at tip XY location. In feedback mode, the output signal usually adjusts the Z position of the scanner. Probes: TT10 pg 129 PT10 pg 128 STM pg 129 CLST-PTBO pg 128 DPT10 pg 128 DTT10 pg 128 PT-ECM10 pg 128 TT-ECM10 pg 129 In-situ atom resolution electrochemical STM image of Cu underpotential deposition on Au(111). Sn60Ph40 alloy in glycerol. Probes: PT-ECM10 pg

18 Torsional Resonance PeakForce TUNA & Conductive AFM Detector Signal Feedback Loop Maintains Constant Lateral Deflection Contact Mode Drive Signal Conductive AFM Probe Current Amplifier (Sub pa µa) Lateral Tip Dither n p Z Feedback Loop Output Signal Adjusts Z Position Raster Scan V DC Si Topography TUNA Data X Y During Torsional Resonance mode (TR-Mode ), the tip is actuated parallel rather then vertical with respect to the surface. Forces between tip and sample cause a change in resonance behavior that can be used to track the surface at a constant distance. TR-Mode has the advantage that the tip remains at a constant distance to the surface at all times. This can be advantageous in modes like TR-TUNA or nearfield-optical experiments. Tunneling AFM (TUNA) and Conductive AFM traditionally operate in contact mode using a conductive probe. The imaging signal is the electric current between tip and sample for an applied DC bias. In the feedback mode, the DC bias is dynamically adjusted to maintain a constant tip-sample current. The operational current ranges is from fa (TUNA) to μa (CAFM). More recently, CAFM and TUNA have been utilized with Peak Force Tapping into a new mode, PeakForce TUNA, which enables these measurements to be taken more reliably and on a much wider range of samples, as well as allowing for the direct correlation of electrical data with nanomechanical information from PeakForce QNM measurements. Probes: MPP pg 62 FESP pg 58 Steps on HOPG as seen by the tip operating in TR-Mode. Conductive Polymer (right), Poly-analine on Indium Tin Oxide (left). Probes: SCM-PIC pg 112 SCM-PIT pg 112 DDESP-FM pg 110 PFTUNA pg

19 Scanning Spreading Resistance Microscopy - SSRM Scanning Capacitance Microscopy - SCM Contact Mode Contact Mode Conductive AFM Probe Logarithmic Amplifier log (I) Conductive AFM Probe Capacitance Sensor SCM Sensor (10 pa µa) n Si p n Si p n n p p n V DC Resistance (SSRM Data) Spreading Resistance ρ R = 4 x radius V AC Topography SCM Data SSRM uses contact mode AFM and a conductive probe. Sensor Signal is the electric current between the tip and sample for an applied DC bias, VDC. SSRM measures the current by referencing it to an internal resistor, using a logarithmic amplifier, to yield local resistance value. SSRM maps the variation in majority carrier concentration in doped semiconductors. SCM uses contact mode AFM and a conductive probe and applies to semiconductor samples with an AC bias (amplitude DV, ~90 khz) with a DC offset. The capacitance of the metal-oxide-semiconductor (MOS) capacitor at tip-sample contact is a function of majority carrier concentration in the sample. SCM uses an ultra-high-frequency (1 GHz) detector to measure tip-sample capacitance variation, DC, at the bias frequency. Sensor signal is DC/DV. In feedback mode, output signal is DV, adjusted to maintain a DC/DV Setpoint. SCM maps relative changes of majority carrier concentration in semiconductors. Transistor cross section. Topography (left), SCM (right) laser diode cross section. Probes: DDESP pg 110 Probes: SCM-PIC pg 112 SCM-PIT pg 112 MESP-RC pg 100 OSCM-PT pg

20 Scanning Thermal Microscopies Piezoresponse Microscopy Vertical Deflection Monitored as Tip Heated Topographical Measurement Heater Control Temperature Measurement T Thermal Property Map Topographical Map In Scanning Thermal Microscopy (SThM) a heated tip is scanned across a sample. Changes in the tip s resistivity reveal either thermal conductivity or thermal gradients on the sample. In Nanoscale Thermal Analysis (NanoTA), a tip is heated in such a way that it induces a phase transition in the sample. That transition is monitored using the cantilever deflection and is material specific. Piezoresponse (Piezoforce) Microscopy (PFM) is a technique based on contact mode that maps out the inverse piezoelectric effect on a sample. The sample is electrically stimulated and the topographic response of the sample is monitored using lock-in techniques. Amplitude and phase information reveal information about the strength and direction of the polarization on the sample. Probes: VITA-NanoTA Probes pg 131 VITA-SThM Probes pg 130 Topography and thermal map of a data storage sample. Small defect on the poling boundary of a Lithium niobate film visible in the amplitude signal of a PFM experiment. Probes: MESP-RC pg 100 SCM-PIT pg 112 MESP pg 98 DDESP-FM pg

21 Critical Dimension Atomic Force Microscopy - CDAFM Deep Trench Mode Sidewall Angles Line Width Roughness LWR & LER Depth Top CD Middle CD Bottom CD Sidewall Profile High Scan Rate Slower Scan Higher Resolution on Horizontal Surfaces Flare of Tip Enables Measurements of Undercut Features Critical Dimension Atomic Force Microscopy (CDAFM) is a nondestructive, high-resolution technique that enables accurate measurement of three-dimensional (3D) features. CD-AFM is accurate as it provides highly linear measurement over a range of line-widths and is unaffected by feature type, density or material type. Additionally, the technique is able to measure undercut features and can be calibrated using NIST traceable calibration standards to ensure accuracy of measurements. CDAFM capabilities have enabled its use as a reference metrology tool. Deep Trench (DT) Mode is an AFM mode developed specifically for the repeatable measurement of deep semiconductor trench structures for 90 nm and below. It is an adaptive scan method in which data is only collected when user-specified system state conditions are met. This means that the tip is allowed to move only in certain servo states. DT Mode steps the tip along the sample surface collecting data points only when good scan criteria are met. This permits feature-dependent scan optimization in which the concentration of data points is highest on the features of interest and low elsewhere, resulting in improved measurement precision. Multiple semiconductor trenches. Isolated semiconductor via. Probes: 3D Metrology Probes pg 114 Probes: FIB Probes pg 120 Depth Metrology Probes pg 116 CNT Probes pg 122 TESP-HAR pg

22 Probes Innovation with Integrity AFM Probes 42 43

23 Probes Table of Contents Bruker AFM Probes 10-Pack Policy 45 Quality and Performance - Silicon Nitride Probes 46 Silicon Nitride Probe Cantilever Layouts 47 Probes Application Selector Guide - Commonly Used Probes Silicon Probes 52 Contact 52 Contact MPP 54 Contact MPP-Rotated 56 Force Modulation 58 Multi MPP 60 Multi MPP-Rotated 62 Tapping 64 Tapping MPP 66 Tapping MPP-Rotated 68 Visible Apex 70 Hardened 72 Force Calibration 74 HarmoniX 76 Silicon Nitride Probes 78 FastScan 78 MicroLever Series 80 MicroLever - Special 82 NP Series 84 NP - Special 86 ScanAsyst 88 ORC8 Series 90 OTR4 Series 92 OTR8 Series 94 Biolever 96 Magnetic Probes 98 MFM 98 MFM - Premium 100 MFM - MicroLever 102 Supersharp Probes 104 Supersharp Silicon 104 Supersharp MicroLever 106 Supersharp NP 108 Electrical Probes 110 Doped Diamond 110 Platinum 112 Critical Dimension Probes D Metrology 114 Depth Metrology 116 Spike Automated Probes 118 HAR 118 FIB 120 CNT 122 Nanoindentation Probes 124 Diamond 124 Active Probe 126 Self Sensing/ Actuating 126 STM Probes 128 Platinum - Iridium 128 Tungsten 129 Thermal Probes 130 VITA - SThM 130 VITA - NanoTA 131 Helpful Equations 132 Bruker AFM Probes 10-Pack Policy Continuing the Commitment to Quality E njoy the savings of volume probe purchases without sacrificing quality! Bruker Probes understands that most customers purchase their probes in large quantities to take advantage of volume discounts. Traditionally, the price per probe becomes decreasingly expensive as the pack size increases, with the best savings resulting from the purchase of an entire wafer. Unfortunately, large pack sizes have been identified as a frequent cause of inconvenience to the customer and corruption of probe quality over time: Large pack sizes have a hidden cost that customers share with friends and colleagues. The process of repackaging and distributing probes from larger pack sizes is time consuming and subjects the probes to potential handling damage. Large packs must be opened and closed repeatedly throughout their lifetime, continuously exposing the entire package to static and environmental contamination, thus degrading probe quality over time. In an effort to allow customers to continue to enjoy volume discounts while enabling them to preserve the initial quality of the probes, Bruker AFM Probes offers most probes in only two pack sizes 10-packs and wafers and extends the volume discount structure when multiple 10-packs are purchased. These discounts can be found on each product page in the website where applicable. Example: Price per 10-Pack, When Purchased in Quantities Indicated Model Wafer DNP-10 $ $ $ $ $ $ $4, DNP-S10 $ $ $ $ $ $ $5, NP-10 $ $ $ $ $ $ $4, NP-S10 $ $ $ $ $ $ $5, Since the cost of purchasing a wafer s worth of probes in individually packaged and sealed 10-packs is equivalent to purchasing the wafer in most cases, it is highly recommended that wafers are only purchased by customers who need to expose a full wafer to a secondary process, such as coatings, treatments, etc. For everyone else, buying large quantities of probes in 10-packs at the volume discount rate will make the probes easier to store, more effective to distribute, and guaranteed fresh every time a 10-pack is opened! 44 45

24 Quality and Performance Improvement of Bruker Silicon Nitride Probes B ased on customer experience and internal applications feedback, Bruker AFM Probes launched a project in 2009 to implement user requests and improve the quality and performance of the Silicon Nitride (SiN) probes. The outcome was twofold: 1) An updated version of the old SiN probe series with exactly the same lever characteristics, but with additional requested imaging benefits, and 2) an innovative high-performance SiN product line, capable of groundbreaking imaging results. Bruker s Silicon Nitride Probe Cantilever Layouts T he cantilever orientation of Bruker s Silicon Nitride probe 10-packs is indicated below, with top indicating upward in the box, and bottom indicating downward in the box. Differences Between the Old and New Style SiN Probes: The older style SiN products DNP, DNP-S, NP, NP-S, MLCT, MSCT were improved in February From this change, most customers are getting more consistent results with higher resolution imaging. The differences between the probes are detailed below: Old Style Lower Tip Aspect Ratio with 35 angles Slightly Blunter Tips with radius of curvature ~20nm to 50nm nominal Thicker Probe Body of 500μm with bonded glass wafer The New SNL Product Line: New Style Higher Tip Aspect Ratio with 15 to 25 angles Slightly Sharper Tips with radius of curvature ~15nm to 30nm nominal Thinner Probe Body of 300μm with no glass wafer. Exactly the same as most standard silicon probes! The new SiN product line is called the sharp nitride lever series (SNL), and it unlocks never before possible, high-resolution imaging in contact mode, TappingMode, and now ScanAsyst mode operation. It combines a sharp silicon tip of 2nm (nominal) radius of curvature with the soft SiN cantilevers found on the legacy SiN products. The resulting new products SNL, MSNL, ScanAsyst-Air, ScanAsyst-Fluid, and ScanAsyst-Fluid+ are probes capable of high-resolution imaging with a tip that stays sharp during long term scanning, for all of the applications where a legacy SiN probe would have been used in the past. Call us for a free sample today! One Cantilever A on top Products: ScanAsyst-Air, ScanAsyst-Fluid, ScanAsyst-Fluid+ Four Cantilevers C & D on top A & B on bottom Products: SNL, DNP, DNP-S, NP, NP-S, NP-O, NPG, NP-UC Six Cantilevers B, C, D, E, F on top A on bottom Products: MSNL, MLCT, MSCT, MLCT-O, MLCT-UC, MSCT-UC A D C B C D E F A B A Hi-Res DNA in air & fluid Typical 2nm tip radius on Sharp Nitride Levers Hi-Res Alkane, 4.1nm spacings 46 47

25 Probes Application Selector Guide Commonly Used Probes Force Constant (N/m) Probe Model Resonant Frequency (khz) Radius of Curvature (nm) Reflective Coating Probe Attributes Tip Side Coating Catalog Page AFM Mode Fast Force Scanning ScanAsyst Tapping Contact Curves Electrical Magnetic è Cells Life Sciences Sample Type Tissues Biomolecules Polymers/ Soft Samples Materials Sample Type Air Liquid Air Liquid Air Liquid Air Liquid Air Hard Samples Liquid DNP Low Force, Symmetric Tip Au None 84 High Resolution, Low Force, DNP-S Symmetric Tip Au None 84 Highest Speed, FastScan-A Precise Force Control Al None 78 Highest Speed, FastScan-B Precise Force Control Au None 78 Highest Speed, FastScan-C Precise Force Control Au None 78 MLCT Lowest Force, Symmetric Tip Au None 80 High Resolution, Lowest Force, MSCT Symmetric Tip Au None 80 Ultra-High Resolution, Lowest MSNL Force, Symmetric Tip Au None 106 Ultra-High Resolution, Lowest ScanAsyst-Air Force, Symmetric Tip Al None 88 Highest Speed, Ultra-High ScanAsyst-Air-HR Resolution, Lowest Force Al None 88 High Resolution, Lowest Force, ScanAsyst-Fluid Symmetric Tip Au None 88 Ultra-High Resolution, Lowest ScanAsyst-Fluid+ Force, Symmetric Tip Au None 88 Ultra-High Resolution, Low Force, SNL Symmetric Tip Au None 108 è è è è 48 49

26 Probes Application Selector Guide Commonly Used Probes (continued) Force Constant (N/m) Probe Model Probe Attributes Resonant Frequency (khz) DDESP Radius of Curvature (nm) Reflective Coating Tip Side Coating Catalog Page Al Diamond 110 Conductive, Low Force, DDESP-FM Increased Wear Resistance Al Diamond 110 Highest Resolution, Low Force, FESPA Asymmetric Tip Al None 58 High Resolution, Low Force, FMV Asymmetric Tip None None 58 High Performance, Magnetic MESP Characterization, Asymmetric Tip Co/Cr Co/Cr 98 High Performance, Magnetic MESP-RC Characterization, Symmetric Tip Co/Cr Co/Cr 100 NCHV-A Al None 64 High Performance, Electrical OSCM-PT Characterization, Visible Apex Tip Al Pt 112 Highest Resolution, Electrical PFTUNA Characterization Pt-Ir Pt-Ir 112 RTESPA (MPP ) Al None 68 High Performance, Electrical SCM-PIC Characterization, Asymmetric Tip Pt-Ir Pt-Ir 112 High Performance, Electrical SCM-PIT Characterization, Asymmetric Tip Pt-Ir Pt-Ir 112 TESPA Conductive, Increased Wear Resistance High Resolution, Asymmetric Tip Highest Resolution, Symmetric Tip Highest Resolution, Symmetric Tip Al None 64 AFM Mode Fast Force Scanning ScanAsyst Tapping Contact Curves Electrical Magnetic è è è è è Air Liquid Air Liquid Air Liquid Life Sciences Sample Type Cells Tissues Biomolecules Polymers/ Soft Samples Materials Sample Type Hard Samples Air Liquid Air Liquid 50 51

27 Silicon Probes Contact brukerafmprobes.com/contact Contact etched silicon probes consist of an integrated single-crystal silicon cantilever and tip. The tip shape is identical to that of the most commonly used TappingMode probes (model TESP), however, the cantilever is longer, which provides the low spring constant needed for contact mode imaging. The tip has a smaller radius of curvature than most silicon nitride tips and steeper sidewalls, making it a good choice for applications requiring a higher aspect ratio tip. These probes can also be used with interferometer-based detection AFMs because of their long cantilever length. Name Mount Description Pack Size CONTV-A Unmounted 0.2N/m, 13kHz, Al Reflective Coating 10 CONTV-AW Unmounted 0.2N/m, 13kHz, Al Reflective Coating 375 ESP Unmounted 0.2N/m, 13kHz, Al Reflective Coating 10 ESP-MT Caliber 0.2N/m, 13kHz, Al Reflective Coating 10 ESPW Unmounted 0.2N/m, 13kHz, Al Reflective Coating 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) CONTV-A ESP Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangular) Coating Front Side Coating Notes - These Contact probes come with 40nm Aluminum back side reflective coating standard. - For similar contact probes with a rotated (symmetrical) tip, see the Contact MPP - Rotated section on page None Back Side Coating 40 ±10nm of Al Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

28 Silicon Probes Contact MPP brukerafmprobes.com/contactmpp The Contact MPP cantilevers are designed for high-resolution contact mode imaging. Every aspect of the MPP design has been considered and optimized to provide the most accurate profiling of microscopic features. With precisely controlled cantilever geometry to enable repeatable scanning parameters, and an extra sharp tip radius to reduce the AFM s minimum detectable feature size, Bruker s flagship MPP probes are an excellent choice for high-sensitivity silicon probe imaging. Name Mount Description Pack Size MPP Unmounted 0.9N/m, 20kHz, Asymmetric Tip, No Coating 10 MPP W Unmounted 0.9N/m, 20kHz, Asymmetric Tip, No Coating 375 MPP Unmounted 0.9N/m, 20kHz, Asymmetric Tip, Al Reflective Coating 10 MPP W Unmounted 0.9N/m, 20kHz, Asymmetric Tip, Al Reflective Coating 375 MPP Unmounted 0.1N/m, 10kHz, Asymmetric Tip, No Coating 10 MPP W Unmounted 0.1N/m, 10kHz, Asymmetric Tip, No Coating 375 MPP Unmounted 0.1N/m, 10kHz, Asymmetric Tip, Al Reflective Coating 10 MPP W Unmounted 0.1N/m, 10kHz, Asymmetric Tip, Al Reflective Coating 375 MPP Unmounted 5N/m, 40kHz, Asymmetric Tip, No Coating 10 MPP W Unmounted 5N/m, 40kHz, Asymmetric Tip, No Coating 375 MPP Unmounted 5N/m, 40kHz, Asymmetric Tip, Al Reflective Coating 10 MPP W Unmounted 5N/m, 40kHz, Asymmetric Tip, Al Reflective Coating 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) MPP-31 (Rectangular) MPP-32 (Rectangular) MPP-33 (Rectangular) Coating Front Side Coating Notes - Aluminum back side reflective coating is optional on all MPP products. - Identical probes with a rotated version of the tip can be found on page None Back Side Coating 40 ±10nm of Al (where applicable) Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

29 Silicon Probes Contact MPP Rotated brukerafmprobes.com/contactmpp-r The Contact MPP-Rotated cantilevers are designed for high-resolution contact mode imaging. These probes, identical in tip sharpness and cantilever geometry to the standard Contact MPP probes, have a 180 rotated tip that provides a more symmetric representation of features over 200nm than the standard tip. The rotated versions of Bruker s flagship MPP probes are an excellent choice for high-sensitivity silicon probe imaging. Name Mount Description Pack Size MPP Unmounted 0.9N/m, 20kHz, Rotated Tip, No Coating 10 MPP W Unmounted 0.9N/m, 20kHz, Rotated Tip, No Coating 375 MPP Unmounted 0.9N/m, 20kHz, Rotated Tip, Al Reflective Coating 10 MPP W Unmounted 0.9N/m, 20kHz, Rotated Tip, Al Reflective Coating 375 MPP Innova 0.9N/m, 20kHz, Rotated Tip, Al Reflective Coating 10 MPP Unmounted 0.1N/m, 10kHz, Rotated Tip, No Coating 10 MPP W Unmounted 0.1N/m, 10kHz, Rotated Tip, No Coating 375 MPP Unmounted 0.1N/m, 10kHz, Rotated Tip, Al Reflective Coating 10 MPP W Unmounted 0.1N/m, 10kHz, Rotated Tip, Al Reflective Coating 375 MPP Unmounted 5N/m, 40kHz, Rotated Tip, No Coating 10 MPP W Unmounted 5N/m, 40kHz, Rotated Tip, No Coating 375 MPP Unmounted 5N/m, 40kHz, Rotated Tip, Al Reflective Coating 10 MPP W Unmounted 5N/m, 40kHz, Rotated Tip, Al Reflective Coating 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) MPP-31 (Rectangular) MPP-32 (Rectangular) MPP-33 (Rectangular) Coating Front Side Coating Notes - Aluminum back side reflective coating is optional on all MPP products None Back Side Coating 40 ±10nm of Al (where applicable) Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

30 Silicon Probes Force Modulation brukerafmprobes.com/forcemod Contrast in force modulation is dependent on the spring constant of the cantilever, which must complement the pliancy of the two materials being contrasted. The spring constant should be close to or in between the pliancy of one or the other material. In this way, the tip will indent into one material more than the other, providing good force modulation image contrast. These force modulation cantilevers have a mid-range spring constant that provides a good starting point for force modulation imaging. Name Mount Description Pack Size FESP Unmounted 2.8N/m, 75kHz, No Coating 10 FESP-MT Caliber 2.8N/m, 75kHz, No Coating 10 FESPW Unmounted 2.8N/m, 75kHz, No Coating 375 FESPA Unmounted 2.8N/m, 75kHz, Al Reflective Coating 10 FESPAW Unmounted 2.8N/m, 75kHz, Al Reflective Coating 375 FMV Unmounted 2.8N/m, 75kHz, No Coating 10 FMV-W Unmounted 2.8N/m, 75kHz, No Coating 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) FESP/ FESPA FMV Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangular) Coating Front Side Coating Notes - Aluminum back side reflective coating on the FESPA and FESPAW only. - For similar force modulation probes with a rotated (symmetrical) tip, see the Multi MPP - Rotated section on page None Back Side Coating 40 ±10nm of Al (where applicable) Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

31 Silicon Probes Multi MPP brukerafmprobes.com/multimpp The Multi MPP cantilevers are designed for high-resolution force modulation imaging and specialty applications. Every aspect of the MPP design has been considered and optimized to provide the most accurate profiling of microscopic features. With precisely controlled cantilever geometry to enable repeatable scanning parameters, and an extra sharp tip radius to reduce the AFM s minimum detectable feature size, Bruker s flagship MPP probes are an excellent choice for high-sensitivity silicon probe imaging. Name Mount Description Pack Size MPP Unmounted 3N/m, 75kHz, Asymmetric Tip, No Coating 10 MPP W Unmounted 3N/m, 75kHz, Asymmetric Tip, No Coating 375 MPP Unmounted 3N/m, 75kHz, Asymmetric Tip, Al Reflective Coating 10 MPP W Unmounted 3N/m, 75kHz, Asymmetric Tip, Al Reflective Coating 375 MPP Unmounted 0.9N/m, 40kHz, Asymmetric Tip, No Coating 10 MPP W Unmounted 0.9N/m, 40kHz, Asymmetric Tip, No Coating 375 MPP Unmounted 0.9N/m, 40kHz, Asymmetric Tip, Al Reflective Coating 10 MPP W Unmounted 0.9N/m, 40kHz, Asymmetric Tip, Al Reflective Coating 375 MPP Unmounted 35N/m, 190kHz, Asymmetric Tip, No Coating 10 MPP W Unmounted 35N/m, 190kHz, Asymmetric Tip, No Coating 375 MPP Unmounted 35N/m, 190kHz, Asymmetric Tip, Al Reflective Coating 10 MPP W Unmounted 35N/m, 190kHz, Asymmetric Tip, Al Reflective Coating 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) MPP-21 (Rectangular) MPP-22 (Rectangular) MPP-23 (Rectangular) Coating Front Side Coating Notes - Aluminum back side reflective coating is optional on all MPP products. - Identical probes with a rotated version of the tip can be found on page None Back Side Coating 40 ±10nm of Al (where applicable) Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

32 Silicon Probes Multi MPP Rotated brukerafmprobes.com/multimpp-r The Multi MPP cantilevers are designed for high-resolution force modulation imaging and specialty applications. These probes, identical in tip sharpness and cantilever geometry to the standard Multi MPP probes, have a 180 rotated tip that provides a more symmetric representation of features over 200nm than the standard tip. The rotated versions of Bruker s flagship MPP probes are an excellent choice for high-sensitivity silicon probe imaging. Name Mount Description Pack Size MPP Unmounted 3N/m, 75kHz, Rotated Tip, No Coating 10 MPP W Unmounted 3N/m, 75kHz, Rotated Tip, No Coating 375 MPP Unmounted 3N/m, 75kHz, Rotated Tip, Al Reflective Coating 10 MPP W Unmounted 3N/m, 75kHz, Rotated Tip, Al Reflective Coating 375 MPP Innova 3N/m, 75kHz, Rotated Tip, Al Reflective Coating 10 MPP Unmounted 0.9N/m, 40kHz, Rotated Tip, No Coating 10 MPP W Unmounted 0.9N/m, 40kHz, Rotated Tip, No Coating 375 MPP Unmounted 0.9N/m, 40kHz, Rotated Tip, Al Reflective Coating 10 MPP W Unmounted 0.9N/m, 40kHz, Rotated Tip, Al Reflective Coating 375 MPP Unmounted 35N/m, 190kHz, Rotated Tip, No Coating 10 MPP W Unmounted 35N/m, 190kHz, Rotated Tip, No Coating 375 MPP Unmounted 35N/m, 190kHz, Rotated Tip, Al Reflective Coating 10 MPP W Unmounted 35N/m, 190kHz, Rotated Tip, Al Reflective Coating 375 RFESP Unmounted Order MPP , 3N/m, 75kHz, Rotated Tip, No Coating 10 RFESPW Unmounted Order MPP W, 3N/m, 75kHz, Rotated Tip, No Coating 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) MPP-21 (Rectangular) MPP-22 (Rectangular) MPP-23 (Rectangular) RFESP (Rectangular) Coating Front Side Coating Notes - Aluminum back side reflective coating is optional on all MPP products. - RFESP and RFESPW are identical to MPP and MPP W, respectively None Back Side Coating 40 ±10nm of Al (where applicable) Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

33 Silicon Probes Tapping brukerafmprobes.com/tapping Bruker s line of etched silicon probes are the industry standard for imaging in non-contact and TappingMode. Tight specification control, unrivaled sensitivity, and dependably sharp tips all contribute to producing consistently accurate, high-resolution imaging. The LTESP and NCLV products offer a longer cantilever with a lower resonant frequency. Name Mount Description Pack Size LTESP Unmounted 48N/m, 190kHz, No Coating 10 LTESP-MT Caliber 48N/m, 190kHz, No Coating 10 LTESPW Unmounted 48N/m, 190kHz, No Coating 375 NCHV Unmounted 42N/m, 320kHz, No Coating 10 NCHV-W Unmounted 42N/m, 320kHz, No Coating 375 NCHV-A Unmounted 42N/m, 320kHz, Al Reflective Coating 10 NCHV-AW Unmounted 42N/m, 320kHz, Al Reflective Coating 375 NCLV Unmounted 48N/m, 190kHz, No Coating 10 NCLV-W Unmounted 48N/m, 190kHz, No Coating 375 TESP Unmounted 42N/m, 320kHz, No Coating 10 TESP-MT Caliber 42N/m, 320kHz, No Coating 10 TESPW Unmounted 42N/m, 320kHz, No Coating 375 TESPA Unmounted 42N/m, 320kHz, Al Reflective Coating 10 TESPAW Unmounted 42N/m, 320kHz, Al Reflective Coating 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) LTESP NCHV NCL TESP/ TESPA Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) LTESP/ NCL (Rectangular) TESP/ NCHV (Rectangular) Coating Front Side Coating Notes - Aluminum back side reflective coating on the NCHV-A, NCHV-AW, TESPA and TESPAW. - For similar TappingMode probes with a rotated (symmetrical) tip, see the Tapping MPP - Rotated section on page None Back Side Coating 40 ±10nm of Al (where applicable) Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

34 Silicon Probes Tapping MPP brukerafmprobes.com/tappingmpp The Tapping MPP cantilevers are designed for high-resolution imaging in non-contact or TappingMode. Every aspect of the MPP design has been optimized to provide the most accurate profiling of microscopic features. With precisely controlled cantilever geometry to enable repeatable scanning parameters, an extra sharp tip radius to reduce the AFM s minimum detectable feature size, and a taller tip to minimize squeeze film damping in TappingMode, Bruker s flagship MPP probes are an excellent choice for high-sensitivity silicon probe imaging. Name Mount Description Pack Size MPP Unmounted 40N/m, 300kHz, Asymmetric Tip, No Coating 10 MPP W Unmounted 40N/m, 300kHz, Asymmetric Tip, No Coating 375 MPP Unmounted 40N/m, 300kHz, Asymmetric Tip, Al Reflective Coating 10 MPP W Unmounted 40N/m, 300kHz, Asymmetric Tip, Al Reflective Coating 375 MPP Unmounted 5N/m, 150kHz, Asymmetric Tip, No Coating 10 MPP W Unmounted 5N/m, 150kHz, Asymmetric Tip, No Coating 375 MPP Unmounted 5N/m, 150kHz, Asymmetric Tip, Al Reflective Coating 10 MPP W Unmounted 5N/m, 150kHz, Asymmetric Tip, Al Reflective Coating 375 MPP Unmounted 200N/m, 525kHz, Asymmetric Tip, No Coating 10 MPP W Unmounted 200N/m, 525kHz, Asymmetric Tip, No Coating 375 MPP Unmounted 200N/m, 525kHz, Asymmetric Tip, Al Reflective Coating 10 MPP W Unmounted 200N/m, 525kHz, Asymmetric Tip, Al Reflective Coating 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) MPP-11 (Rectangular) MPP-12 (Rectangular) MPP-13 (Rectangular) Coating Front Side Coating Notes - Aluminum back side reflective coating is optional on all MPP products. - Identical probes with a rotated version of the tip can be found on page None Back Side Coating 40 ±10nm of Al (where applicable) Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

35 Silicon Probes Tapping MPP Rotated brukerafmprobes.com/tappingmpp-r The Tapping MPP - Rotated cantilevers are designed for high-resolution imaging in non-contact or TappingMode. These probes, identical in tip sharpness and cantilever geometry to the standard Multi MPP probes, have a 180 rotated tip that provides a more symmetric representation of features over 200nm than the standard tip. The rotated versions of Bruker s flagship MPP probes are an excellent choice for high-sensitivity silicon probe imaging. Name Mount Description Pack Size MPP Unmounted 40N/m, 300kHz, Rotated Tip, No Coating 10 MPP W Unmounted 40N/m, 300kHz, Rotated Tip, No Coating 375 MPP Unmounted 40N/m, 300kHz, Rotated Tip, Al Reflective Coating 10 MPP W Unmounted 40N/m, 300kHz, Rotated Tip, Al Reflective Coating 375 MPP Innova 40N/m, 300kHz, Rotated Tip, Al Reflective Coating 10 MPP Unmounted 5N/m, 150kHz, Rotated Tip, No Coating 10 MPP W Unmounted 5N/m, 150kHz, Rotated Tip, No Coating 375 MPP Unmounted 5N/m, 150kHz, Rotated Tip, Al Reflective Coating 10 MPP W Unmounted 5N/m, 150kHz, Rotated Tip, Al Reflective Coating 375 MPP Unmounted 200N/m, 525kHz, Rotated Tip, No Coating 10 MPP W Unmounted 200N/m, 525kHz, Rotated Tip, No Coating 375 MPP Unmounted 200N/m, 525kHz, Rotated Tip, Al Reflective Coating 10 MPP W Unmounted 200N/m, 525kHz, Rotated Tip, Al Reflective Coating 375 RTESP Unmounted Order MPP , 40N/m, 300kHz, Rotated Tip, No Coating 10 RTESPW Unmounted Order MPP W, 40N/m, 300kHz, Rotated Tip, No Coating 375 RTESPA Unmounted Order MPP , 40N/m, 300kHz, Rotated Tip, Al Reflective Coating 10 RTESPAW Unmounted Order MPP W, 40N/m, 300kHz, Rotated Tip, Al Reflective Coating 375 Quantity Discounts Are Available Tip Specifications need TIPSEM Pic Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) MPP-11 (Rectangular) MPP-12 (Rectangular) MPP-13 (Rectangular) RTESP (Rectangular) Coating Front Side Coating Notes - Aluminum back side reflective coating is optional on all MPP products. - RTESP and RTESPW are identical to MPP and MPP W, respectively. - RTESPA and RTESPAW are identical to MPP and MPP W, respectively None Back Side Coating 40 ±10nm of Al (where applicable) Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

36 Silicon Probes Visible Apex brukerafmprobes.com/visibleapex The tetrahedral tip of the visibile apex probes allows for exact positioning of the probe tip on the sample surface. The tip is located on the very end of the cantilever, which enables the tip to be set over a point of interest on the sample, easily and precisely. This probe is especially effective when using an AFM combined with an optical microscope, such as the BioScope Catalyst. Name Mount Description Pack Size OLTESPA Unmounted 2N/m, 70kHz, Al Reflective Coating 10 OLTESPAW Unmounted 2N/m, 70kHz, Al Reflective Coating 375 OTESPA Unmounted 42N/m, 300kHz, Al Reflective Coating 10 OTESPAW Unmounted 42N/m, 300kHz, Al Reflective Coating 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) OLTESPA (Rectangular) OTESPA (Rectangular) Coating Front Side Coating Notes - The OLTESPA and OTESPA product lines both come with 100nm Aluminum back side reflective coating, standard None Back Side Coating 100nm of Al Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

37 Silicon Probes Hardened brukerafmprobes.com/hardened The hardened TappingMode etched silicon probes consist of the same silicon probes used for most TappingMode applications (model TESP). However, the tip side of the cantilever is hardened with a diamond-like carbon (DLC) coating for extended tip life. These probes are designed for greater durability when scanning materials that tend to rapidly degrade the end of the tip, such as silicon nitride, polysilicon, or titanuim nitride. Name Mount Description Pack Size TESPD Unmounted DLC Coated Tips, 42N/m, 320kHz, Al Reflective Coating 10 TESPDW Unmounted DLC Coated Tips, 42N/m, 320kHz, Al Reflective Coating 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangluar) Coating Front Side Coating 10nm of DLC Notes - For an electrically conductive diamond coating on the tip, please refer to the Doped Diamond probes on page Back Side Coating 40 ±10nm of Al Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

38 Silicon Probes Force Calibration brukerafmprobes.com/forcecal Bruker s force calibration cantilevers are used as a reference for measuring the force constant of other AFM probes. Most probes used for imaging have tolerances in the specified values of the force constant of cantilevers. Calibrating a probe against a reference allows for an accurate measurement of the force constant. These probes come with three different cantilevers of different lengths and pre-measured force constants. An application note explaining the calibration procedure is also included with the cantilevers. Name Mount Description Pack Size CLFC-NOBO Unmounted Calibration Probes, Three Cantilevers with Different k 5 CLFC-NOMB Innova Calibration Probes, Three Cantilevers with Different k 5 No Quantity Discounts Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All NA NA NA NA NA NA Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Rectangular) B (Rectangular) C (Rectangular) Coating Front Side Coating Notes - The force constant of each CLFC cantilever is measured using the thermal tune method None Back Side Coating None Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

39 Silicon Probes HarmoniX brukerafmprobes.com/hmx HarmoniX probes are used for nanoscale material property mapping of standard samples on HarmoniX-enabled AFMs. HMX probes are good for stiff samples within the 10MPa to 10GPa hardness range. HMXS probes are significantly softer and ideal for samples within the 0.5MPa to 1GPa hardness range. These probes have the characteristic off-axis design specific to the Bruker HarmoniX mode. The torsional/ flexural spring constant is 17N/m. Name Mount Description Pack Size HMX-10 Unmounted 4N/m, 60kHz, Al Reflective Coating, for HarmoniX Mode 10 HMX-W Unmounted 4N/m, 60kHz, Al Reflective Coating, for HarmoniX Mode 375 HMXS-10 Unmounted 1N/m, 40kHz, Al Reflective Coating, for HarmoniX Mode 10 HMXS-W Unmounted 1N/m, 40kHz, Al Reflective Coating, for HarmoniX Mode 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) HMX (Rectangular) HMXS (Rectangular) Coating Front Side Coating Notes - For use only on Harmonix-enabled, NanoScope V-based AFMs None Back Side Coating 40 ±10nm of Al Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

40 Silicon Nitride Probes FastScan brukerafmprobes.com/fastscan FastScan probes are designed specifically for the Dimension FastScan Atomic Force Microscope (AFM), which delivers extreme imaging speed without loss of resolution, loss of force control, added complexity, or additional operating costs. Based upon the highly successful Dimension Icon AFM architecture, the FastScan AFM is a tip-scanning system that provides measurements on both large and small size samples in air or fluids. Now, with the Dimension FastScan AFM system you can achieve in a single system, immediate atomic force microscopy images with the expected high resolution of a high-performance AFM. Whether you scan at >125Hz when surveying a sample to find the region of interest, or at time rates of 1-second per image frame in air or fluids, the Dimension FastScan redefines the AFM experience. Name Mount Description Pack Size FASTSCAN-A Unmounted FastScan Probes, 17N/m, 1,250kHz, Al Reflective Coating 10 FASTSCAN-B Unmounted FastScan Probes, 4N/m, 400kHz, Au Reflective Coating 10 FASTSCAN-C Unmounted FastScan Probes, 1.5N/m, 250kHz, Au Reflective Coating 10 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) FASTSCAN-A (Triangular) 1, FASTSCAN-B (Triangular) FASTSCAN-C (Triangular) Coating Front Side Coating Notes - Using this probe on an AFM other than the Dimension FastScan is not recommended and will result in sub-optimal performance None Back Side Coating 100 ± 10nm of Al (FastScan-A) 60 ± 10nm of Ti/Au (FastScan-B/ FastScan-C) Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

41 Silicon Nitride Probes MicroLever Series brukerafmprobes.com/microlever Microlevers from Bruker have soft silicon nitride cantilevers with silicon nitride tips, and are ideal for contact imaging modes, force modulation microscopy, and liquid operation. The range in force constants enables users to image soft samples in contact as well as high load vs. distance spectroscopy. Each unmounted probe comes with six different cantilevers of various dimensions, resulting in six unique nominal values for force constant and resonant frequency. All cantilevers on the microlever products have <2 cantilever bend. Name Mount Description Pack Size MLCT Unmounted 6 Cantilevers, N/m; Au Reflective Coating 10 MLCT-EXMT-A1 Caliber 1 Cantilever, 0.07N/m, Au Reflective Coating 10 MLCT-EXMT-BF1 Caliber 5 Cantilevers, N/m, Au Reflective Coating 10 MLCT-MT-A Innova 1 Cantilever, 0.07N/m, Au Reflective Coating 10 MLCT-MT-BF Innova 5 Cantilevers, N/m, Au Reflective Coating 10 MSCT Unmounted Sharpened, 6 Cantilevers, N/m, Au Reflective Coating 10 MSCT-EXMT-A1 Caliber Sharpened, 1 Cantilever, 0.07N/m, Au Reflective Coating 10 MSCT-EXMT-BF1 Caliber Sharpened, 5 Cantilevers, N/m, Au Reflective Coating 10 MSCT-MT-A Innova Sharpened, 1 Cantilever, 0.07N/m, Au Reflective Coating 10 MSCT-MT-BF Innova Sharpened, 5 Cantilevers, N/m, Au Reflective Coating 10 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) MLCT MSCT Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Triangular) B (Rectangular) C (Triangular) D (Triangular) E (Triangular) F (Triangular) Coating Front Side Coating Notes - If mounted, probes must be mounted for A side (one usable cantilever) or BF side (five usable cantilevers). - See page 47 for the microlever cantilever layout. - See page 82 for uncoated and tipless versions of microlevers. - Supersharp microlevers, part MSNL, can be found on page None Back Side Coating 45 ± 10nm of Ti/Au Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

42 Silicon Nitride Probes MicroLever Special brukerafmprobes.com/microlever-sp Microlevers are also available in tipless and uncoated versions. These optional features enable unique coatings, tips, or functionalizations to be applied to the probe. The cantilever geometries are identical to that of the standard Microlevers, and each unmounted probe comes with six different cantilevers of various dimensions, resulting in six unique nominal values for force constant and resonant frequency. All cantilevers on the microlever products have <2 cantilever bend. Name Mount Description Pack Size MLCT-O10 Unmounted Tipless, 6 Cantilevers, N/m, Au Reflective Coating 10 MLCT-OW Unmounted Tipless, 6 Cantilevers, N/m, Au Reflective Coating 375 MLCT-UC Unmounted 6 Cantilevers, N/m, No Coating 10 MLCT-UCMT-A Innova 1 Cantilever, 0.07N/m, No Coating, Pre-Mounted For Innova AFM 10 MLCT-UCMT-BF Innova 5 Cantilevers, N/m, No Coating, Pre-Mounted For Innova AFM 10 MSCT-UC Unmounted Sharpened, 6 Cantilevers, N/m, No Coating 10 MSCT-UCMT-A Innova Sharpened, 1 Cantilever, 0.07N/m, No Coating 10 MSCT-UCMT-BF Innova Sharpened, 5 Cantilevers, N/m, No Coating 10 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) MLCT-UC MSCT-UC MLCT-O NA NA NA NA NA NA Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Triangular) B (Rectangular) C (Triangular) D (Triangular) E (Triangular) F (Triangular) Coating Front Side Coating Notes - If mounted, probes must be mounted for A side (one usable cantilever) or BF side (five usable cantilevers). - See page 47 for the microlever cantilever layout. - See page 80 for standard versions of microlevers. - Supersharp microlevers, part MSNL, can be found on page None Back Side Coating 45 ±10nm of Ti/Au (where applicable) Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

43 Silicon Nitride Probes NP Series brukerafmprobes.com/np Bruker s premium nitride probes are ideal for contact mode in air and fluid, TappingMode in fluid, and force measurements. Each unmounted probe comes with four different cantilevers of various dimensions, resulting in four unique nominal values for force constant and resonant frequency. Name Mount Description Pack Size DNP Unmounted 4 Cantilevers, N/m, Au Reflective Coating 375 DNP-10 Unmounted 4 Cantilevers, N/m, Au Reflective Coating 10 DNP-S Unmounted Sharpened, 4 Cantilevers, N/m, Au Reflective Coating 375 DNP-S10 Unmounted Sharpened, 4 Cantilevers, N/m, Au Reflective Coating 10 NP Unmounted 4 Cantilevers, N/m, Au Reflective Coating 375 NP-10 Unmounted 4 Cantilevers, N/m, Au Reflective Coating 10 NP-S Unmounted Sharpened, 4 Cantilevers, N/m, Au Reflective Coating 375 NP-S10 Unmounted Sharpened, 4 Cantilevers, N/m, Au Reflective Coating 10 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) DNP/ NP DNP-S/ NP-S Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Triangular) B (Triangular) C (Triangular) D (Triangular) Coating Front Side Coating Notes - See page 47 for nitride probe cantilever layout. - See page 86 for uncoated and tipless versions of nitride probes. - Supersharp nitride probes, part SNL, can be found on page None Back Side Coating 45 ±10nm of Ti/Au Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

44 Silicon Nitride Probes NP Special brukerafmprobes.com/np-sp Bruker s premium nitride probes are also available in tipless and uncoated versions. These optional features enable unique coatings, tips, and functionalizations to be applied to the probe. The cantilever geometries are identical to that of the standard nitride probes, and each unmounted probe comes with four different cantilevers of various dimensions, resulting in four unique nominal values for force constant and resonant frequency. Name Mount Description Pack Size NP-10UC Unmounted 4 Cantilevers, N/m, No Coating 10 NP-W-UC Unmounted 4 Cantilevers, N/m; No Coating 375 NPG Unmounted Au Coated Tips, 4 Cantilevers, N/m, Au Reflective Coating 375 NPG-10 Unmounted Au Coated Tips, 4 Cantilevers, N/m, Au Reflective Coating 10 NP-O10 Unmounted Tipless, 4 Cantilevers, N/m, Au Reflective Coating 10 NP-OW Unmounted Tipless, 4 Cantilevers, N/m, Au Reflective Coating 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) NP NP-O NA NA NA NA NA NA Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Triangular) B (Triangular) C (Triangular) D (Triangular) Coating Front Side Coating Notes - Gold coating on Front Side optional on NPG products. - See page 47 for the nitride probe cantilever layout. - See page 84 for standard versions of NP probes. - Supersharp nitride probes, part SNL, can be found on page Back Side Coating 40 ±10nm of Ti/Au (on NPG) 45 ±10nm of Ti/Au (where applicable) Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

45 Silicon Nitride Probes ScanAsyst brukerafmprobes.com/scanasyst ScanAsyst utilizes a proprietary method for curve collection and sophisticated algorithms to continuously monitor image quality, and to automatically make appropriate parameter adjustments. This enables: - Automatic image optimization for faster, more consistent results, regardless of user skill level, - Direct force control at ultra-low forces to protect delicate samples and tips from damage, - Elimination of cantilever tuning, setpoint adjustment, and gain optimization to make even fluid imaging simple. ScanAsyst-Air-HR probes are specifically designed for use with the ScanAsyst-HR fast scanning accessory on the MultiMode 8 AFM. Enjoy up to 20x faster survey scan rates and up to 6x faster scans with no loss of resolution. Name Mount Description Pack Size SCANASYST-AIR Unmounted Sharpened, 1 Cantilever, 0.4N/m, Al Reflective Coating 10 SCANASYST-AIR-HR Unmounted Fast Scanning, Sharpened, 1 Cantilever, 0.4N/m, Al Ref. Coating 10 SCANASYST-FLUID Unmounted 1 Cantilever, 0.7N/m, Au Reflective Coating 10 SCANASYST-FLUID+ Unmounted Sharpened, 1 Cantilever, 0.7N/m, Au Reflective Coating 10 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) Air/ Fluid Fluid Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) ScanAsyst-Air (Triangular) ScanAsyst-Air-HR (Special) ScanAsyst-Fluid (Triangular) ScanAsyst-Fluid+ (Triangular) Coating Front Side Coating Notes - For use only on ScanAsyst-enabled Dimension Icon, MultiMode 8, or BioScope Catalyst AFMs. - ScanAsyst-Air-HR for use only on ScanAsyst-HR fast scanning accessory for MultiMode 8 AFM. If you have an older MultiMode model, please contact Bruker to find out how to upgrade it to a MultiMode 8 AFM with high speed ScanAsyst-HR None Back Side Coating 40 ±10nm of Ti/Au (Fluid/Fluid+) 100 ±10nm Al (Air) Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

46 Silicon Nitride Probes ORC8 Series brukerafmprobes.com/orc8 These SiN probes on pyrex glass substrate have a pyramidal tip and four different rectangular cantilevers with unique resonant frequencies and force constants. These probes are recommended for contact mode lateral force microscopy measurements because the twist motion of the rectangular cantilever is simpler than that of a triangular cantilever. Name Mount Description Pack Size ORC8-10 Unmounted Sharpened, 4 Rectangular Cantilevers N/m, Au Reflective Coating 10 ORC8-W Unmounted Sharpened, 4 Rectangular Cantilevers N/m, Au Reflective Coating 490 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Rectangular) B (Rectangular) C (Rectangular) D (Rectangular) Coating Front Side Coating None Back Side Coating 30nm Au Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

47 Silicon Nitride Probes OTR4 Series brukerafmprobes.com/otr4 These SiN probes on pyrex glass substrate have a pyramidal tip, and two different triangular cantilevers with unique resonant frequencies and force constants. The 100µm long cantilever of this product is recommended for non-contact mode imaging in fluid and on soft samples. Name Mount Description Pack Size OTR4-10 Unmounted Sharpened, 2 Triangular Cantilevers 0.02 & 0.08N/m, Au Reflective Coating 10 OTR4-W Unmounted Sharpened, 2 Triangular Cantilevers 0.02 & 0.08N/m, Au Reflective Coating 245 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Triangular) B (Triangular) Coating Front Side Coating None Back Side Coating 30nm Au Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

48 Silicon Nitride Probes OTR8 Series brukerafmprobes.com/otr8 These SiN probes on pyrex glass substrate have a pyramidal tip, and two different triangular cantilevers with unique resonant frequencies and force constants. This probe is recommended as a general choice for contact mode operation. Name Mount Description Pack Size OTR8-10 Unmounted Sharpened, 2 Triangular Cantilevers 0.15 & 0.57N/m, Au Reflective Coating 10 OTR8-W Unmounted Sharpened, 2 Triangular Cantilevers 0.15 & 0.57N/m, Au Reflective Coating 490 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Triangular) B (Triangular) Coating Front Side Coating None Back Side Coating 30nm Au Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

49 Silicon Nitride Probes Biolever brukerafmprobes.com/biolever The B cantilever on the Biolever is one of the softest cantilevers commercially available today. These probes have a visible, V-shaped tip that is stable and unique to only this product. Geometrically, the tip is a hollow pyramid sliced in half vertically with a sharpened apex. Very small and very soft cantilevers like these are excellent for force curve measurements. This silicon nitride probe has two different rectangular cantilevers with unique resonant frequencies and force constants. Name Mount Description Pack Size OBL-10 Unmounted Au Coated tips; 2 Cantilevers, N/m, Au Reflective Coating 10 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Rectangular) B (Rectangular) Coating Front Side Coating 20nm Au Back Side Coating 30nm Au Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

50 Magnetic Probes MFM brukerafmprobes.com/mfm Bruker s magnetic probes offer various MFM imaging solutions with standard, highmoment, low-moment, and low-coercivity options. The conductive coatings on these probes also make them an excellent choice for electrical and capacitance microscopy. See brukerafmprobes.com for the additional magnetic moment and coercivity specification information of these probes. Name Mount Description Pack Size MESP Unmounted Standard MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating 10 MESP-MT Caliber Standard MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating 10 MESP-CPMT Innova Standard MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating 10 MESPW Unmounted Standard MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating 375 MESP-HM Unmounted High-Moment MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating 10 MESP-HMW Unmounted High-Moment MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating 375 MESP-LC Unmounted Low-Coercivity Fe Coated Tips, 2.8N/m, 75kHz, Fe Reflective Coating 10 MESP-LCW Unmounted Low-Coercivity Fe Coated Tips, 2.8N/m, 75kHz, Fe Reflective Coating 375 MESP-LM Unmounted Low-Moment MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating 10 MESP-LMW Unmounted Low-Moment MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating 375 MESPSP Unmounted MFM Sample Pack Containing 3x MESP-LC, 3x MESP-HM, and 4x MESP-LM 10 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) MESP/ -LC/ -LM MESP-HM Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangular) Coating Front Side Coating MESP/ -LC/ -LM: nm of Co/Cr MESP-LC: 40-70nm of Fe Notes - The specific compositions and thicknesses of the MFM coatings are not provided because they are Bruker proprietary. The materials and thicknesses given are general guidelines. - For a sample pack of -HM, -LM, and -LC, see part MESPSP Back Side Coating MESP/ -LC/ -LM: nm of Co/Cr MESP-LC: 40-70nm of Fe Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

51 Magnetic Probes MFM Premium brukerafmprobes.com/mfmpremium High-performance cobalt alloy magnetic coated probes: - The MESP-HR has a conical tip with a coercivity of ~950Oe and a moment of ~5.6e The MESP-RC has a coercivity of ~400Oe and a moment of 1e-13EMU, and is also recommended for piezo response applications. Name Mount Description Pack Size MESP-HR10 Unmounted High-Resolution, High-Moment MFM Coated Tips, 2.8N/m, 75kHz, Al Reflective Coating 10 MESP-RC Unmounted High-Performance MFM Coated Tips, 5N/m, 150kHz, Rotated Tip, Co/Cr Reflective Coating 10 MESP-RCW Unmounted High-Performance MFM Coated Tips, 5N/m, 150kHz, Rotated Tip, Co/Cr Reflective Coating 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) MESP-HR MESP-RC Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) MESP-HR (Rectangular) MESP-RC (Rectangular) Coating Front Side Coating MESP-HR: 100nm of Co/Cr MESP-RC: nm of Co/Cr Notes - The specific compositions and thicknesses of the MFM coatings are not provided because they are Bruker proprietary. The materials and thicknesses given are general guidelines Back Side Coating MESP-HR: 40 ±10nm of Al MESP-RC: nm of Co/Cr Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

52 Magnetic Probes MFM MicroLever brukerafmprobes.com/microlever-mfm Bruker offers sharpened SiN cantilevers coated with cobalt for Magnetic Force Microscopy (MFM). MFM sharpened microlevers produce superior micro-magnetic domain resolution when operated with Bruker s proprietary non-contact imaging technique. Each unmounted probe comes with two different cantilevers of various dimensions, resulting in two unique nominal values for force constant and resonant frequency. Name Mount Description Pack Size MSNC-MF Unmounted Sharpened, 2 Cantilevers, 0.1 & 0.5N/m, MFM Coating 10 MSNC-MT-A Innova Sharpened, 1 MFM Cantilevers, 0.1N/m, MFM Coating 10 MSNC-MT-B Innova Sharpened, 1 MFM Cantilevers, 0.5N/m, MFM Coating 10 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Triangular) B (Triangular) Coating Front Side Coating Notes - If mounted, probes must be mounted for A side (one usable cantilever) or B side (one usable cantilever). - For standard microlevers without MFM coating, see page Back Side Coating nm of Co/Cr nm of Co/Cr Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

53 Supersharp Probes Supersharp Silicon brukerafmprobes.com/sharpsi Supersharp silicon probes should be used when the highest image resolution possible is desired. These probes are developed using advanced tip manufacturing processes to yield an extremely sharp tip radius that cannot be found on other silicon probe products. Name Mount Description Pack Size DLCS-10 Unmounted DLC Spike Tips, 5N/m, 160kHz, Al Reflective Coating 10 IMPSC-5 Unmounted High Aspect Ratio Conical Tips, 35N/m, 350kHz, Al Reflective Coating 5 TESP-SS Unmounted Supersharp Tips, 42N/m, 320kHz, No Coating 10 TESP-SSW Unmounted Supersharp Tips, 42N/m, 320kHz, No Coating 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) DLCS IMPSC TESP-SS Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) DLCS (Rectangular) IMPSC (Rectangular) TESP-SS (Rectangular) Coating Front Side Coating None Back Side Coating 40 ±10nm of Al (where applicable) Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

54 Supersharp Probes Supersharp MicroLever brukerafmprobes.com/msnl MSNL probes marry the sharpness of a silicon tip with the low spring constants and high sensitivity of a silicon nitride cantilever, for an unprecedented level of high resolution and force control on just about any sample, in any medium. The MSNL cantilever layout is identical to that of the other microlever products, with an A cantilever on one side of the probe, and B, C, D, E, and F cantilevers on the other side of the probe. All cantilevers on the MSNL products have <2 cantilever bend. Name Mount Description Pack Size MSNL-10 Unmounted Supersharp, 6 Cantilevers, N/m, Au Reflective Coating 10 MSNL-W Unmounted Supersharp, 6 Cantilevers, N/m, Au Reflective Coating 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Triangular) B (Rectangular) C (Triangular) D (Triangular) E (Triangular) F (Triangular) Coating Front Side Coating Notes - See also SNL probes for a different set of lever options. - See page 47 for the microlever cantilever layout. - Standard microlevers can be found on page None Back Side Coating 45 ±10nm of Ti/Au Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

55 Supersharp Probes Supersharp NP brukerafmprobes.com/snl SNL probes marry the sharpness of a silicon tip with the low spring constants and high sensitivity of a silicon nitride cantilever, for an unprecedented level of high resolution and force control on just about any sample, in any medium. The SNL cantilever layout is identical to that of the other NP products, with A and B cantilevers on one side of the probe, and C and D cantilevers on the other side of the probe. All cantilevers on the SNL products have <2 cantilever bend. Name Mount Description Pack Size SNL-10 Unmounted Supersharp, 4 Cantilevers, N/m, Au Reflective Coating 10 SNL-W Unmounted Supersharp, 4 Cantilevers, N/m, Au Reflective Coating 375 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) A (Triangular) B (Triangular) C (Triangular) D (Triangular) Coating Front Side Coating Notes - See also MSNL probes for a different set of lever options. - See page 47 for the nitride probe cantilever layout. - Standard nitride probes can be found on page None Back Side Coating 45 ±10nm of Ti/Au Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

56 Electrical Probes Doped Diamond brukerafmprobes.com/doped-diamond These probes have an electrically conductive doped diamond coating on the tip side. This coating is also extremely wear resitant due to the hardness of the diamond. Typical applications for this probe include Scanning Spreading Resistance Microscopy (SSRM), Scanning Capacitance Microscopy (SCM) and Tunneling/Conducting AFM. Name Mount Description Pack Size DDESP-10 Unmounted Doped Diamond Coated Tips, 42N/m, 320kHz, Al Reflective Coating 10 DDESP-FM-10 Unmounted Doped Diamond Coated Tips, 2.8N/m, 75kHz, Al Reflective Coating 10 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) DDESP (Rectangular) DDESP-FM (Rectangular) Coating Front Side Coating 100nm of Doped Diamond Notes - The TESPD product line (on page 72) is a non-conductive, less expensive alternative for a diamond-coated hardened probe Back Side Coating 40 ±10nm of Al Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

57 Electrical Probes Platinum brukerafmprobes.com/platinum Bruker s platinum-coated probes have an electrically conductive tip and are ideal for Scanning Capacitance Mode (SCM) and electrical characterization applications. The platinum coating on the front side of the cantilever provides a metallic electrical path from the cantilever die to the apex of the tip. The platinum coating on the back side of the SCM-PIT/PIC cantilevers compensates for the stress created by the front side coating and also enhances laser reflectivity by a factor of up to 2.5 times. PFTUNA probes combine the low spring constant and high sensitivity of a Silicon Nitride cantilever with a sharp, electrically conductive tip. When used with Bruker s exclusive PeakForce TUNA mode, they enable an unprecedented level of high resolution electrical characterization on fragile samples. Name Mount Description Pack Size OSCM-PT Unmounted Pt Coated Tips, 2N/m, 70kHz, Pt/ Ir Reflective Coating 10 OSCM-PTW Unmounted Pt Coated Tips, 2N/m, 70kHz, Pt/ Ir Reflective Coating 375 PFTUNA Unmounted Pt/ Ir Coated Tips, 0.4N/m, 70kHz, Pt/ Ir Reflective Coating 10 SCM-PIC Unmounted Pt/ Ir Coated Tips, 0.2N/m, 13kHz, Pt/ Ir Reflective Coating 10 SCM-PICW Unmounted Pt/ Ir Coated Tips, 0.2N/m, 13kHz, Pt/ Ir Reflective Coating 375 SCM-PIT Unmounted Pt/ Ir Coated Tips, 2.8N/m, 75kHz, Pt/ Ir Reflective Coating 10 SCM-PITW Unmounted Pt/ Ir Coated Tips, 2.8N/m, 75kHz, Pt/ Ir Reflective Coating 375 SCM-PTMT-EX Caliber Pt/ Ir Coated Tips, 2.8N/m, 75kHz, Pt/ Ir Reflective Coating 10 Quantity Discounts Are Available Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) OSCM PFTUNA SCM Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) OSCM (Rectangular) PFTUNA (Triangular) SCM-PIC (Rectangular) SCM-PIT (Rectangular) Coating Front Side Coating OSCM: 20nm of Pt SCM/ PFTUNA: 20nm of Pt/ Ir Notes - The OSCM-PT has a visible apex tip, as described in the visible apex section on page Back Side Coating OSCM: 100nm of Al SCM/ PFTUNA: 20nm of Pt/ Ir Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

58 Critical Dimension Probes 3-D Metrology brukerafmprobes.com/3d 3-D Metrology probes are designed to be used in Critical Dimension (CD) mode on X3D or InSight 3DAFM systems. These probes are designed with a flare at the apex of the probe to measure critical dimension features such as linewidth, undercut, Line Edge Roughness (LER), Line Width Variation (LWV), and Sidewall Roughness (SR). These probes are silicon based and may be coated or nitride capped for wear resistance. EBD-CDR probes have the key strengths of electron beam deposition (EBD) probe manufacturing: precise tip orientation, precise control of tip dimensions (length, width, overhang), and large volume production. These tips do not have a wear resistant coating, but are made from bulk wear resistant diamond like carbon. Name Mount Description Pack Size CDF100 Unmounted Triangular Re-Entrant Tips, 3-D Imaging, Width 100nm, Length 300nm 5 CDF100C Unmounted Triangular Re-Entrant Tips, 3-D Imaging, Width 100nm, Length 300nm, Carbon Coated 5 CDR32 Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 32nm, Length 220nm 5 CDR-50C Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 50nm, Length 300nm, Carbon Coated 5 CDR-50S Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 50nm, Length 225nm 5 CDR-70 Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 70nm, Length 500nm 5 CDR-70S Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 70nm, Length 400nm 5 CDR-120 Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 120nm, Length 600nm 5 CDR120C Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 120nm, Length 600nm, Carbon Coated 5 CDR130S Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 130nm, Length 300nm 5 CDR-300 Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 300nm, Length 1250nm 5 CDR850 Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 850nm, Length 6000nm 5 EBD-CDR15 Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 15nm, Length 150nm 5 EBD-CDR20 Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 20nm, Length 150nm 5 EBD-CDR30 Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 30nm, Length 150nm 5 EBD-CDR50 Unmounted Round Re-Entrant Tips, 3-D Imaging, Width 50nm, Length 200nm 5 No Quantity Discounts Tip Specifications Tip Tip Tip Tip Tip Overhang Effective Tip Tilt Shape Set Back (µm) Height (µm) Width (nm) (nm) Length (nm) Compensation ( ) CDF100 Triangular CDF100C Triangular CDR32 Round CDR-50C Round CDR-50S Round CDR-70 Round CDR-70S Round CDR-120 Round CDR-120C Round CDR130S Round CDR-300 Round CDR850 Round EBD-CDR15 Round EBD-CDR20 Round EBD-CDR30 Round EBD-CDR50 Round Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangular) Coating Front Side Coating Wear resistant carbon on CDR-50C, CDF100C and CDR120C Back Side Coating 40 ±10nm of Al (on all) Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

59 Critical Dimension Probes Depth Metrology brukerafmprobes.com/depth These depth metrology probes have post-shaped tips (i.e., cylindrical with a flat apex) and are designed for depth applications where a constant probe cross section is required. Post probes are named according to the diameter of the post. For example, a CDP55A probe has a top that is nominally 55nm in diameter. Name Mount Description Pack Size CDP15/150-3D Unmounted Round Post Tips, Depth Metrology, Width 15nm, Length 150nm 5 CDP15/150C-3D Unmounted Round Post Tips, Depth Metrology, Width 15nm, Length 150nm, Carbon Coated 5 CDP200A Unmounted Round Post Tips, Depth Metrology, Width 200nm, Length 600nm 5 CDP55A Unmounted Round Post Tips, Depth Metrology, Width 55nm, Length 600nm 5 CDP55L Unmounted Round Post Tips, Depth Metrology, Width 55nm, Length 900nm 5 SNP10 Unmounted Silicon Nitride Post Tips, Depth Metrology, Width 10nm, Length 150nm 5 SNP20 Unmounted Silicon Nitride Post Tips, Depth Metrology, Width 20nm, Length 200nm 5 No Quantity Discounts Tip Specifications Tip Tip Tip Tip Tip Overhang Effective Tip Tilt Shape Set Back (µm) Height (µm) Width (nm) (nm) Length (nm) Compensation ( ) CDP15/150-3D Round CDP15/150C-3D Round CDP200A Round CDP55A Round CDP55L Round SNP10 Round SNP20 Round Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangular) Coating Front Side Coating Wear resistant carbon on CDP15/ 150C-3D Back Side Coating 40 ±10nm of Al Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

60 Spike Automated Probes HAR brukerafmprobes.com/har High Aspect Ratio (HAR) probes are based on Bruker technology and made from Bruker TESP probes using focused ion beam milling techniques. The HAR process modifies the last 1.5um of the tip to an apsect ratio of at least 5:1. These probes are ideal for TappingMode imaging on samples with tall/ deep geometries, such as semiconductor trench imaging. Name Mount Description Pack Size HAR Unmounted 1µm, 42N/m, 320kHz, No Coating 10 TESP-HAR Unmounted 1µm, 42N/m, 320kHz, No Coating 10 TESPA-HAR Unmounted 1µm, 42N/m, 320kHz, Al Reflective Coating 10 Quantity Discounts Are Available Tip Specifications Tip Tip Tip Tip Tip Tilt Spike Spike Radius (nm) Set Back (µm) Height (µm) Compensation ( ) Height (nm) W (nm) HAR TESP Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangular) Coating Front Side Coating None Back Side Coating 40 ±10nm of Al (where applicable) Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

61 Spike Automated Probes FIB brukerafmprobes.com/fib Focused Ion beam (FIB) probes consist of an integrated single crystal silicon cantilever and tip that have been machined (or shaped) to obtain the desired aspect ratio. They have near vertical sidewalls and aspect ratios of more than 10:1. Common applications include semiconductor devices, 3-D micro-optics, and development of precision metrology methods. FIB tips are designed only for TappingMode and for profiling narrow gaps. FIB tips should not be used in contact mode. Name Mount Description Pack Size FIB1-100 Unmounted 1µm, 42N/m, 320kHz, No Coating 5 FIB1-100A Unmounted 1µm, 42N/m, 320kHz, Al Reflective Coating 5 FIB2-100S Unmounted 2µm, 42N/m, 320kHz, No Coating 5 FIB2-100A Unmounted 2µm, 42N/m, 320kHz, Al Reflective Coating 5 FIB3D2-100 Unmounted 2µm, 42N/m, 320kHz, 3 Tilt Compensation, No Coating 5 FIB3D2-100A Unmounted 2µm, 42N/m, 320kHz, 3 Tilt Compensation, Al Ref. Coating 5 FIB3-200A Unmounted 3µm, 42N/m, 320kHz, Al Reflective Coating 5 FIB4-200 Unmounted 4µm, 42N/m, 320kHz, No Coating 5 FIB4-200A Unmounted 4µm, 42N/m, 320kHz, Al Reflective Coating 5 FIB6-400 Unmounted 6µm, 42N/m, 320kHz, No Coating 5 FIB6-400A Unmounted 6µm, 42N/m, 320kHz, Al Reflective Coating 5 FIB8-600 Unmounted 8µm, 42N/m, 320kHz, No Coating 5 FIB8-600A Unmounted 8µm, 42N/m, 320kHz, Al Reflective Coating 5 No Quantity Discounts Tip Specifications Tip Tip Tip Tip Tip Tilt Spike Spike Radius (nm) Set Back (µm) Height (µm) Compensation ( ) Height (nm) W (nm) FIB FIB FIB3D FIB FIB FIB FIB Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangular) Coating Front Side Coating None Back Side Coating 40 ±10nm of Al (where applicable) Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

62 Spike Automated Probes CNT brukerafmprobes.com/cnt Carbon Nanotube (CNT) probes are designed for very long lifetime, high-volume depth metrology. These probes are based on a standard TESP probe with a 500nm or 350nm long CNT attached to the apex of the probe. CNT probes are ideal for HVM as long as their failure mode is digital, and thus require little to no probe characterization for measurement fidelity. The electron beam deposited (EBD) CNT probes are manufactured to the dimensions of a CNT using proven EBD technology, allowing the probe to act like a CNT while maintaining EBD s key strengths: precise tip orientation, precise control of tip dimensions (length and diameter), and large volume production. Name Mount Description Pack Size CNT350 Unmounted Carbon Nanotube Probe, 350nm Length, 42N/m, 320kHz, Al Ref. Coating 5 CNT500 Unmounted Carbon Nanotube Probe, 500nm Length, 42N/m, 320kHz, Al Ref. Coating 5 MCNT-100 Unmounted EBD Carbon Nanotube Probe, 100nm Length, 42N/m, 320kHz, Al Ref. Coating 5 MCNT-500 Unmounted EBD Carbon Nanotube Probe, 500nm Length, 42N/m, 320kHz, Al Ref. Coating 5 No Quantity Discounts Tip Specifications Tip Tip Tip Tip Tip Tilt Spike Spike Radius (nm) Set Back (µm) Height (µm) Compensation ( ) Height (nm) W (nm) CNT CNT MCNT MCNT Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangular) Coating Front Side Coating None Back Side Coating 30nm of Al Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

63 Nanoindentation Probes Diamond brukerafmprobes.com/nanoindent These probes provide the ability to perform nanoindenting, scratching, and hardness tests to investigate mechanical properties of materials, such as diamond-like carbon (DLC) thin films. They consist of diamond tips mounted on stainless steel cantilevers. The cantilevers have spring constants higher than the typical cantilevers used for imaging, which allows the application of forces large enough to indent or scratch a sample surface. Imaging is performed non-destructively by the patented TappingMode technique. Name Mount Description Pack Size CDNISP-HS Catalyst Diamond Tip, N/m, 35-65kHz 1 DNISP Unmounted Diamond Tip, N/m, 35-65kHz 1 DNISP-HS Unmounted Diamond Tip, N/m, 35-65kHz 1 DNISP-MM MultiMode Diamond Tip, N/m, 35-65kHz 1 MDNISP-HS Multimode Diamond Tip, N/m, 35-65kHz 1 NICT-MTAP Innova Diamond Tip, N/m, 35-65kHz 1 PDNISP Dimension Diamond Tip, N/m, 35-65kHz 1 PDNISP-HS Dimension Diamond Tip, N/m, 35-65kHz 1 No Quantity Discounts Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Rectangular) Coating Front Side Coating Notes - Each cantilever s spring constant is individually qualified and is supplied with a certification sheet None Back Side Coating None Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

64 Active Probe Self Sensing/ Actuating brukerafmprobes.com/active The Active Probe increases the speed of AFM imaging by over an order of magnitude. By integrating a high-speed micro-actuator onto the probe, the bandwidth limitation of a conventional AFM s Z-piezo is overcome. The probe is a MEMS device, micro-machined from bulk silicon with a piezoelectric film patterned along a portion of the cantilever. At the free end of the cantilever is a pyramidal tip with nanometer-scale sharpness, optimally shaped for high-resolution imaging. The cantilever is capable of bending by way of biomorph actuation, resulting in a controlled vertical displacement of the tip. Name Mount Description Pack Size DMASP Dimension Micro-Actuated for Fast Scanning & Ideal Resonances 10 MPA Unmounted Micro-Actuated for Fast Scanning & Ideal Resonances 10 No Quantity Discounts Tip Specifications Tip Tip Front Back Tip Tip Side Radius (nm) Angle ( ) Angle ( ) Set Back (µm) Height (µm) Angle ( ) All Cantilever Specifications Cantilever Type Frequency (khz) k (N/m) Width (µm) Thickness (µm) Length (µm) All (Special) Coating Front Side Coating Notes - DMASP probes are designed for plug-and-play high-speed imaging and active control on NanoScope IV or newer controllers None Back Side Coating None Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

65 STM Probes Platinum Iridium brukerafmprobes.com/stm-pt These probes for STM imaging are made of platinum-iridium wire and are mechanically formed at the end of the wire to create a sharp tip. While the electrochemcially etched tungsten probes are good for large-scan STM imaging, the platinum tips are recommended for atomic-resolution imaging. All STM tips are meant to be used with a conductive sample. Name Mount Description Pack Size CLST-PTBO Unmounted Precision Cut Wire, 0.5mm Diameter, 20mm Length 10 DPT10 Unmounted Precision Cut Wire, 0.25mm Diameter, 6mm Length 10 PT10 Unmounted Precision Cut Wire, 0.25mm Diameter, 8mm Length 10 PT-ECM10 Unmounted Precision Cut Wire, 0.25mm Diameter, 14mm Length 10 Tip Specifications: Mechanically formed tip, radius <50nm Notes - Tip Radius <50nm on all STM probes. - Tungsten STM tips can be found on page DPT10 recommended for Dimension and BioScope AFMs. - PT-ECM10 recommended for Electrochemical STM. - CLST-PTBO recommended for Innova AFMs. STM Probes Tungsten brukerafmprobes.com/stm-w These STM imaging probes are made of tungsten wire and are electrochemically etched (except for part STM, which is mechanically formed) to produce a tip with more uniform geometry than platinum-iridium tips. These probes are recommended for scanning areas larger than atomic scale. They come vacuum packaged to prevent oxidation once opened, these tips should be used in approximately one week since oxidation may degrade performance. Name Mount Description Pack Size STM Unmounted Precision Cut Wire, 0.25mm Diameter, 6mm Length 10 DTT10 Unmounted Electrochemically Etched Wire, 0.25mm Diameter, 6mm Length 10 TT10 Unmounted Electrochemically Etched Wire, 0.25mm Diameter, 8mm Length 10 TT-ECM10 Unmounted Electrochemically Etched Wire, 0.25mm Diameter, 14mm Length 10 Tip Specifications: Electrochemically etched tip, radius <50nm Notes - Tip Radius <50nm on all STM probes. - Platinum-iridium STM tips can be found on page DTT10 recommended for Dimension and BioScope AFMs. - TT-ECM10 recommended for Electrochemical STM. Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

66 Thermal Probes VITA SThM brukerafmprobes.com/sthm The VITA Scanning Thermal Microscopy (SThM) probes are specially designed contact mode probes that incorporate a thin metal film near the apex of the probe. The probes are mounted on a precision support: - Measurement Mode: Temperature contrast - Lateral Resolution: <100nm (dependent on probe) - Temperature Resolution: <0.1 C (dependent on probe) - Maximum Temperature: 160 C (dependent on probe) Name Mount Description Pack Size VITA-DM-GLA-1 Dimension Scanning Thermal Microscopy probes, 150µm Length 5 VITA-MM-GLA-1 MultiMode Scanning Thermal Microscopy probes, 150µm Length 5 VITA-HE-GLA-1 MultiMode/ Innova / Caliber Scanning Thermal Microscopy probes, 150µm Length 5 Notes - Specifically designed for use with VITA module. Uses other than with VITA module void probe warranty. - Requires specialized probe holder (part of the VITA module). VITA-HE-GLA-1 probes for use only with VITA-CH-MM-HE (MultiMode) and VITA-CH-IN (Innova/ Caliber) probe holders. Thermal Probes VITA NanoTA VITA NanoTA probes are micro-machined silicon probes, similar in geometry to standard Silicon AFM probes, but incorporate a resistive heater at the end of the cantilever. These probes have the capability to image the sample surface significantly better than most thermal probes. Probes can be heated repeatedly and reliably to higher temperatures (350 C) than other thermal probes made of thin metal films. Name Mount Description Pack Size VITA-DM-NANOTA-200 Dimension Nano Thermal Analysis probes, 200µm Length 5 VITA-DM-NANOTA-300 Dimension Nano Thermal Analysis probes, 300µm Length 5 VITA-MM-NANOTA-200 MultiMode Nano Thermal Analysis probes, 200µm Length 5 VITA-MM-NANOTA-300 MultiMode Nano Thermal Analysis probes, 300µm Length 5 VITA-HE-NANOTA-200 MultiMode/ Innova / Caliber Nano Thermal Analysis probes, 200µm Length 5 VITA-HE-NANOTA-300 MultiMode/ Innova/ Caliber Nano Thermal Analysis probes, 300µm Length 5 Notes - Specifically designed for use with VITA module. Uses other than with VITA module void probe warranty. - Requires specialized probe holder (part of the VITA module). VITA-HE-NANOTA probes for use only with VITA-CH-MM-HE (MultiMode) and VITA-CH-IN (Innova/ Caliber) probe holders brukerafmprobes.com/nanota Silicon Silicon Nitride Magnetic Supersharp Electrical CD Spike Nanoindent Active Probe STM Thermal

67 Helpful Equations L w width of cantilever H tip height p cantilever mass per unit-length ρ air = 1.18kg / m 3 η air = 1.86x10-5 kg / m s t thickness of cantilever f 0 resonance frequency of cantilever (in Hz) ρ density of cantilever (silicon) = 2.33gm/cm 3 = 2330kg/m 3 H w t L length of cantilever P mass of tip E elastic modulus of cantilever = 1.39x10 11 N/m 2 (in the <110> direction) Spring Constant : Resonance Frequency (without tip mass): k = E w t 3 4 L 3 f 0 = E t 1 E t ρ L 2 2π ρ L 2 Resonance Frequency (taking tip mass into account): 3 E w t 3 E w t 3 f corr = = π 12(P L p L 4 ) ρ(π H 3 L w t L 4 ) where the tip is assumed as a cone with height H and base diameter equal to H. AFM Accessories Spring Constant Calibration Using the Sader Method: Sader s result for the spring constant of a rectangular cantilever is: k rect = ρ f w 2 LQf 0 2 Γ i (Re) where ρ f is the density of the surrounding fluid (air), Q is the quality factor of the resonance, and Γ i is the imaginary component of the hydrodynamic function, a function of the Reynolds number Re which is given by Re = 2πρ f f 0 w 2 / 4η f where η f is the viscosity of the surrounding fluid (air). Innovation with Integrity AFM Probes

68 AFM Accessories Table of Contents Introduction 135 All AFM Accessories 136 Dimension Accessories 143 Innova Accessories 149 MultiMode Accessories 156 Catalyst Accessories 161 Caliber Accessories 163 EnviroScope Accessories 165 BioScope Accessories 168 AFM Accessories to Drive Your Performance B eing the performance leader in AFM instrumentation requires a strict dedication to providing customers a straightforward path to achieving the most powerful and reliable results applicable to their field. Enabling customers to get the best performance from their AFMs, expanding the AFM s capability, and making the AFM easier to use all while preserving a cost effective price have continually been the goals by which Bruker s success as an AFM leader has been measured. Bruker s AFM accessory product line makes these goals a reality by providing all the keys necessary to unlock, attain, and maintain the true performance potential of every Bruker AFM. Probe Holders and Fluid Cells Take advantage of advanced imaging modes like SCM, STM, Electrochemical, and more. Calibration Standards and References Verify the precision and accuracy of AFM measurements. NIST Certified gratings are also available. Test Samples Use application-specific samples for testing advances modes like PeakForce QNM, MFM, Nanoindentation, and more. Sample Holders Orient and stabilize samples of various sizes to ensure optimized results during imaging. Starter Kits Apply new applications, sample mounting, probe mounting, and probe storage with convenience. Splash Guards and Evaporation Covers Protect scanners and samples from hazard when using the AFM for liquid imaging. And Everything Else From o-rings to replacement springs, and everything in between

69 brukerafmprobes.com/allafmaccessories Peak Force QNM Sample Kit All AFM For use on PeakForce QNM enabled AFMs only. Includes PDMS-SOFT-1, PDMS-SOFT-2, PSFILM, FSILICA, SAPPHIRE-15M, HOPG-15M, RS-15M, and PS-LDPE, all mounted on 15mm disk. Samples also sold separately. PFQNM-SMPKIT Sample Kit for PeakForce QNM 1 PDMS-SOFT-1 PDMS Tack 0 Gel, 15mm Mounted 1 PDMS-SOFT-2 PDMS Tack 4 Gel, 15mm Mounted 1 PSFILM Polystyrene Film, 15mm Mounted 1 FSILICA Fused Silica, 15mm Mounted 1 SAPPHIRE-15M Sapphire, 15mm Mounted 1 Graphite Sample All AFM This is a highly ordered pyrolytic graphite calibration sample that is 12mm x 12mm, manufactured by decomposition of a hydrocarbon gas at very high temperature. The result is an ultra-pure product that is near theoretical density and is extremely anisotropic. Also available mounted on a 15mm disk. HOPG Highly Ordered Pyrolytic Graphite 1 HOPG-15M Graphite, 15mm Mounted 1 brukerafmprobes.com/allafmaccessories Elastic Modulus Training Sample All AFM A two-component polymer mounted on a 15mm disk, consisting of a blend of polystyrene (~2GPa) and Polyolefin Elastomer (~0.1GPa) that have been spun cast onto a silicon substrate, creating a film with varying material properties. Also available on glass slide for Catalyst AFMs, model PS-LDPE-GS. PS-LDPE Two Component Polymer, 15mm Mounted 1 Magnetic Force Microscopy (MFM) Sample All AFM Magnetic sample of recorded videotape for MFM imaging. Pre-mounted on an 12mm steel disk. Also available mounted on and 15mm disk for Innova AFMs, model MFMSAMPLE-CP. MFMSAMPLE Magnetic Recorded Sample, 12mm Mounted 1 Titanium Roughness Sample All AFM For use with the NanoScope tip-evaluation software, which provides on-command probe shape reconstruction based on scanning of this sample s polycrystalline titanium surface. Also available mounted on a 15mm disk. Scanning Capacitance Microscopy (SCM) Sample All AFM This SRAM sample shows domains when imaged in SCM mode. Mounted on a 15mm steel disk. RS Titanium Roughness Sample 1 RS-15M Ti Roughness Sample, 15mm Mounted 1 SCMSAMPLE SRAM Sample for SCM, 15mm Mounted

70 brukerafmprobes.com/allafmaccessories Biological Imaging Substrate All AFM An Amine functionalized silicon substrate for immobilizing biological molecules for AFM imaging. brukerafmprobes.com/allafmaccessories VITA Nano-TA Calibration Sample Set All AFM VITA nano-ta calibration sample set consisting of three polymer samples with known transition temperatures. These samples allow for temperature calibration of each nta probe. FSUB-11 Amine Functionalized Substrate 1 VITA-CS-NANOTA VITA NanoTA Calibration Sample 1 Gold Sample All AFM This gold sample is for indenting and scratching. It is 8mm x 8mm and mounted on a 15mm steel disk. VITA Scanning Thermal Microscopy (SThM) Test Sample All AFM VITA Scanning Thermal Microscopy (SThM) carbon fiber/ epoxy composite sample. Allows users to become familiar with SThM technique on Bruker AFMs. ISGS Gold Sample, 15mm Mounted 1 VITA-TS-STHM VITA SThM Sample 1 Mica Sample Disks All AFM These sample disks are useful as a sample substrates (especially for biological samples) and as atomic resolution standards. They are 12mm round and come unmounted. Sample Adhesive Pads All AFM This is a full package of sample adhesive pads for use with steel sample mounting disks. There are 36 adhesive spots per sheet, and 50 sheets per package. MICA Mica Sample, Unmounted 1 STKYDOT Sample Adhesive Pads

71 brukerafmprobes.com/allafmaccessories Sample Mounting Disk All AFM Steel AFM sample mounting disks. Available in 6mm, 12mm, 15mm sizes. 18mm steel disks for Innova AFM are also available, model APSH SD-104 6mm Mounting Disks 50 SD mm Mounting Disks 50 SD mm Mounting Disks 50 brukerafmprobes.com/allafmaccessories Surface Topography Reference Die All AFM A 10µm pitch, 180nm step height reference die. Not certified or NIST traceable. Available unmounted or mounted on a 15mm steel disk. Also available premounted on a glass slide for Catalyst AFMs, model VGRP-GS. VGRP-UM 180nm Depth, 10µm Pitch 1 VGRP-15M 180nm Depth, 10µm Pitch, 15mm Mounted 1 Sample Holder All AFM Sample holder designed to hold a wafer cross-section upright for edge inspection. A second, soft sample holder is designed specifically for soft materials. Both models come with hex key for tightening. SD-103 Cross-Section Sample Holder 1 PSH-103 Cross-Section Soft Sample Holder 1 Surface Topography Reference Die All AFM VLSI 3µm pitch reference die available in assorted step heights. Unmounted and not certified or traceable to NIST. STR3-1800P 180nm Depth, 3µm Pitch 1 STR3-1000P 100nm Depth, 3µm Pitch 1 STR3-440P 44nm Depth, 3µm Pitch 1 STR3-180P 18nm Depth, 3µm Pitch 1 1μm Pitch, 100nm Depth Calibration Sample All AFM This platinum-coated calibration grating comes unmounted, mounted on a 15mm steel disk, or mounted on an 18mm steel disk for the Innova AFM (model APCS-0001). PG-STM 100nm Depth, 1µm Pitch 1 PG 100nm Depth, 1µm Pitch, 15mm Mounted 1 Surface Topography Reference Die All AFM VLSI 10µm pitch reference die available in assorted step heights. Unmounted and not certified or traceable to NIST. STR P 180nm Depth, 10µm Pitch 1 STR P 100nm Depth, 10µm Pitch 1 STR10-440P 44nm Depth, 10µm Pitch 1 STR10-180P 18nm Depth, 10µm Pitch

72 brukerafmprobes.com/allafmaccessories Surface Topography Standard All AFM VLSI certified and NIST traceable standards incorporating three separate areas with 1.8, 3, and 5µm pitches, respectively. Unmounted and available in assorted step heights. STS2-1800S 180nm Depth, 1.8/3/5µm Pitch 1 STS2-1000S 100nm Depth, 1.8/3/5µm Pitch 1 STS2-440P 44nm Depth, 1.8/3/5µm Pitch 1 STS2-180P 18nm Depth, 1.8/3/5µm Pitch 1 brukerafmprobes.com/dimensionaccessories Direct Drive Fluid Probe Holder Dimension Next-generation and more efficient direct drive fluid cell for ScanAsyst, PeakForce QNM, TappingMode, contact mode, Electrochemistry, and Force Modulation (Z Mod). It has a tilted glass window that enhances the optical view of sample surface and a protruding probe design that supports improved fluid flow near tip and allows for easier tip inspection. DTFML-DD-HE High-Efficiency Direct Drive Fluid Cell 1 Surface Topography Standard All AFM VLSI certified and NIST traceable standards incorporating three separate areas with 3, 10, and 20µm pitches, respectively. Unmounted and available in assorted step heights. STS3-1800P 180nm Depth, 3/10/20µm Pitch 1 STS3-1000P 100nm Depth, 3/10/20µm Pitch 1 STS3-440P 44nm Depth, 3/10/20µm Pitch 1 STS3-180P 18nmDepth, 3/10/20µm Pitch 1 Splash Guards Dimension These splash guards hold and seal the cantilever holder and the seal on the end of the AFM head, preventing moisture from entering the head during fluid scanning. Available for Dimension Icon, standard, closed-loop, Hybrid XYZ, and EnviroScope AFMs. PRSIC-10 Icon Scanner Splash Guard 10 PRS-10 Standard Scanner Splash Guard 10 PRSCL-10 Closed-Loop Scanner Splash Guard 10 PRSXYZ-10 Hybrid XYZ Scanner Splash Guard 10 Probe Storage Kit All AFM This probe storage kit provides convenient storage for individual tips from whole wafers. Includes one high-tack gel sheet and 20 plastic hinged boxes. Also available with low-tack gel sheet. 44.5mm Evaporation Cover Dimension The 44.5mm Evaporation Covers are designed for use with the Direct Drive Fluid Cantilever Holder, and 35mm Petri Dishes. Also available in silicone or fluorosilicone material. STOR1 High-Tack Probe Storage Kit 20 STOR2 Low-Tack Probe Storage Kit 20 DEV35-5S Silicone Evaporation Cover 5 DEV35-5F Fluorosilicone Evaporation Cover

73 brukerafmprobes.com/dimensionaccessories 76mm Evaporation Cover Dimension The 76mm Evaporation Covers are designed for use with the Direct Drive Fluid Cantilever Holder and 35mm Petri Dishes. Also available in silicone or fluorosilicone material. brukerafmprobes.com/dimensionaccessories Splash Guards Dimension These silicone piezo guards are designed for use with Direct Drive Fluid Cantilever holders and Dimension Hybrid heads. They are also available in fluorosilicone material. DEV60-5S Silicone Evaporation Cover 5 DEV60-5F Fluorosilicone Evaporation Cover 5 DHSG-10S Silicone Piezo Splash Guards 10 DHSG-10F Fluorosilcione Piezo Splash Guards 10 38mm Evaporation Cover Dimension The 38mm Evaporation Covers are designed for use with the Direct Drive Fluid Cantilever Holder, and 35mm Petri Dishes. Also available in silicone or fluorosilicone material. Splash Guards Dimension These silicone piezo guards are designed for use with Direct Drive Fluid Cantilever holders and standard Dimension or EnviroScope heads. They are also available in fluorosilicone material. DEVEC-5S Silicone Evaporation Cover 5 DEVEC-5F Fluorosilicone Evaporation Cover 5 DSG-10S Silicone Piezo Splash Guards 10 DSG-10F Fluorosilicone Piezo Splash Guards 10 Evaporation Covers Dimension 35mm replacement Evaporation Covers for the Dimension AFM. EVSTD35-5 Evaporation Cover 5 Probe Holder For Tapping/ Contact In Air Dimension This probe holder features piezo tip drive and tip bias for TappingMode and contact mode operation in air. This holder supports Electric Force Microscopy (EFM), Magnetic Force Microscopy (MFM), and surface potential modes. The DCHNM non-magnetic holder is also available. DAFMCH Air Operation Probe Holder 1 DCHNM Non-Magnetic Air Operation Probe Holder

74 brukerafmprobes.com/dimensionaccessories Force Modulation Probe Holder Dimension This probe holder includes a large piezo that drives the tip at low frequency and high amplitude, permitting force imaging in air on the Dimension AFM heads. The holder can also be used in TappingMode and contact mode. brukerafmprobes.com/dimensionaccessories Torsional Resonance Probe Holder For App Module Dimension This probe holder is designed for use with TUNA, CAFM, or SSRM application modules in Torsional Resonance (TR-Mode ). Part DTRCH is also available for TR-Mode without application modules. DFMA Force Modulation Probe Holder 1 DTRCH-AM TR-Mode (w/ App Module) Probe Holder 1 Scanning Capacitance Micropscopy (SCM) Probe Holder Dimension This probe holder supports AFMs equipped with the SCM application module. The integrated piezo can be actuated for TappingMode or LiftMode operation. The holder comes with a short cable for connection to the SCM application module. Torsional Resonance Probe Holder Dimension Probe holder for Torsional Resonance TR-Mode on Dimension AFMs without application modules. Part DTRCH-AM is also available for TR-Mode with application modules. DSCMSCH SCM Probe Holder 1 DTRCH TR-Mode (w/out App Module) Probe Holder 1 Scanning Tunneling Microscopy (STM) Probe Holder Dimension This probe holder fits directly onto the Dimension AFM head to enable STM operation. When performing STM imaging, the sample is biased (software controlled) and the probe measures current. Conductive STM probes are included. Probe Holder Without Piezo Dimension These Dimension probe holders have no tapping piezo. There is no spring clip to hold the probe in place, so probes must be manually mounted and affixed onto the holders. DSTM STM Probe Holder 1 MPA-NP Air Operation Probe Holder, No Piezo

75 brukerafmprobes.com/dimensionaccessories Magnetic Force Microscopy (MFM) Tool Kit Dimension Contains accessories necessary for performing magnetic force microscopy. It includes one pack of MESP probes, probe magnetizer, and a magnetic videotape sample (also sold separately, model MFMSAMPLE). brukerafmprobes.com/innovaaccessories Electric Field Sample Innova This sample is conductive and allows a bias potential to be applied between tip and sample. This allows an E-Field to be imaged in LiftMode. Mounted on an 18mm steel disk. DMFM-START Magnetic Force Microscopy Kit EFM Sample, 18mm Mounted 1 Magnetic Test Sample Innova Magnetic sample of recorded videotape. Premounted on an 18mm steel disk. Also available mounted on a 15mm steel disk for other AFMs, model MFMSAMPLE. MFMSAMPLE-CP Magnetic Recorded Sample, 15mm Mounted 1 Piezo Response Force Microscopy Sample Innova Standard sample for piezo response force microscopy. Square substrate of periodically-poled lithium niobate mounted onto an 18mm steel disk. PFM-SMPL Piezo Response Sample, 15mm Mounted

76 brukerafmprobes.com/innovaaccessories Scanning Capacitance Sample Innova This sample shows domains when imaged in SCM mode. Mounted on an 15mm steel disk. brukerafmprobes.com/innovaaccessories Cross-Sectional Sample Holder Innova This sample holder is used when the cross-section surface of a sample is to be scanned. Designed for use on Innova AFMs, but also useful for Caliber and Dimension AFMs. Sample holder is 0.75in diameter and 0.26in tall. SCMSAMPLE-CP 15mm Mounted Sample 1 APSH-0040 Cross-Section Sample Holder 1 Sample Mounting Disk Innova 18mm steel AFM sample mounting disks. Available in 6mm (model SD-104), 12mm (model SD-101), and 15mm (model SD-102) sizes for other AFMs. Sample Bias Holder Innova The Sample Bias Holder has connectors to apply an external sample bias voltage. This type of sample holder is used to hold a flat sample, such as a piece of semiconductor material. APSH mm Mounting Disks 50 APSH-0050 Sample Bias Holder 1 Non-Magnetic Sample Holder Innova Non-magnetic sample holder for MFM imaging. 1μm Pitch, 100nm Depth Calibration Sample Innova This platinum-coated calibration grating comes mounted on an 18mm disk. Also available unmounted (model PG-STM) or mounted on a 15mm steel disk (model PG) for other AFMs. APSH-0020 Non-Magnetic Sample Holder 1 APCS nm Depth, 1μm Pitch, 18mm Mounted

77 brukerafmprobes.com/innovaaccessories Multi-Area Calibration Sample Innova Multi-area calibration sample, pitch size is selectable from 2μm to 15μm. Mounted on an 18mm disk. brukerafmprobes.com/innovaaccessories Unmounted Probe Holder Innova Probe holder for unmounted probes for the Innova AFM. For adapting probes that are not premounted onto the probe substrate. To be used with probe cartridges, models (TappingMode ) or (contact mode). APCS-0099 Multi-Pitch Calibration Sample, 18mm Mounted Unmounted Probe Carrier 1 MicroCell Fluid Imaging Kit Innova This cell is for liquid imaging in contact, LFM, and TappingMode modes with a small amount of liquid (50-100mL). Included are two syringes and tubing, two rubber shrouds, and one cantilever mounting fixture. Electric Field Microscopy (EFM) Probe Holder Innova This probe holder with lead provides mounting of unmounted probes on a metallic adaptor that interfaces to the Innova probe cartridge. The wire connected to the probe holder allows the tip probe to use external voltage sources. APMC-0001 TappingMode Fluid Cell Imaging Kit EFM Probe Holder 1 Conductive AFM Probe Holder Innova This probe holder with lead and BNC connector provides mounting of unmounted probes on a metallic adaptor that interfaces to the Innova probe cartridge. The wire connected to the probe holder allows the probe bias to use external voltage sources. Probe Cartridge Innova These probe cartridges hold pre-mounted probes, or probes in the unmounted probe holder (model ) for use on Innova AFMs. (STM probe cartridge does not require pre-mounted probe.) CAFM Probe Holder TappingMode Probe Holder Contact Mode Probe Holder STM Mode Probe Holder

78 brukerafmprobes.com/innovaaccessories VITA Probe Holder Innova VITA Probe Holder for Innova AFMs. Allows VITA nta and SThM probes to be used with an Innova AFM. Probes must be purchased separately. brukerafmprobes.com/innovaaccessories Magnetic Force Microscopy (MFM) Toolkit Innova The MFM toolkit includes: APSH-0020 Non-Magnetic Sample Holder (also sold separately), Tip Magnetizer, MFMSAMPLE-CP videotape sample (also sold separately), and MFM probes. VITA-CH-IN VITA nanota and SThM Probe Holder 1 PSIT-0005 Magnetic Force Microscopy Kit 1 Cantilever and Sample Assortment Innova Kit Includes: 3 MPP , 3 MPP , 1 MLCT, 1 MSCT, 1 MLCT, 1 CLST-PTBO, (Innova-mounted graphite sample). Closed-Loop Scanner Alignment Stand Innova Alignment stand and cable interface for the 100-micron Innova Scanner. Allows mounting of 100-micron scanner outside the stage so that the ScanMaster position detection light source can be physically aligned to the center of the detector. Includes alignment stand and cable interface for 100-micron Innova scanner Probe & Sample Starter Kit Alignment Stand 1 Unmounted Probe Holder Toolkit Innova This kit provides hardware and tools for mounting probes in an Innova probe carrier. The kit includes: Probe Holder, Tweezer Set, and mounting fixture. Components can also be purchased separately. APCC-0001 Probe Mounting Kit

79 brukerafmprobes.com/multimodeaccessories Fast Scanning Accessory for the MultiMode 8 AFM MultiMode 8 Enables faster scanning in air on the MultiMode 8. Typical results are an approximately 6X improvement in high resolution scanning and up to a 20X improvement in lower resolution scans relative to conventional TappingMode or ScanAsyst imaging. Actual results may vary with sample types and conditions. Includes new ScanAsyst-HR probe holder, a probe loading stand and 20 probes. REQUIRES a MultiMode 8 AFM. SCANASYST-HR ScanAsyst-HR Accessory 1 brukerafmprobes.com/multimodeaccessories Fluid Cell MultiMode This versatile glass cell enables MultiMode users to perform TappingMode, force modulation, and contact mode experiments in liquids. One pack of probes and fluid cell accessory kit (model FCPART) is included. MTFML TappingMode Fluid Cell 1 Tapping Electrochemistry Fluid Cell MultiMode The electrochemistry tapping fluid cell has an integrated piezo for doing ScanAsyst, TappingMode or contact mode electrochemistry experiments. Three fluid ports, an electrode support post, and an entry hole for counter and reference electrodes are integrated into the glass cell. Shipped with Luer fittings and other accessories for fluids and electrochemistry. MMTMEC Electrochemistry Tapping Fluid Cell 1 Heater/ Cooler Fluid Cell Kit MultiMode This kit adds capability to the heater/ cooler element, providing sample heating and temperature control in liquids. Includes a MMTMEC fluid cell and a handheld microthermocouple with readout for monitoring actual fluid/ sample temperature. MMHFC Heater/ Cooler Accessory Kit 1 STM Electrochemistry Fluid Cell MultiMode The electrochemistry Scanning Tunneling Microscopy (STM) kit consists of a stainless steel Teflon-coated cup for holding samples and liquids. It is designed for electrochemical STM and Scanning Electrochemical Potential Microscopy (SEPM) experiments. Comes with a set of other useful accessories. MMTVFC STM Electrochemistry Cell 1 Fluid Cell O-Rings MultiMode These O-Rings feature a unique S-shaped profile and are available in silicone or fluorosilicone rubber, or Viton polymer. They are flexible and easy to use, creating a liquid tight seal against the sample. FCO-10 Silicone O-Rings 10 FSFCO-10 Fluorosilicone O-Rings 10 VTFCO-10 Viton O-Rings

80 brukerafmprobes.com/multimodeaccessories Force Modulation Probe Holder MultiMode This stainless steel probe holder includes a large piezo to drive the probe for low-frequency, highamplitude force imaging in air. It can also be used for TappingMode and contact mode. brukerafmprobes.com/multimodeaccessories Torsional Resonance Mode Probe Holder For App Module MultiMode Probe Holder for all application module equipped MultiMode heads. MFMA Force Modulation Probe Holder 1 MMTR-TUNA-CH-2 All Application Module Probe Holder 1 Electric Field Probe Holder MultiMode This stainless steel probe holder enables electric field gradient imaging for the MultiMode. The holder provides electrical contact to the probe through both the probe clip and the stainless steel probe pocket. An integrated piezo oscillates the probe for TappingMode. This holder can also be used for contact, MFM, and surface potential modes. MMEFCH Electric Field Probe Holder 1 VITA Probe Holder MultiMode VITA Probe Holder for MultiMode AFMs. Allows VITA nanota and SThM probes to be used with an MultiMode AFM. Probes must be purchased separately. VITA-CH-MM VITA nanota and SThM Probe Holder 1 Torsional Resonance Mode Probe Holder MultiMode Torsional Resonance (TR-Mode ) probe holders include dual piezos to oscillate the probe rotationally or vertically. Not compatible with LFM SPMs. The holder provides electrical contact to the probe through both the probe clip and the stainless steel probe pocket. An integrated piezo oscillates the probe for TappingMode. This holder can also be used for ScanAsyst, contact, MFM, and surface potential modes. MMTRCH TR-Mode Probe Holder 1 Fluid Cell Replacement Spring Clip MultiMode One replacement spring clip for the MultiMode fluid cells Fluid Cell Replacement Spring

81 brukerafmprobes.com/multimodeaccessories Fluid Cell Accessory Kit MultiMode Includes 10 glass slides, silicone tubing, 5cc syringe, lens cleaners, 4 male luer fittings, 2 female luer fittings, 2 tube clamps, 6 fluorosilicone o-rings, silicone grease, and accessory case. brukerafmprobes.com/catalystaccessories Elastic Modulus Training Sample Catalyst A two-component polymer mounted on a glass slide, consisting of a blend of Polystyrene (~2GPa) and Polyolefin Elastomer (~0.1GPa) that have been spun cast onto a silicon substrate, creating a film with varying material properties. Also available on a 15mm disk for other AFMs, model PS-LDPE. FCPART Fluid Cell Accessory Kit 1 PS-LDPE-GS Two Component Polymer, Glass Slide Mounted 1 Magnetic Force Microscopy (MFM) Tool Kit MultiMode Contains accessories necessary for performing magnetic force microscopy. It includes one pack of MESP probes, probe magnetizer, and an MFMSAMPLE magnetic videotape sample (also sold separately). Surface Topography Reference Die Catalyst A 10µm pitch, 180nm step height reference die. Not certified or NIST traceable. Also available unmounted (model VGRP-UM) or mounted on a 15mm steel disk (model VGRP-15M) for other AFMs. MMMFM-START Magnetic Force Microscopy Kit 1 VGRP-GS 180 Depth, 10µm Pitch, Glass Slide Mounted 1 Scanner Replacement Spring MultiMode These springs supply tension to the AFM optical head, scanner, and base for mechanical stability. Available for AS-130/200, AS-0.5/12, or V/VLH type scanners. Cover Slip Clamp Catalyst A 25mm x 25mm cover slip clamp for holding 25mm microscope glass coverslips. SPRING-L AS-130/200 Replacement Springs 2 SPRING-S AS-0.5/12 Replacement Springs 2 SPRING-V V/VLH Replacement Springs 2 CATALYST-CSC Cover Slip Clamp

82 brukerafmprobes.com/catalystaccessories Glass Slide Clamp Catalyst A 75mm x 25mm slide clamp for holding microscope glass slides. brukerafmprobes.com/catalystaccessories Fluid Probe Holder Catalyst Probe holder designed for fluid operation in contact or TappingMode. Also compatible with air operation. CATALYST-GSC Glass Slide Clamp 1 CATALYST-FCH Fluid Operation Probe Holder 1 Magnetic Sample Holder Catalyst A pack of three glass slides with magnetic mounts to hold samples mounted on steel disks. Comes with slide case. Fluid Condensation Window Catalyst A glass window that forms a vented soft sealed chamber for heating and/or perfusion studies. For use with the 60mm plastic and 50mm glass bottom Petri Dish perfusion cells. CATALYST-MSH Glass Slides With Magnetic Sample Holder 1 CATALYST-FCW Fluid Condensation Window 1 Air Probe Holder Catalyst Probe holder designed for air operation in contact or TappingMode. Not compatible with fluid operation. Petri Dish Clamp Catalyst Sample clamp for holding Petri Dishes. Available in assorted sizes for holding 35mm, 50mm, or 60mm Petri Dishes. CATALYST-ACH Air Operation Probe Holder 1 CATALYST-35P 35mm Petri Dish Clamp 1 CATALYST-50P 50mm Petri Dish Clamp 1 CATALYST-60P 60mm Petri Dish Clamp

83 brukerafmprobes.com/caliberaccessories Mounted Sample Kit Caliber This kit includes a graphite sample, mica sample, aluminum grains sample, compact disk sample, laser alignment mirror, and three calibration references. All mounted on 10mm steel disks. brukerafmprobes.com/enviroscopeaccessories Sample Mounting Disks EnviroScope This EnviroScope sample disk is a 0.47-inch magnetic SST sample disk Calibration Reference Sample Kit 1 ESSD-5 Magnetic Sample Mounting Disks 5 Sample Mounting Disks Caliber Steel sample mounting disks with leads for electrical connection. These disks come in packs of 20 and are used with the Caliber AFM. Direct Drive Fluid Probe Holder EnviroScope Supports fluid cell operation for contact mode, TappingMode, force modulation and electrochemistry (with appropriate accessories). Splash guards are included mm Mounting Disks 20 DTFMLES-DD TappingMode Fluid Cell 1 Probe Mounting Kit Caliber Kit contains: Tweezer Set, Caliber Substrates, Mounting Fixture, Probe Epoxy. Components can also be purchased individually Caliber Probe Mounting Kit Tweezer Set Caliber Substrates Mounting Fixtures Probe Mounting Epoxy 1 Fluid Cell Electrochemistry Kit EnviroScope This electrochemistry fluid cell accessory kit includes replacement screws and springs for the electrochemistry fluid cell (model ESEC-CELL) plus two EC cell evaporation covers, silver, platinum iridium and copper electrode wires, and a screwdriver in a sturdy plastic accessory case. ESEC-ACCY Electrochemistry Accessory Kit

84 brukerafmprobes.com/enviroscopeaccessories Electrochemistry Fluid Cell EnviroScope Holds sample and liquid for experiments in fluids. The tapered cup includes magnets to secure the cell to the microscope. This is for use with the EnviroScope fluid cantilever holder DTFMLES-DD, which must be ordered separately. brukerafmprobes.com/enviroscopeaccessories 35MM Magnetic Petri Clamp EnviroScope Petri Dish clamp for use with EnviroScope fluid heating stage. Magnetically clamps Petri Dishes securely to the stage leaving a smooth surface for use with evaporation covers. ESEC-CELL Fluid Cell Liquid Holder 1 ESPC35 Petri Dish Clamp 1 Splash Guards EnviroScope These splash guards hold and seal the cantilever holder and the seal on the end of the EnviroScope AFM head, preventing moisture from entering the head during fluid scanning. Tip Heating Probe Holder EnviroScope This tip heating probe holder is vacuum compatible for use with the EnviroScope SPM. PRSES-10 Piezo Splash Guards 10 ESCOPECH Tip Heating Probe Holder 1 Evaporation Covers EnviroScope 35mm replacement evaporation covers for the EnviroScope AFM. Electrochemistry (EC) evaporation covers are also available. EVES35-5 Standard Evaporation Cover 5 EVECES-5 Electrochemistry Evaporation Cover

85 brukerafmprobes.com/bioscopeaccessories Direct Drive Fluid Probe Holder BioScope Supports fluid cell operation for contact mode, TappingMode, force modulation and electrochemistry (with appropriate accessories). Splash guards are included. BFCH-DD TappingMode Fluid Cell 1 Evaporation Covers BioScope Two replacement silicone Petri Dish (60mm) covers for the BioScope Fluid Heater used to protect the scanner and prevent evaporation of fluid during scanning. EVAPCVR Evaporation Cover 2 Index Innovation with Integrity AFM Probes

86 Index All Products Alphabetical Index All Products Alphabetical Page Innova Alignment Stand Innova CAFM Probe Holder Innova Unmounted Probe Carrier EFM Sample, 18mm Mounted Innova EFM Probe Holder Innova Probe & Sample Starter Kit Caliber Probe Mounting Kit Tweezer Set Caliber Mounting Substrates Caliber Mounting Fixtures Caliber Probe Mounting Epoxy Calibration Reference Sample Kit MultiMode Replacement Fluid Cell Spring Innova TappingMode Probe Holder Innova Contact Mode Probe Holder Innova STM Mode Probe Holder mm Mounting Disks APCC-0001 Innova Probe Mounting Kit APCS-0001 Reference 100nm Depth, 1μm Pitch, 18mm Mounted APCS-0099 Multi-Pitch Calibration Sample, 18mm Mounted APMC-0001 Innova TappingMode Fluid Cell Imaging Kit APSH mm Mounting Disks APSH-0020 Innova Non-Magnetic Sample Holder APSH-0040 Innova Cross-Section Sample Holder APSH-0050 Innova Sample Bias Holder BFCH-DD BioScope TappingMode Fluid Cell CATALYST-35P 35mm Petri Dish Clamp CATALYST-50P 50mm Petri Dish Clamp CATALYST-60P 60mm Petri Dish Clamp CATALYST-ACH Catalyst Air Operation Probe Holder CATALYST-CSC Cover Slip Clamp CATALYST-FCH Catalyst Fluid Operation Probe Holder CATALYST-FCW Fluid Condensation Window Page CATALYST-GSC Glass Slide Clamp CATALYST-MSH Catalyst Glass Slides With Magnetic Sample Holder CDF100 Triangular Re-Entrant Tips, 3-D Imaging, Width 100nm, Length 300nm CDF100C Triangular Re-Entrant Tips, 3-D Imaging, Width 100nm, Length 300nm, Carbon Coated CDNISP-HS Diamond Tip, N/m, khz CDP15/150-3D Round Post Tips, Depth Metrology, Width 15nm, Length 150nm CDP15/150C-3D Round Post Tips, Depth Metrology, Width 15nm, Length 150nm, Carbon Coated CDP200A Round Post Tips, Depth Metrology, Width 200nm, Length 600nm CDP55A Round Post Tips, Depth Metrology, Width 55nm, Length 600nm CDP55L Round Post Tips, Depth Metrology, Width 55nm, Length 900nm CDR-120 Round Re-Entrant Tips, 3-D Imaging, Width 120nm, Length 600nm CDR120C Round Re-Entrant Tips, 3-D Imaging, Width 120nm, Length 600nm, Carbon Coated CDR130S Round Re-Entrant Tips, 3-D Imaging, Width 130nm, Length 300nm CDR-300 Round Re-Entrant Tips, 3-D Imaging, Width 300nm, Length 1250nm CDR32 Round Re-Entrant Tips, 3-D Imaging, Width 32nm, Length 220nm CDR-50C Round Re-Entrant Tips, 3-D Imaging, Width 50nm, Length 300nm, Carbon Coated CDR-50S Round Re-Entrant Tips, 3-D Imaging, Width 50nm, Length 225nm CDR-70 Round Re-Entrant Tips, 3-D Imaging, Width 70nm, Length 500nm CDR-70S Round Re-Entrant Tips, 3-D Imaging, Width 70nm, Length 400nm CDR850 Round Re-Entrant Tips, 3-D Imaging, Width 850nm, Length 6000nm CLFC-NOBO Calibration Probes, Three Cantilevers With Different k 5 74 CLFC-NOMB Calibration Probes, Three Cantilevers With Different k 5 74 CLST-PTBO Precision Cut Wire, 0.5mm Diameter, 20mm Length CNT350 Carbon Nanotube Probe, 350nm Length, 42N/m, 320kHz, Al Ref. Coating CNT500 Carbon Nanotube Probe, 500nm Length, 42N/m, 320kHz, Al Ref. Coating CONTV-A 0.2N/m, 13kHz, Al Reflective Coating CONTV-AW 0.2N/m, 13kHz, Al Reflective Coating DAFMCH Dimension Air Operation Probe Holder DCHNM Non-Magnetic Air Operation Probe Holder DDESP-10 Doped Diamond Coated Tips, 42N/m, 320kHz, Al Reflective Coating DDESP-FM-10 Doped Diamond Coated Tips, 2.8N/m, 75kHz, Al Reflective Coating

87 Index All Products Alphabetical Index All Products Alphabetical Page DEV35-5F 44.5mm Fluorosilicone Evaporation Cover DEV35-5S 44.5mm Silicone Evaporation Cover DEV60-5F 76mm Fluorosilicone Evaporation Cover DEV60-5S 76mm Silicone Evaportation Cover DEVEC-5F 38mm Fluorosilicone Evaporation Cover DEVEC-5S 38mm Silicone Evaporation Cover DFMA Dimension Force Modulation Probe Holder DHSG-10F Dimension Fluorosilcione Piezo Splash Guards DHSG-10S Dimension Silicone Piezo Splash Guards DLCS-10 DLC Spike Tips, 5N/m, 160kHz, Al Reflective Coating DMASP Micro-Actuated for Fast Scanning & Ideal Resonances DMFM-START Dimension Magnetic Force Microscopy Kit DNISP Diamond Tip, N/m, 35-65kHz DNISP-HS Diamond Tip, N/m, 35-65kHz DNISP-MM Diamond Tip, N/m, 35-65kHz DNP 4 Cantilevers, N/m, Au Reflective Coating DNP-10 4 Cantilevers, N/m, Au Reflective Coating DNP-S Sharpened, 4 Cantilevers, N/m, Au Reflective Coating DNP-S10 Sharpened, 4 Cantilevers, N/m, Au Reflective Coating DPT10 Precision Cut Wire, 0.25mm Diameter, 6mm Length DSCMSCH Dimension SCM Probe Holder DSG-10F Dimension Fluorosilicone Piezo Splash Guards DSG-10S Dimension Silicone Piezo Splash Guards DSTM Dimension STM Probe Holder DTFML-DD-HE Dimension High-Efficiency Direct Drive Fluid Cell DTFMLES-DD EnviroScope TappingMode Fluid Cell DTRCH Dimension TR-Mode (w/out App Module) Probe Holder DTRCH-AM Dimension TR-Mode (w/ App Module) Probe Holder DTT10 Electrochemically Etched Wire, 0.25mm Diameter, 6mm Length EBD-CDR15 Round Re-Entrant Tips for 3-D Imaging, Width 15nm, Length 150nm EBD-CDR20 Round Re-Entrant Tips for 3-D Imaging, Width 20nm, Length 150nm EBD-CDR30 Round Re-Entrant Tips for 3-D Imaging, Width 30nm, Length 150nm EBD-CDR50 Round Re-Entrant Tips for 3-D Imaging, Width 50nm, Length 200nm Page ESCOPECH EnviroScope Tip Heating Probe Holder ESEC-ACCY EnviroScope Electrochemistry Accessory Kit ESEC-CELL EnviroScope Fluid Cell Liquid Holder ESP 0.2N/m, 13kHz, Al Reflective Coating ESPC35 EnviroScope Magnetic Petri Dish Clamp ESP-MT 0.2N/m, 13kHz, Al Reflective Coating ESPW 0.2N/m, 13kHz, Al Reflective Coating ESSD-5 EnviroScope Magnetic Sample Mounting Disks EVAPCVR BioScope Evaporation Covers EVECES-5 35mm EnviroScope EC Evaporation Covers EVES mm EnviroScope Standard Evaporation Covers EVSTD mm Evaporation Cover FASTSCAN-A FastScan Probes, 17N/m, 1,250kHz, Al Reflective Coating FASTSCAN-B FastScan Probes, 4N/m, 400kHz, Au Reflective Coating FASTSCAN-C FastScan Probes, 1.5N/m, 250kHz, Au Reflective Coating FCO-10 MultiMode Fluid Cell Silicone O-Ring FCPART MultiMode Fluid Cell Accessory Kit FESP 2.8N/m, 75kHz, No Coating FESPA 2.8N/m, 75kHz, Al Reflective Coating FESPAW 2.8N/m, 75kHz, Al Reflective Coating FESP-MT 2.8N/m, 75kHz, No Coating FESPW 2.8N/m, 75kHz, No Coating FIB µm, 42N/m, 320kHz, No Coating FIB1-100A 1µm, 42N/m, 320kHz, Al Reflective Coating FIB2-100A 2µm, 42N/m, 320kHz, Al Reflective Coating FIB2-100S 2µm, 42N/m, 320kHz, No Coating FIB3-200A 3µm, 42N/m, 320kHz, Al Reflective Coating FIB3D µm, 42N/m, 320kHz, 3 Tilt Compensation, No Coating FIB3D2-100A 2µm, 42N/m, 320kHz, 3 Tilt Compensation, Al Reflective Coating FIB µm, 42N/m, 320kHz, No Coating FIB4-200A 4µm, 42N/m, 320kHz, Al Reflective Coating

88 Index All Products Alphabetical Index All Products Alphabetical Page FIB µm, 42N/m, 320kHz, No Coating FIB6-400A 6µm, 42N/m, 320kHz, Al Reflective Coating FIB µm, 42N/m, 320kHz, No Coating FIB8-600A 8µm, 42N/m, 320kHz, Al Reflective Coating FMV 2.8N/m, 75kHz, No Coating FMV-W 2.8N/m, 75kHz, No Coating FSFCO-10 MultiMode Fluid Cell Fluorosilicone O-Ring FSILICA Fused Silica Sample, 15mm Mounted FSUB-11 Amine Functionalized Substrate HAR µm, 42N/m, 320kHz, No Coating HMX-10 4N/m, 60kHz, Al Reflective Coating, For HarmoniX Mode HMXS-10 1N/m, 40kHz, Al Reflective Coating, For HarmoniX Mode HMXS-W 1N/m, 40kHz, Al Reflective Coating, For HarmoniX Mode HMX-W 4N/m, 60kHz, Al Reflective Coating, For HarmoniX Mode HOPG Unmounted Highly Ordered Pyrolytic Graphite HOPG-15M Graphite, 15mm Mounted IMPSC-5 High Aspect Ratio Conical Tips, 35N/m, 350kHz, Al Reflective Coating ISGS Gold Sample, 15mm Mounted LTESP 48N/m, 190kHz, No Coating LTESP-MT 48N/m, 190kHz, No Coating LTESPW 48N/m, 190kHz, No Coating MCNT-100 EBD Carbon Nanotube Probe, 100nm Length, 42N/m, 320kHz, Al Ref. Coating MCNT-500 EBD Carbon Nanotube Probe, 500nm Length, 42N/m, 320kHz, Al Ref. Coating MDNISP-HS Diamond Tip, N/m, 35-65kHz MESP Standard MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating MESP-CPMT Standard MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating MESP-HM High-Moment MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating MESP-HMW High-Moment MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating MESP-HR10 High-Resolution, High-Moment MFM Coated Tips, 2.8N/m, 75kHz, Al Reflective Coating MESP-LC Low-Coercivity Fe Coated Tips, 2.8N/m, 75kHz, Fe Reflective Coating MESP-LCW Low-Coercivity Fe Coated Tips, 2.8N/m, 75kHz, Fe Reflective Coating MESP-LM Low-Moment MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating MESP-LMW Low-Moment MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating Page MESP-MT Standard MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating MESP-RC High-Performance MFM Coated Tips, 5N/m, 150kHz, Rotated Tip, Co/Cr Reflective Coating MESP-RCW High-Performance MFM Coated Tips, 5N/m, 150kHz, Rotated Tip, Co/Cr Reflective Coating MESPSP MFM Sample Pack Containing 3x MESP-LC, 3x MESP-HM, and 4x MESP-LM MESPW Standard MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating MFMA MultiMode Force Modulation Probe Holder MFMSAMPLE Magnetic Recorded Sample, 12mm Mounted MFMSAMPLE-CP Magnetic Recorded Sample, 15mm Mounted MICA Mica Sample, Unmounted MLCT 6 Cantilevers, N/m; Au Reflective Coating MLCT-EXMT-A1 1 Cantilever, 0.07N/m, Au Reflective Coating MLCT-EXMT-BF1 5 Cantilevers, N/m, Au Reflective Coating MLCT-MT-A 1 Cantilever, 0.07N/m, Au Reflective Coating MLCT-MT-BF 5 Cantilevers, N/m, Au Reflective Coating MLCT-O10 Tipless, 6 Cantilevers, N/m, Au Reflective Coating MLCT-OW Tipless, 6 Cantilevers, N/m, Au Reflective Coating MLCT-UC 6 Cantilevers, N/m, No Coating MLCT-UCMT-A 1 Cantilever, 0.07N/m, No Coating, Pre-Mounted For Innova AFM MLCT-UCMT-BF 5 Cantilevers, N/m, No Coating, Pre-Mounted For Innova AFM MMEFCH MultiMode E-Field Probe Holder MMHFC MultiMode Heater/ Cooler Accessory Kit MMMFM-START MultiMode Magnetic Force Microscopy Kit MMTMEC MultiMode Electrochemistry Fluid Cell MMTRCH MultiMode TRmode Probe Holder MMTR-TUNA-CH-2 MultiMode All Application Module Probe Holder MMTVFC MultiMode STM Electrochemistry Cell MPA Micro-Actuated Probe for Fast Scanning & Ideal Resonances MPA-NP Air Operation Probe Holder, No Piezo MPP N/m, 300kHz, Rotated Tip, No Coating MPP W 40N/m, 300kHz, Rotated Tip, No Coating MPP N/m, 300kHz, Rotated Tip, Al Reflective Coating MPP W 40N/m, 300kHz, Rotated Tip, Al Reflective Coating MPP N/m, 300kHz, Rotated Tip, Al Reflective Coating

89 Index All Products Alphabetical Index All Products Alphabetical Page MPP N/m, 300kHz, Asymmetric Tip, No Coating MPP W 40N/m, 300kHz, Asymmetric Tip, No Coating MPP N/m, 300kHz, Asymmetric Tip, Al Reflective Coating MPP W 40N/m, 300kHz, Asymmetric Tip, Al Reflective Coating MPP N/m, 150kHz, Rotated Tip, No Coating MPP W 5N/m, 150kHz, Rotated Tip, No Coating MPP N/m, 150kHz, Rotated Tip, Al Reflective Coating MPP W 5N/m, 150kHz, Rotated Tip, Al Reflective Coating MPP N/m, 150kHz, Asymmetric Tip, No Coating MPP W 5N/m, 150kHz, Asymmetric Tip, No Coating MPP N/m, 150kHz, Asymmetric Tip, Al Reflective Coating MPP W 5N/m, 150kHz, Asymmetric Tip, Al Reflective Coating MPP N/m, 525kHz, Rotated Tip, No Coating MPP W 200N/m, 525kHz, Rotated Tip, No Coating MPP N/m, 525kHz, Rotated Tip, Al Reflective Coating MPP W 200N/m, 525kHz, Rotated Tip, Al Reflective Coating MPP N/m, 525kHz, Asymmetric Tip, No Coating MPP W 200N/m, 525kHz, Asymmetric Tip, No Coating MPP N/m, 525kHz, Asymmetric Tip, Al Reflective Coating MPP W 200N/m, 525kHz, Asymmetric Tip, Al Reflective Coating MPP N/m, 75kHz, Rotated Tip, No Coating MPP W 3N/m, 75kHz, Rotated Tip, No Coating MPP N/m, 75kHz, Rotated Tip, Al Reflective Coating MPP W 3N/m, 75kHz, Rotated Tip, Al Reflective Coating MPP N/m, 75kHz, Rotated Tip, Al Reflective Coating MPP N/m, 75kHz, Asymmetric Tip, No Coating MPP W 3N/m, 75kHz, Asymmetric Tip, No Coating MPP N/m, 75kHz, Asymmetric Tip, Al Reflective Coating MPP W 3N/m, 75kHz, Asymmetric Tip, Al Reflective Coating MPP N/m, 40kHz, Rotated Tip, No Coating MPP W 0.9N/m, 40kHz, Rotated Tip, No Coating MPP N/m, 40kHz, Rotated Tip, Al Reflective Coating MPP W 0.9N/m, 40kHz, Rotated Tip, Al Reflective Coating Page MPP N/m, 40kHz, Asymmetric Tip, No Coating MPP W 0.9N/m, 40kHz, Asymmetric Tip, No Coating MPP N/m, 40kHz, Asymmetric Tip, Al Reflective Coating MPP W 0.9N/m, 40kHz, Asymmetric Tip, Al Reflective Coating MPP N/m, 190kHz, Rotated Tip, No Coating MPP W 35N/m, 190kHz, Rotated Tip, No Coating MPP N/m, 190kHz, Rotated Tip, Al Reflective Coating MPP W 35N/m, 190kHz, Rotated Tip, Al Reflective Coating MPP N/m, 190kHz, Asymmetric Tip, No Coating MPP W 35N/m, 190kHz, Asymmetric Tip, No Coating MPP N/m, 190kHz, Asymmetric Tip, Al Reflective Coating MPP W 35N/m, 190kHz, Asymmetric Tip, Al Reflective Coating MPP N/m, 20kHz, Rotated Tip, No Coating MPP W 0.9N/m, 20kHz, Rotated Tip, No Coating MPP N/m, 20kHz, Rotated Tip, Al Reflective Coating MPP W 0.9N/m, 20kHz, Rotated Tip, Al Reflective Coating MPP N/m, 20kHz, Rotated Tip, Al Reflective Coating MPP N/m, 20kHz, Asymmetric Tip, No Coating MPP W 0.9N/m, 20kHz, Asymmetric Tip, No Coating MPP N/m, 20kHz, Asymmetric Tip, Al Reflective Coating MPP W 0.9N/m, 20kHz, Asymmetric Tip, Al Reflective Coating MPP N/m, 10kHz, Rotated Tip, No Coating MPP W 0.1N/m, 10kHz, Rotated Tip, No Coating MPP N/m, 10kHz, Rotated Tip, Al Reflective Coating MPP W 0.1N/m, 10kHz, Rotated Tip, Al Reflective Coating MPP N/m, 10kHz, Asymmetric Tip, No Coating MPP W 0.1N/m, 10kHz, Asymmetric Tip, No Coating MPP N/m, 10kHz, Asymmetric Tip, Al Reflective Coating MPP W 0.1N/m, 10kHz, Asymmetric Tip, Al Reflective Coating MPP N/m, 40kHz, Rotated Tip, No Coating MPP W 5N/m, 40kHz, Rotated Tip, No Coating MPP N/m, 40kHz, Rotated Tip, Al Reflective Coating MPP W 5N/m, 40kHz, Rotated Tip, Al Reflective Coating

90 Index All Products Alphabetical Index All Products Alphabetical Page MPP N/m, 40kHz, Asymmetric Tip, No Coating MPP W 5N/m, 40kHz, Asymmetric Tip, No Coating MPP N/m, 40kHz, Asymmetric Tip, Al Reflective Coating MPP W 5N/m, 40kHz, Asymmetric Tip, Al Reflective Coating MSCT Sharpened, 6 Cantilevers, N/m, Au Reflective Coating MSCT-EXMT-A1 Sharpened, 1 Cantilever, 0.07N/m, Au Reflective Coating MSCT-EXMT-BF1 Sharpened, 5 Cantilevers, N/m, Au Reflective Coating MSCT-MT-A Sharpened, 1 Cantilever, 0.07N/m, No Coating MSCT-MT-BF Sharpened, 5 Cantilevers, N/m, Au Reflective Coating MSCT-UC Sharpened, 6 Cantilevers, N/m, No Coating MSCT-UCMT-A Sharpened, 1 Cantilever, 0.05N/m, No Coating MSCT-UCMT-BF Sharpened, 5 Cantilevers, N/m, No Coating MSNC-MF Sharpened, 2 Cantilevers, 0.1 & 0.5N/m, MFM Coating MSNC-MT-A Sharpened, 1 MFM Cantilevers, 0.1N/m, MFM Coating MSNC-MT-B Sharpened, 1 MFM Cantilevers, 0.5N/m, MFM Coating MSNL-10 Supersharp, 6 Cantilevers, N/m, Au Reflective Coating MSNL-W Supersharp, 6 Cantilevers, N/m, Au Reflective Coating MTFML MultiMode TappingMode Fluid Cell NCHV 42N/m, 320kHz, No Coating NCHV-A 42N/m, 320kHz, Al Reflective Coating NCHV-AW 42N/m, 320kHz, Al Reflective Coating NCHV-W 42N/m, 320kHz, No Coating NCLV 48N/m, 190kHz, No Coating NCLV-W 48N/m, 190kHz, No Coating NICT-MTAP Diamond Tip, N/m, 35-65kHz NP 4 Cantilevers, N/m, Au Reflective Coating NP-10 4 Cantilevers, N/m, Au Reflective Coating NP-10UC 4 Cantilevers, N/m, No Coating NPG Au Coated Tips, 4 Cantilevers, N/m, Au Reflective Coating NPG-10 Au Coated Tips, 4 Cantilevers, N/m, Au Reflective Coating NP-O10 Tipless, 4 Cantilevers, N/m, Au Reflective Coating NP-OW Tipless, 4 Cantilevers, N/m, Au Reflective Coating Page NP-S Sharpened, 4 Cantilevers, N/m, Au Reflective Coating NP-S10 Sharpened, 4 Cantilevers, N/m, Au Reflective Coating NP-W-UC 4 Cantilevers, N/m, No Coating OBL-10 Au Coated tips; 2 Cantilevers, N/m, Au Reflective Coating OLTESPA 2N/m, 70kHz, Al Reflective Coating OLTESPAW 2N/m, 70kHz, Al Reflective Coating ORC8-10 Sharpened, 4 Rectangular Cantilevers N/m, Au Reflective Coating ORC8-W Sharpened, 4 Rectangular Cantilevers N/m, Au Reflective Coating OSCM-PT Pt Coated Tips, 2N/m, 70kHz, Pt/ Ir Reflective Coating OSCM-PTW Pt Coated Tips, 2N/m, 70kHz, Pt/ Ir Reflective Coating OTESPA 42N/m, 300kHz, Al Reflective Coating OTESPAW 42N/m, 300kHz, Al Reflective Coating OTR4-10 Sharpened, 2 Triangular Cantilevers 0.02 & 0.08N/m, Au Reflective Coating OTR4-W Sharpened, 2 Triangular Cantilevers 0.02 & 0.08N/m, Au Reflective Coating OTR8-10 Sharpened, 2 Triangular Cantilevers 0.15 & 0.57N/m, Au Reflective Coating OTR8-W Sharpened, 2 Triangular Cantilevers 0.15 & 0.57N/m, Au Reflective Coating PDMS-SOFT-1 PDMS Tack 0 Gel, 15mm Mounted PDMS-SOFT-2 PDMS Tack 4 Gel, 15mm Mounted PDNISP Diamond Tip, N/m, 35-65kHz PDNISP-HS Diamond Tip, N/m, 35-65kHz PFM-SMPL Piezo Response Sample, 15mm Mounted PFTUNA Pt/ Ir Coated Tips, 0.4N/m, 70kHz, Pt/ Ir Reflective Coating PFQNM-SPMKIT Sample Kit for PeakForce QNM PG Reference 100nm Depth, 1µm Pitch, 15mm Mounted PG-STM Reference 100nm Depth, 1µm Pitch, Unmounted PRS-10 Dimension Standard Scanner Splash Guards PRSCL-10 Dimension Closed-Loop Scanner Splash Guards PRSES-10 EnviroScope Scanner Splash Guards PRSIC-10 Dimension Icon Scanner Splash Guards PRSXYZ-10 Dimension Hybrid XYZ Scanner Splash Guards

91 Index All Products Alphabetical Index All Products Alphabetical Page PSFILM Polystyrene Film, 15mm Mounted PSH-103 Cross-Section Soft Sample Holder PSIT-0005 Magnetic Force Microscopy Kit PS-LDPE Two Component Polymer, 15mm Mounted PS-LDPE-GS Two Component Polymer, Glass Slide Mounted PT10 Precision Cut Wire, 0.25mm Diameter, 8mm Length PT-ECM10 Precision Cut Wire, 0.25mm Diameter, 14mm Length RFESP Order MPP , 3N/m, 75kHz, Rotated Tip, No Coating RFESPW Order MPP W, 3N/m, 75kHz, Rotated Tip, No Coating RS Titanium Roughness Sample, Unmounted RS-15M Ti Roughness Sample, 15mm Mounted RTESP Order MPP , 40N/m, 300kHz, Rotated Tip, No Coating RTESPA Order MPP , 40N/m, 300kHz, Rotated Tip, Al Reflective Coating RTESPAW Order MPP W, 40N/m, 300kHz, Rotated Tip, Al Reflective Coating RTESPW Order MPP W, 40N/m, 300kHz, Rotated Tip, No Coating SAPPHIRE-15M Sapphire Sample, 15mm Mounted SCANASYST-AIR Sharpened, 1 Cantilever, 0.4N/m, Au Reflective Coating SCANASYST-AIR-HR Fast Scanning, Sharpened, 1 Cantilever, 0.4N/m, Al Ref. Coating SCANASYST-FLUID 1 Cantilever, 0.4N/m, Au Reflective Coating SCANASYST-FLUID+ Sharpened, 1 Cantilever, 0.4N/m, Au Reflective Coating SCANASYST-HR Fast Scanning Accessory for the MultiMode 8 AFM SCM-PIC Pt/ Ir Coated Tips, 0.2N/m, 13kHz, Pt/ Ir Reflective Coating SCM-PICW Pt/ Ir Coated Tips, 0.2N/m, 13kHz, Pt/ Ir Reflective Coating SCM-PIT Pt/ Ir Coated Tips, 2.8N/m, 75kHz, Pt/ Ir Reflective Coating SCM-PITW Pt/ Ir Coated Tips, 2.8N/m, 75kHz, Pt/ Ir Reflective Coating SCM-PTMT-EX Pt/ Ir Coated Tips, 2.8N/m, 75kHz, Pt/ Ir Reflective Coating SCMSAMPLE SRAM Sample for SCM, 15mm Mounted SCMSAMPLE-CP SRAM Sample for SCM, 15mm Mounted SD mm Mounting Disks SD mm Mounting Disks SD-103 Cross-Section Sample Holder SD-104 6mm Mounting Disks Page SNL-10 Supersharp, 4 Cantilevers, N/m, Au Reflective Coating SNL-W Supersharp, 4 Cantilevers, N/m, Au Reflective Coating SNP10 Silicon Nitride Post Tips, Depth Metrology, Width 10nm, Length 150nm SNP20 Silicon Nitride Post Tips, Depth Metrology, Width 20nm, Length 200nm SPRING-L MultiMode Scanner AS-130/200 Replacement Springs SPRING-S MultiMode Scanner AS-0.5/12 Replacement Springs SPRING-V MultiMode Scanner V/VLH Replacement Springs STKYDOT Sample Adhesive Pads STM Precision Cut Wire, 0.25mm Diameter, 6mm Length STOR1 High Tack Probe Storage kit STOR2 Low Tack Probe Storage Kit STR P 10µm Pitch, 100nm Step Height Calibration Reference STR P 10µm Pitch, 180nm Step Height Calibration Reference STR10-180P 10µm Pitch, 18nm Step Height Calibration Reference STR10-440P 10µm Pitch, 44nm Step Height Calibration Reference STR3-1000P 3µm Pitch, 100nm Step Height Calibration Reference STR3-1800P 3µm Pitch, 180nm Step Height Calibration Reference STR3-180P 3µm Pitch, 18nm Step Height Calibration Reference STR3-440P 3µm Pitch, 44nm Step Height Calibration Reference STS2-1000S 1.8/ 3/ 5µm Pitch, 100nm Step Height Calibration Standard STS2-1800S 1.8/ 3/ 5µm Pitch, 180nm Step Height Calibration Standard STS2-180P 1.8/ 3/ 5µm Pitch, 18nm Step Height Calibration Standard STS2-440P 1.8/ 3/ 5µm Pitch, 44nm Step Height Calibration Standard STS3-1000P 3/ 10/ 20µm Pitch, 100nm Step Height Calibration Standard STS3-1800P 3/ 10/ 20µm Pitch, 180nm Step Height Calibration Standard STS3-180P 3/ 10/ 20µm Pitch, 18nm Step Height Calibration Standard STS3-440P 3/ 10/ 20µm Pitch, 44nm Step Height Calibration Standard TESP 42N/m, 320kHz, No Coating TESPA 42N/m, 320kHz, Al Reflective Coating TESPA-HAR 1µm, 42N/m, 320kHz, Al Reflective Coating TESPAW 42N/m, 320kHz, Al Reflective Coating TESPD DLC Coated Tips, 42N/m, 320kHz, Al Reflective Coating TESPDW DLC Coated Tips, 42N/m, 320kHz, Al Reflective Coating

92 Index All Products Alphabetical Index Probes By Type Page TESP-HAR 1µm, 42N/m, 320kHz, No Coating TESP-MT 42N/m, 320kHz, No Coating TESP-SS Supersharp Tips, 42N/m, 320kHz, No Coating TESP-SSW Supersharp Tips, 42N/m, 320kHz, No Coating TESPW 42N/m, 320kHz, No Coating TT10 Electrochemically Etched Wire, 0.25mm Diameter, 8mm Length TT-ECM10 Electrochemically Etched Wire, 0.25mm Diameter, 14mm Length VGRP-15M Reference 180nm Depth, 10µm Pitch, 15mm Mounted VGRP-GS Reference 180 Depth, 10µm Pitch, Glass Slide Mounted VGRP-UM Reference 180nm Depth, 10µm Pitch, Unmounted VITA-CH-IN Innova VITA nanota and SThM Probe Holder VITA-CH-MM-HE VITA High-Efficiency nanota and SThM Probe Holder VITA-CS-NANOTA VITA NanoTA Calibration Sample VITA-DM-GLA-1 SThM probes for Dimension SPMs, 150µm Length VITA-DM-NANOTA-200 NanoTA probes for Dimension SPMs, 200µm Length VITA-DM-NANOTA-300 NanoTA probes for Dimension SPMs, 300µm Length VITA-MM-GLA-1 SThM probes for MultiMode SPMs, 150µm Length VITA-MM-NANOTA-200 NanoTA probes for MultiMode SPMs, 200µm Length VITA-MM-NANOTA-300 NanoTA probes for MultiMode SPMs, 300µm Length VITA-HE-GLA-1 SThM probes for MultiMode/ Innova/ Caliber SPMs, 150µm Length VITA-HE-NANOTA-200 NanoTA probes for MultiMode/ Innova/ Caliber SPMs, 200µm Length VITA-HE-NANOTA-300 NanoTA probes for MultiMode/ Innova/ Caliber SPMs, 300µm Length VITA-TS-STHM VITA SThM Sample VTFCO-10 MultiMode Fluid Cell Viton O-Ring ACTIVE PROBES Page DMASP Micro-Actuated for Fast Scanning & Ideal Resonances MPA Micro-Actuated for Fast Scanning & Ideal Resonances CRITICAL DIMENSION PROBES Page CDF100 Triangular Re-Entrant Tips, 3-D Imaging, Width 100nm, Length 300nm CDF100C Triangular Re-Entrant Tips, 3-D Imaging, Width 100nm, Length 300nm, Carbon Coated CDP15/150-3D Round Post Tips, Depth Metrology, Width 15nm, Length 150nm CDP15/150C-3D Round Post Tips, Depth Metrology, Width 15nm, Length 150nm, Carbon Coated CDP200A Round Post Tips, Depth Metrology, Width 200nm, Length 600nm CDP55A Round Post Tips, Depth Metrology, Width 55nm, Length 600nm CDP55L Round Post Tips, Depth Metrology, Width 55nm, Length 900nm CDR-120 Round Re-Entrant Tips, 3-D Imaging, Width 120nm, Length 600nm CDR120C Round Re-Entrant Tips, 3-D Imaging, Width 120nm, Length 600nm, Carbon Coated CDR130S Round Re-Entrant Tips, 3-D Imaging, Width 130nm, Length 300nm CDR-300 Round Re-Entrant Tips, 3-D Imaging, Width 300nm, Length 1250nm CDR32 Round Re-Entrant Tips, 3-D Imaging, Width 32nm, Length 220nm CDR-50C Round Re-Entrant Tips, 3-D Imaging, Width 50nm, Length 300nm, Carbon Coated CDR-50S Round Re-Entrant Tips, 3-D Imaging, Width 50nm, Length 225nm CDR-70 Round Re-Entrant Tips, 3-D Imaging, Width 70nm, Length 500nm CDR-70S Round Re-Entrant Tips, 3-D Imaging, Width 70nm, Length 400nm CDR850 Round Re-Entrant Tips, 3-D Imaging, Width 850nm, Length 6000nm EBD-CDR15 Round Re-Entrant Tips for 3-D Imaging, Width 15nm, Length 150nm EBD-CDR20 Round Re-Entrant Tips for 3-D Imaging, Width 20nm, Length 150nm EBD-CDR30 Round Re-Entrant Tips for 3-D Imaging, Width 30nm, Length 150nm EBD-CDR50 Round Re-Entrant Tips for 3-D Imaging, Width 50nm, Length 200nm SNP10 Silicon Nitride Post Tips, Depth Metrology, Width 10nm, Length 150nm SNP20 Silicon Nitride Post Tips, Depth Metrology, Width 20nm, Length 200nm ELECTRICAL PROBES Page DDESP-10 Doped Diamond Coated Tips, 42N/m, 320kHz, Al Reflective Coating DDESP-FM-10 Doped Diamond Coated Tips, 2.8N/m, 75kHz, Al Reflective Coating OSCM-PT Pt Coated Tips, 2N/m, 70kHz, Pt/ Ir Reflective Coating OSCM-PTW Pt Coated Tips, 2N/m, 70kHz, Pt/ Ir Reflective Coating PFTUNA Pt/ Ir Coated Tips, 0.4N/m, 70kHz, Pt/ Ir Reflective Coating SCM-PIC Pt/ Ir Coated Tips, 0.2N/m, 13kHz, Pt/ Ir Reflective Coating SCM-PICW Pt/ Ir Coated Tips, 0.2N/m, 13kHz, Pt/ Ir Reflective Coating SCM-PIT Pt/ Ir Coated Tips, 2.8N/m, 75kHz, Pt/ Ir Reflective Coating SCM-PITW Pt/ Ir Coated Tips, 2.8N/m, 75kHz, Pt/ Ir Reflective Coating SCM-PTMT-EX Pt/ Ir Coated Tips, 2.8N/m, 75kHz, Pt/ Ir Reflective Coating

93 Index Probes By Type Index Probes By Type MAGNETIC PROBES Page MESP Standard MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating MESP-CPMT Standard MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating MESP-HM High-Moment MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating MESP-HMW High-Moment MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating MESP-HR10 High-Resolution, High-Moment MFM Coated Tips, 2.8N/m, 75kHz, Al Reflective Coating MESP-LC Low-Coercivity Fe Coated Tips, 2.8N/m, 75kHz, Fe Reflective Coating MESP-LCW Low-Coercivity Fe Coated Tips, 2.8N/m, 75kHz, Fe Reflective Coating MESP-LM Low-Moment MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating MESP-LMW Low-Moment MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating MESP-MT Standard MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating MESP-RC High-Performance MFM Coated Tips, 5N/m, 150kHz, Rotated Tip, Co/Cr Reflective Coating MESP-RCW High-Performance MFM Coated Tips, 5N/m, 150kHz, Rotated Tip, Co/Cr Reflective Coating MESPSP MFM Sample Pack Containing 3x MESP-LC, 3x MESP-HM, and 4x MESP-LM MESPW Standard MFM Coated Tips, 2.8N/m, 75kHz, Co/Cr Reflective Coating MSNC-MF Sharpened, 2 Cantilevers, 0.1 & 0.5N/m, MFM Coating MSNC-MT-A Sharpened, 1 MFM Cantilevers, 0.1 N/m, MFM Coating MSNC-MT-B Sharpened, 1 MFM Cantilevers, 0.5 N/m, MFM Coating NANOINDENTATION PROBES Page CDNISP-HS Diamond Tip, N/m, 35-65kHz DNISP Diamond Tip, N/m, 35-65kHz DNISP-HS Diamond Tip, N/m, 35-65kHz DNISP-MM Diamond Tip, N/m, 35-65kHz MDNISP-HS Diamond Tip, N/m, 35-65kHz NICT-MTAP Diamond Tip, N/m, 35-65kHz PDNISP Diamond Tip, N/m, 35-65kHz PDNISP-HS Diamond Tip, N/m, 35-65kHz SILICON PROBES Page CLFC-NOBO Calibration Probes, Three Cantilevers With Different k 5 74 CLFC-NOMB Calibration Probes, Three Cantilevers With Different k 5 74 CONTV-A 0.2N/m, 13kHz, Al Reflective Coating CONTV-AW 0.2N/m, 13kHz, Al Reflective Coating ESP 0.2N/m, 13kHz, Al Reflective Coating Page ESP-MT 0.2N/m, 13kHz, Al Reflective Coating ESPW 0.2N/m, 13kHz, Al Reflective Coating FESP 2.8N/m, 75kHz, No Coating FESPA 2.8N/m, 75kHz, Al Reflective Coating FESPAW 2.8N/m, 75kHz, Al Reflective Coating FESP-MT 2.8N/m, 75kHz, No Coating FESPW 2.8N/m, 75kHz, No Coating FMV 2.8N/m, 75kHz, No Coating FMV-W 2.8N/m, 75kHz, No Coating HMX-10 4N/m, 60kHz, Al Reflective Coating, For HarmoniX Mode HMXS-10 1N/m, 40kHz, Al Reflective Coating, For HarmoniX Mode HMXS-W 1N/m, 40kHz, Al Reflective Coating, For HarmoniX Mode HMX-W 4N/m, 60kHz, Al Reflective Coating, For HarmoniX Mode LTESP 48N/m, 190kHz, No Coating LTESP-MT 48N/m, 190kHz, No Coating LTESPW 48N/m, 190kHz, No Coating MPP N/m, 300kHz, Rotated Tip, No Coating MPP W 40N/m, 300kHz, Rotated Tip, No Coating MPP N/m, 300kHz, Rotated Tip, Al Reflective Coating MPP W 40N/m, 300kHz, Rotated Tip, Al Reflective Coating MPP N/m, 300kHz, Rotated Tip, Al Reflective Coating MPP N/m, 300kHz, Asymmetric Tip, No Coating MPP W 40N/m, 300kHz, Asymmetric Tip, No Coating MPP N/m, 300kHz, Asymmetric Tip, Al Reflective Coating MPP W 40N/m, 300kHz, Asymmetric Tip, Al Reflective Coating MPP N/m, 150kHz, Rotated Tip, No Coating MPP W 5N/m, 150kHz, Rotated Tip, No Coating MPP N/m, 150kHz, Rotated Tip, Al Reflective Coating MPP W 5N/m, 150kHz, Rotated Tip, Al Reflective Coating MPP N/m, 150kHz, Asymmetric Tip, No Coating MPP W 5N/m, 150kHz, Asymmetric Tip, No Coating MPP N/m, 150kHz, Asymmetric Tip, Al Reflective Coating MPP W 5N/m, 150kHz, Asymmetric Tip, Al Reflective Coating MPP N/m, 525kHz, Rotated Tip, No Coating MPP W 200N/m, 525kHz, Rotated Tip, No Coating MPP N/m, 525kHz, Rotated Tip, Al Reflective Coating

94 Index Probes By Type Index Probes By Type Page MPP W 200N/m, 525kHz, Rotated Tip, Al Reflective Coating MPP N/m, 525kHz, Asymmetric Tip, No Coating MPP W 200N/m, 525kHz, Asymmetric Tip, No Coating MPP N/m, 525kHz, Asymmetric Tip, Al Reflective Coating MPP W 200N/m, 525kHz, Asymmetric Tip, Al Reflective Coating MPP N/m, 75kHz, Rotated Tip, No Coating MPP W 3N/m, 75kHz, Rotated Tip, No Coating MPP N/m, 75kHz, Rotated Tip, Al Reflective Coating MPP W 3N/m, 75kHz, Rotated Tip, Al Reflective Coating MPP N/m, 75kHz, Rotated Tip, Al Reflective Coating MPP N/m, 75kHz, Asymmetric Tip, No Coating MPP W 3N/m, 75kHz, Asymmetric Tip, No Coating MPP N/m, 75kHz, Asymmetric Tip, Al Reflective Coating MPP W 3N/m, 75kHz, Asymmetric Tip, Al Reflective Coating MPP N/m, 40kHz, Rotated Tip, No Coating MPP W 0.9N/m, 40kHz, Rotated Tip, No Coating MPP N/m, 40kHz, Rotated Tip, Al Reflective Coating MPP W 0.9N/m, 40kHz, Rotated Tip, Al Reflective Coating MPP N/m, 40kHz, Asymmetric Tip, No Coating MPP W 0.9N/m, 40kHz, Asymmetric Tip, No Coating MPP N/m, 40kHz, Asymmetric Tip, Al Reflective Coating MPP W 0.9N/m, 40kHz, Asymmetric Tip, Al Reflective Coating MPP N/m, 190kHz, Rotated Tip, No Coating MPP W 35N/m, 190kHz, Rotated Tip, No Coating MPP N/m, 190kHz, Rotated Tip, Al Reflective Coating MPP W 35N/m, 190kHz, Rotated Tip, Al Reflective Coating MPP N/m, 190kHz, Asymmetric Tip, No Coating MPP W 35N/m, 190kHz, Asymmetric Tip, No Coating MPP N/m, 190kHz, Asymmetric Tip, Al Reflective Coating MPP W 35N/m, 190kHz, Asymmetric Tip, Al Reflective Coating MPP N/m, 20kHz, Rotated Tip, No Coating MPP W 0.9N/m, 20kHz, Rotated Tip, No Coating MPP N/m, 20kHz, Rotated Tip, Al Reflective Coating MPP W 0.9N/m, 20kHz, Rotated Tip, Al Reflective Coating MPP N/m, 20kHz, Rotated Tip, Al Reflective Coating MPP N/m, 20kHz, Asymmetric Tip, No Coating MPP W 0.9N/m, 20kHz, Asymmetric Tip, No Coating MPP N/m, 20kHz, Asymmetric Tip, Al Reflective Coating MPP W 0.9N/m, 20kHz, Asymmetric Tip, Al Reflective Coating Page MPP N/m, 10kHz, Rotated Tip, No Coating MPP W 0.1N/m, 10kHz, Rotated Tip, No Coating MPP N/m, 10kHz, Rotated Tip, Al Reflective Coating MPP W 0.1N/m, 10kHz, Rotated Tip, Al Reflective Coating MPP N/m, 10kHz, Asymmetric Tip, No Coating MPP W 0.1N/m, 10kHz, Asymmetric Tip, No Coating MPP N/m, 10kHz, Asymmetric Tip, Al Reflective Coating MPP W 0.1N/m, 10kHz, Asymmetric Tip, Al Reflective Coating MPP N/m, 40kHz, Rotated Tip, No Coating MPP W 5N/m, 40kHz, Rotated Tip, No Coating MPP N/m, 40kHz, Rotated Tip, Al Reflective Coating MPP W 5N/m, 40kHz, Rotated Tip, Al Reflective Coating MPP N/m, 40kHz, Asymmetric Tip, No Coating MPP W 5N/m, 40kHz, Asymmetric Tip, No Coating MPP N/m, 40kHz, Asymmetric Tip, Al Reflective Coating MPP W 5N/m, 40kHz, Asymmetric Tip, Al Reflective Coating NCHV 42N/m, 320kHz, No Coating NCHV-A 42N/m, 320kHz, Al Reflective Coating NCHV-AW 42N/m, 320kHz, Al Reflective Coating NCHV-W 42N/m, 320kHz, No Coating NCLV 48N/m, 190kHz, No Coating NCLV-W 48N/m, 190kHz, No Coating OLTESPA 2N/m, 70kHz, Al Reflective Coating OLTESPAW 2N/m, 70kHz, Al Reflective Coating OTESPA 42N/m, 300kHz, Al Reflective Coating OTESPAW 42N/m, 300kHz, Al Reflective Coating RFESP Order MPP , 3N/m, 75kHz, Rotated Tip, No Coating RFESPW Order MPP W, 3N/m, 75kHz, Rotated Tip, No Coating RTESP Order MPP , 40N/m, 300kHz, Rotated Tip, No Coating RTESPA Order MPP , 40N/m, 300kHz, Rotated Tip, Al Reflective Coating RTESPAW Order MPP W, 40N/m, 300kHz, Rotated Tip, Al Reflective Coating RTESPW Order MPP W, 40N/m, 300kHz, Rotated Tip, No Coating TESP 42N/m, 320kHz, No Coating TESPA 42N/m, 320kHz, Al Reflective Coating TESPAW 42N/m, 320kHz, Al Reflective Coating TESPD DLC Coated Tips, 42N/m, 320kHz, Al Reflective Coating TESPDW DLC Coated Tips, 42N/m, 320kHz, Al Reflective Coating TESP-MT 42N/m, 320kHz, No Coating TESPW 42N/m, 320kHz, No Coating

95 Index Probes By Type Index Probes By Type SILICON NITRIDE PROBES Page DNP 4 Cantilevers, N/m, Au Reflective Coating DNP-10 4 Cantilevers, N/m, Au Reflective Coating DNP-S Sharpened, 4 Cantilevers, N/m, Au Reflective Coating DNP-S10 Sharpened, 4 Cantilevers, N/m, Au Reflective Coating FASTSCAN-A FastScan Probes, 17N/m, 1,250kHz, Al Reflective Coating FASTSCAN-B FastScan probes, 4N/m, 400kHz, Au Reflective Coating FASTSCAN-C FastScan Probes, 1.5N/m, 250kHz, Au Reflective Coating MLCT 6 Cantilevers, N/m; Au Reflective Coating MLCT-EXMT-A1 1 Cantilever, 0.07N/m, Au Reflective Coating MLCT-EXMT-BF1 5 Cantilevers, N/m, Au Reflective Coating MLCT-MT-A 1 Cantilever, 0.07N/m, Au Reflective Coating MLCT-MT-BF 5 Cantilevers, N/m, Au Reflective Coating MLCT-O10 Tipless, 6 Cantilevers, N/m, Au Reflective Coating MLCT-OW Tipless, 6 Cantilevers, N/m, Au Reflective Coating MLCT-UC 6 Cantilevers, N/m, No Coating MLCT-UCMT-A 1 Cantilever, 0.07N/m, No Coating, Pre-Mounted For Innova AFM MLCT-UCMT-BF 5 Cantilevers, N/m, No Coating, Pre-Mounted For Innova AFM MSCT Sharpened, 6 Cantilevers, N/m, Au Reflective Coating MSCT-EXMT-A1 Sharpened, 1 Cantilever, 0.07N/m, Au Reflective Coating MSCT-EXMT-BF1 Sharpened, 5 Cantilevers, N/m, Au Reflective Coating MSCT-MT-A Sharpened, 1 Cantilever, 0.07N/m, Au Reflective Coating MSCT-MT-BF Sharpened, 5 Cantilevers, N/m, Au Reflective Coating MSCT-UC Sharpened, 6 Cantilevers, N/m, No Coating MSCT-UCMT-A Sharpened, 1 Cantilever, 0.07N/m, No Coating MSCT-UCMT-BF Sharpened, 5 Cantilevers, N/m, No Coating NP 4 Cantilevers, N/m, Au Reflective Coating NP-10 4 Cantilevers, N/m, Au Reflective Coating NP-10UC 4 Cantilevers, N/m, No Coating NPG Au Coated Tips, 4 Cantilevers, N/m, Au Reflective Coating NPG-10 Au Coated Tips, 4 Cantilevers, N/m, Au Reflective Coating NP-O10 Tipless, 4 Cantilevers, N/m, Au Reflective Coating NP-OW Tipless, 4 Cantilevers, N/m, Au Reflective Coating NP-S Sharpened, 4 Cantilevers, N/m, Au Reflective Coating NP-S10 Sharpened, 4 Cantilevers, N/m, Au Reflective Coating NP-W-UC 4 Cantilevers, N/m, No Coating OBL-10 Au Coated tips; 2 Cantilevers, N/m, Au Reflective Coating ORC8-10 Sharpened, 4 Rectangular Cantilevers N/m, Au Reflective Coating ORC8-W Sharpened, 4 Rectangular Cantilevers N/m, Au Reflective Coating OTR4-10 Sharpened, 2 Triangular Cantilevers 0.02 & 0.08N/m, Au Reflective Coating Page OTR4-W Sharpened, 2 Triangular Cantilevers 0.02 & 0.08N/m, Au Reflective Coating OTR8-10 Sharpened, 2 Triangular Cantilevers 0.15 & 0.57N/m, Au Reflective Coating OTR8-W Sharpened, 2 Triangular Cantilevers 0.02 & 0.08N/m, Au Reflective Coating SCANASYST-AIR Sharpened, 1 Cantilever, 0.4N/m, Au Reflective Coating SCANASYST-AIR-HR Fast Scanning, Sharpened, 1 Cantilever, 0.4N/m, Al Ref. Coating SCANASYST-FLUID 1 Cantilever, 0.4N/m, Au Reflective Coating SCANASYST-FLUID+ Sharpened, 1 Cantilever, 0.4N/m, Au Reflective Coating SPIKE (HIGH ASPECT RATIO) PROBES Page CNT350 Carbon Nanotube Probe, 350nm Length, 42N/m, 320kHz, Al Ref. Coating CNT500 Carbon Nanotube Probe, 500nm Length, 42N/m, 320kHz, Al Ref. Coating FIB µm, 42N/m, 320kHz, No Coating FIB1-100A 1µm, 42N/m, 320kHz, Al Reflective Coating FIB2-100A 2µm, 42N/m, 320kHz, Al Reflective Coating FIB2-100S 2µm, 42N/m, 320kHz, No Coating FIB3-200A 3µm, 42N/m, 320kHz, Al Reflective Coating FIB3D µm, 42N/m, 320kHz, 3 Tilt Compensation, No Coating FIB3D2-100A 2µm, 42N/m, 320kHz, 3 Tilt Compensation, Al Reflective Coating FIB µm, 42N/m, 320kHz, No Coating FIB4-200A 4µm, 42N/m, 320kHz, Al Reflective Coating FIB µm, 42N/m, 320kHz, No Coating FIB6-400A 6µm, 42N/m, 320kHz, Al Reflective Coating FIB µm, 42N/m, 320kHz, No Coating FIB8-600A 8µm, 42N/m, 320kHz, Al Reflective Coating HAR µm, 42N/m, 320kHz, No Coating MCNT-100 EBD Carbon Nanotube Probe, 100nm Length, 42N/m, 320kHz, Al Ref. Coating MCNT-500 EBD Carbon Nanotube Probe, 500nm Length, 42N/m, 320kHz, Al Ref. Coating TESPA-HAR 1µm, 42N/m, 320kHz, Al Reflective Coating TESP-HAR 1µm, 42N/m, 320kHz, No Coating STM PROBES Page CLST-PTBO Precision Cut Wire, 0.5mm Diameter, 20mm Length DPT10 Precision Cut Wire, 0.25mm Diameter, 6mm Length DTT10 Electrochemically Etched Wire, 0.25mm Diameter, 6mm Length PT10 Precision Cut Wire, 0.25mm Diameter, 8mm Length PT-ECM10 Precision Cut Wire, 0.25mm Diameter, 14mm Length STM Precision Cut Wire, 0.25mm Diameter, 6mm Length TT10 Electrochemically Etched Wire, 0.25mm Diameter, 8mm Length TT-ECM10 Electrochemically Etched Wire, 0.25mm Diameter, 14mm Length

96 Index Probes By Type Index Accessories By System SUPERSHARP PROBES Page DLCS-10 DLC Spike Tips, 5N/m, 160kHz, Al Reflective Coating IMPSC-5 High Aspect Ratio Conical Tips, 35N/m, 350kHz, Al Reflective Coating MSNL-10 Supersharp, 6 Cantilevers, N/m, Au Reflective Coating MSNL-W Supersharp, 6 Cantilevers, N/m, Au Reflective Coating SNL-10 Supersharp, 4 Cantilevers, N/m, Au Reflective Coating SNL-W Supersharp, 4 Cantilevers, N/m, Au Reflective Coating TESP-SS Supersharp Tips, 42N/m, 320kHz, No Coating TESP-SSW Supersharp Tips, 42N/m, 320kHz, No Coating THERMAL PROBES Page VITA-DM-GLA-1 SThM probes for Dimension SPMs, 150µm Length VITA-DM-NANOTA-200 NanoTA probes for Dimension SPMs, 200µm Length VITA-DM-NANOTA-300 NanoTA probes for Dimension SPMs, 300µm Length VITA-MM-GLA-1 SThM probes for MultiMode SPMs, 150µm Length VITA-MM-NANOTA-200 NanoTA probes for MultiMode SPMs, 200µm Length VITA-MM-NANOTA-300 NanoTA probes for MultiMode SPMs, 300µm Length VITA-HE-GLA-1 SThM probes for MultiMode/ Innova/ Caliber SPMs, 150µm Length VITA-HE-NANOTA-200 NanoTA probes for MultiMode/ Innova/ Caliber SPMs, 200µm Length VITA-HE-NANOTA-300 NanoTA probes for MultiMode/ Innova/ Caliber SPMs, 300µm Length FOR ALL AFMs Page FSILICA Fused Silica Sample, 15mm Mounted FSUB-11 Amine Functionalized Substrate HOPG Unmounted Highly Ordered Pyrolytic Graphite HOPG-15M Graphite, 15mm Mounted ISGS Gold Sample, 15mm Mounted MFMSAMPLE Magnetic Recorded Sample, 12mm Mounted MICA Mica Sample, Unmounted PDMS-SOFT-1 PDMS Tack 0 Gel, 15mm Mounted PDMS-SOFT-2 PDMS Tack 4 Gel, 15mm Mounted PFQNM-SPMKIT Sample Kit for PeakForce QNM PG Reference 100nm Depth, 1µm Pitch, 15mm Mounted PG-STM Reference 100nm Depth, 1µm Pitch, Unmounted PSFILM Polystyrene Film, 15mm Mounted PSH-103 Cross-Section Soft Sample Holder PS-LDPE Two Component Polymer, 15mm Mounted RS Titanium Roughness Sample, Unmounted RS-15M Ti Roughness Sample, 15mm Mounted SAPPHIRE-15M Sapphire Sample, 15mm Mounted SCMSAMPLE SRAM Sample for SCM, 15mm Mounted SD mm Mounting Disks SD mm Mounting Disks SD-103 Cross-Section Sample Holder SD-104 6mm Mounting Disks STKYDOT Sample Adhesive Pads STOR1 High Tack Probe Storage kit STOR2 Low Tack Probe Storage Kit STR P 10µm Pitch, 100nm Step Height Calibration Reference STR P 10µm Pitch, 180nm Step Height Calibration Reference STR10-180P 10µm Pitch, 18nm Step Height Calibration Reference STR10-440P 10µm Pitch, 44nm Step Height Calibration Reference STR3-1000P 3µm Pitch, 100nm Step Height Calibration Reference STR3-1800P 3µm Pitch, 180nm Step Height Calibration Reference STR3-180P 3µm Pitch, 18nm Step Height Calibration Reference STR3-440P 3µm Pitch, 44nm Step Height Calibration Reference

97 Index Accessories By System Index Accessories By System Page STS2-1000S 1.8/ 3/ 5µm Pitch, 100nm Step Height Calibration Standard STS2-1800S 1.8/ 3/ 5µm Pitch, 180nm Step Height Calibration Standard STS2-180P 1.8/ 3/ 5µm Pitch, 18nm Step Height Calibration Standard STS2-440P 1.8/ 3/ 5µm Pitch, 44nm Step Height Calibration Standard STS3-1000P 3/ 10/ 20µm Pitch, 100nm Step Height Calibration Standard STS3-1800P 3/ 10/ 20µm Pitch, 180nm Step Height Calibration Standard STS3-180P 3/ 10/ 20µm Pitch, 18nm Step Height Calibration Standard STS3-440P 3/ 10/ 20µm Pitch, 44nm Step Height Calibration Standard VGRP-15M Reference 180nm Depth, 10µm Pitch, 15mm Mounted VGRP-UM Reference 180nm Depth, 10µm Pitch, Unmounted VITA-CS-NANOTA VITA NanoTA Calibration Sample VITA-TS-STHM VITA SThM Sample DIMENSION AFMs Page DAFMCH Dimension Air Operation Probe Holder DCHNM Non-Magnetic Air Operation Probe Holder DEV35-5F 44.5mm Fluorosilicone Evaporation Cover DEV35-5S 44.5mm Silicone Evaporation Cover DEV60-5F 76mm Fluorosilicone Evaporation Cover DEV60-5S 76mm Silicone Evaportation Cover DEVEC-5F 38mm Fluorosilicone Evaporation Cover DEVEC-5S 38mm Silicone Evaporation Cover DFMA Dimension Force Modulation Probe Holder DHSG-10F Dimension Fluorosilcione Piezo Splash Guards DHSG-10S Dimension Silicone Piezo Splash Guards DMFM-START Dimension Magnetic Force Microscopy Kit DSCMSCH Dimension SCM Probe Holder DSG-10F Dimension Fluorosilicone Piezo Splash Guards DSG-10S Dimension Silicone Piezo Splash Guards DSTM Dimension STM Probe Holder DTFML-DD-HE Dimension High-Efficiency Direct Drive Fluid Cell DTRCH Dimension TR-Mode (w/out App Module) Probe Holder DTRCH-AM Dimension TR-Mode (w/ App Module) Probe Holder EVSTD mm Evaporation Cover MPA-NP Air Operation Probe Holder, No Piezo Page PRS-10 Dimension Standard Scanner Splash Guards PRSCL-10 Dimension Closed-Loop Scanner Splash Guards PRSIC-10 Dimension Icon Scanner Splash Guards PRSXYZ-10 Dimension Hybrid XYZ Scanner Splash Guards INNOVA AFMs Page Innova Alignment Stand Innova CAFM Probe Holder Innova Unmounted Probe Carrier EFM Sample, 18mm Mounted Innova EFM Probe Holder Innova Probe & Sample Starter Kit Innova TappingMode Probe Holder Innova Contact Mode Probe Holder Innova STM Mode Probe Holder APCC-0001 Innova Probe Mounting Kit APCS-0001 Reference 100nm Depth, 1μm Pitch, 18mm Mounted APCS-0099 Multi-Pitch Calibration Sample, 18mm Mounted APMC-0001 Innova TappingMode Fluid Cell Imaging Kit APSH mm Mounting Disks APSH-0020 Innova Non-Magnetic Sample Holder APSH-0040 Innova Cross-Section Sample Holder APSH-0050 Innova Sample Bias Holder MFMSAMPLE-CP Magnetic Recorded Sample, 15mm Mounted PFM-SMPL Piezo Response Sample, 15mm Mounted PSIT-0005 Innova Magnetic Force Microscopy Kit SCMSAMPLE-CP SRAM Sample for SCM, 15mm Mounted VITA-CH-IN Innova VITA nanota and SThM Probe Holder MULTIMODE AFMs Page MultiMode Fluid Cell Replacement Spring FCO-10 MultiMode Fluid Cell Silicone O-Ring FCPART MultiMode Fluid Cell Accessory Kit FSFCO-10 MultiMode Fluid Cell Fluorosilicone O-Ring MFMA MultiMode Force Modulation Probe Holder

98 Index Accessories By System Index Accessories By System Page MMEFCH MultiMode E-Field Probe Holder MMHFC MultiMode Heater/ Cooler Accessory Kit MMMFM-START Multimode Magnetic Force Microscopy Kit MMTMEC MultiMode Electrochemistry Tapping Fluid Cell MMTRCH MultiMode TRmode Probe Holder MMTR-TUNA-CH-2 MultiMode All Application Module Probe Holder MMTVFC MultiMode STM Electrochemistry Cell MTFML MultiMode TappingMode Fluid Cell SCANASYST-HR Fast Scanning Accessory for the MultiMode 8 AFM SPRING-L MultiMode Scanner AS-130/200 Replacement Springs SPRING-S MultiMode Scanner AS-0.5/12 Replacement Springs SPRING-V MultiMode Scanner V/VLH Replacement Springs VITA-CH-MM-HE VITA High-Efficiency nanota and SThM Probe Holder VTFCO-10 MultiMode Fluid Cell Viton O-Ring CATALYST AFMs Page CATALYST-35P 35mm Petri Dish Clamp CATALYST-50P 50mm Petri Dish Clamp CATALYST-60P 60mm Petri Dish Clamp CATALYST-ACH Catalyst Air Operation Probe Holder CATALYST-CSC Cover Slip Clamp CATALYST-FCH Catalyst Fluid Operation Probe Holder CATALYST-FCW Fluid Condensation Window CATALYST-GSC Glass Slide Clamp CATALYST-MSH Catalyst Glass Slides With Magnetic Sample Holder PS-LDPE-GS Two Component Polymer, Glass Slide Mounted VGRP-GS Reference 180 Depth, 10µm Pitch, Glass Slide Mounted ENVIROSCOPE AFMs Page DTFMLES-DD EnviroScope TappingMode Fluid Cell ESCOPECH EnviroScope Tip Heating Probe Holder ESEC-ACCY EnviroScope Electrochemistry Accessory Kit ESEC-CELL EnviroScope Fluid Cell Liquid Holder ESPC35 EnviroScope Magnetic Petri Dish Clamp ESSD-5 EnviroScope Magnetic Sample Mounting Disks EVECES-5 35mm EnviroScope Electrochemistry Evaporation Covers EVES mm EnviroScope Standard Evaporation Covers PRSES-10 EnviroScope Scanner Splash Guards BIOSCOPE AFMs Page BFCH-DD BioScope TappingMode Fluid Cell EVAPCVR BioScope Evaporation Covers CALIBER AFMs Page Caliber Probe Mounting Kit Tweezer Set Caliber Mounting Substrates Caliber Mounting Fixtures Caliber Probe Mounting Epoxy Calibration Reference Sample Kit mm Mounting Disks

99 Bruker AFM Probes Terms and Conditions for Sale FCA: Payment: Origin Net 30 days from date of invoice, upon approved credit, or prepaid. Freight Charges: Prepaid and added or collect. All freight charges are to be paid by the buyer. Warranty: Delivery: Acceptance: One year on parts and labor, subject to the terms and conditions of Bruker s standard warranty Varies by product; contact us for details. All consumables are shipped on a best effort basis. Acceptance of these products is assumed if not returned to Bruker AFM Probes within 30 days of receipt of goods. All prices and specifications are subject to change. Specifications listed are the nominal specifications for each product. For specification ranges please visit our website. If certain specifications are critical to your application, please contact our technical staff to verify specifications prior to purchase. For a complete copy of our Terms & Conditions, please contact us at afmprobeorders@bruker-nano.com. Bruker Trademarks: Atomic Force Profiler (AFP), AutoTune, BioScope, Catalyst, DAFP, Dimension, EasyAlign, ECAFM, ECSTM, Edge, FESP, HarmoniX, Icon, Innova, InSight, Interleave, LiftMode, MIRO, MultiMode, NanoDrive, NanoIndentation, Nanolithography, NanoMan, Nanomanipulation, NanoProbes, NanoScope, Peak Force Tapping, PeakForce QNM, PeakForce TUNA, PhaseImaging, PicoForce, SAM, ScanAsyst, SECPM, TappingMode, TESP, TipX, Top View Accessory TVA, TR-Mode, TR-Tuna, TurboScan, VITA. The NANOSCALE WORLD COMMUNITY JOIN TODAY MEMBERSHIP BENEFITS Layout for this page using Product Page template, to come. Fully customizable and secure profile Exclusive downloadable content before anyone else Instant access to Bruker s leaders in the nanoscale world Access to exclusive content area for Bruker instrument owners Free resource site including valuable PDFs, images and video content Interactive atmosphere SHARE LEAD PARTICIPATE NANOSCALE WORLD JOIN YOUR AFM ONLINE COMMUNITY Bruker invites you to share, lead and participate in your AFM and SPM community with other leaders of the nanoscale world. Feel free to attend live webinars, listen to recorded sessions and browse publications. The best thing is it s YOUR community. Lead the metrology pack join your community today!

100 Americas Order online (USA only): Phone Orders: +1 (800) Option 6 Purchase Order by Fax: +1 (805) Purchase Order by afmprobeorders@bruker-nano.com Technical Information: +1 (800) x2080 or probesinfo@bruker-nano.com AFM Tech Support: +1 (800) or afmsupport@bruker-nano.com International Europe Phone Orders: Purchase Order by Fax: Purchase Order by orders.france@bruker-nano.com Technical Information: probesinfo.uk@bruker-nano.com Asia Pacific Phone Orders: Purchase Order by Fax: Technical Information: info@bruker.com.sg Japan Phone Orders: Purchase Order by Fax: Purchase Order by Probeshop-J@bruker-axs.jp Technical Information: Probeinfo-J@bruker-axs.jp 198 International