Functional Ceramics for Electronics and Energy Technology
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1 Functional Ceramics for Electronics and Energy Technology Prof. Dr. Aleander Michaelis IKTS in Dresden employees ca. 160 usable space: ca m 2 clean rooms ca. 350 m 2 FhG Group: Materials and Components 12 Institutes plus 1 Gastinstitut > 180 Mio turnover in 2004 > 1500 empoyees
2 outline: Passive Components Active devices / DRAM Chips Polytronic Adaptronic Carbon Nanotubes Multilayer Ceramics / LTCC Energy systems / SOFC
3 Structural / Engineering Ceramics Environmental Technolo Characterization Functional Ceramics
4 Strukturgröße Passives CMOS PCB / LTCC hetero system integration Kompleität more Moore more than Moore beyond Silicon mikro nano Slide 4
5 Ta-capacitor cross-section Cathode Termination (-) Polarity Stripe (+) Epoy Case Tantalum Capacitor Element Anode Weld Positive Termination Engineered Material Solutions Slide 5
6 NbO-capacitors NbO Nb 2 O 5 MnO 2 nuclei Slide 6
7 Conducting polymers as cathode material: boosting performance of electrolytic capacitors low ESR no ignition better impregnation O S O 3,4-Ethylenedioythiophene EDT or EDOT Baytr onschi cht Baytro n layer Conductivity (S/cm) Conducting Polymer 100 PEDT MnO 2 Liquid Electr olyte Slide 7
8 Application of conducting polymers Anti-static Coatings Organic Light Emitting Diodes (OLED) Future: Organic Transistors Conducting Polymers Printed Circuit Boards Future: Electrochromic Windows Electrode Material in Solid Electrolyte Capacitors Slide 8
9 - a + a+ a Insulato Source Baytron P Drain: Baytron P Semiconduct Carrier Gate: Baytron P emissive layer ITO metal cathode substrate PEDT/PSS Slide 9
10 Polymer Semiconductors Smart price tags (low cost electronics) Tag transmitts price information to register Why polymer electronics? Low cost materials Low cost production technologies (e.g. spin coating) But: polymer electronics features slow access times High performance electronics will still be based on Si Slide 10 Rakel Wet film (60 µm) Baytron P solution Glass or transparent Polymer
11 passive + active devices Slide 11
12 DRAM IC`s Slide 12
13 Slide 13
14 Slide 14
15 Slide 15
16 Slide 16
17 Without CMP With CMP Resist PVD Al planarisiert Schutzschicht Oid Al Al planarisiert W-Kontakt CMP Isolation p-zone p-zone ILD STI N-dotiert Slide 17
18 Nano-Corundum for high-performance CMP-slurry Cum. Volume (%) Relative Intensity o o o (Degree) o o -Al2O3 -Al 2O3 Nano Al 2 O 3 from IKTS: phases depending on annealing temperature NA-A NA-B NA-C 900 C 850 C 800 C 700 C 600 C 400 C Diff. Volume (%) Nano corundum ( -Al 2 O 3 ); d 50 ~ 50 nm Benefits from use of new nano Al 2 O 3 in CMP improved performance due to isometric shape of particles outstanding high hardness of -Al 2 O 3 ) increased CMP polishing rate at ecellent surface quality nano-powders provided with adjustable particle size and narrow size distribution Copper polish rate (nm/min) H 2O 0,005 M Fe( NO 3)3 5% H 2O2+1% Glycine -Al2O Particle Diameter (nm) Particle size distributions after redispersion Particle bulk density (g/cm³) Slide 18 CMP Performance of Al 2 O 3 slurries*
19 Down Force Carrier Insert Wafer (structured) Carrier Slurry Pad Platen Slide 19
20 Adaptronics X-by wire Drive shaft Slide 20
21 Low Temperature Cofired Ceramics (LTCC) LTCC-Applications: Multilayer Circuits / MEMS / Reactors LTCC-Circuits (Source: MSE) Material Variety - Low, low loss, high magnetic - Conductor Materials: Nobel Metals 2527 mm 2 - Si-Matched TCE Technological Advantages - High Level Integration (e.g. Integrated Components) - Brazing, Bonding, SMT, All Die-Attach-Technologies - Cost Effective LTCC-Tapes unfired (Source: Fh-IKTS) Slide 21
22 Low Temperature Cofired Ceramics (LTCC) LTCC-Assembly: Chip Assembly Outer Conductors, Resistors Inner Conductors Buried Resistors, Capacitors, Coils Vias Source: Murata Slide 22
23 Low Temperature Cofired Ceramics (LTCC) LTCC-Processing (2): Green Processing Slide 23
24 LTCC Applications (Fh-IKTS) µ PEMFC (Proton-Echange-Membrane- Fuel-Cell) - Combines miniaturized electronics and energy source - 2-Cell-Assembly - DCDC-Converter 5 VDC - Fh-IKTS: LTCC Catalyst Paste Slide 24
25 Fuel Cell: SOFC from materials to systems Material Suppliers System Manufacturers Cell Stack System IKTS / Webasto / H.C. Starck Slide 25
26 SOFC-Roadmap 5 kw Prototype for testing System CHP kw Slide 26
27 SOFC (solid oide fuel cell) Stack IKTS / Webasto / H.C. Starck Slide 27
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