3D Miniaturization of optical polarimetric principle used for subcutaneous glucose monitoring

Transcription

1 3D Miniaturization of optical polarimetric principle used for subcutaneous glucose monitoring A. Steinke, H.-J. Freitag, M. Schädel, A. T. Winzer, O. Brodersen, J. Freitag, H.Wünscher

2 Content 0. CiS at a glance 1. Lessons learnt from the MORES -product driven technology platform - see EPoSS annual forum 2013/Cork too - 2. Polarimetric based glucose sensor system - Motivation/Challenges/Consequences 3. Micro system solution - System/building blocks/manufacturing 4. Results 5. Outlook and summary 6. Acknowledgment MORES - Microoptical Remission Sensor 2

3 Content 0. CiS at a glance 1. Lessons learnt from the MORES -product driven technology platform - see EPoSS annual forum 2013/Cork too - 2. Polarimetric based glucose sensor system - Motivation/Challenges/Consequences 3. Micro system solution - System/building blocks/manufacturing 4. Results 5. Outlook and summary 6. Acknowledgment MORES - Microoptical Remission Sensor 3

4 0 CiS at a glance - CiS practical experiences - Sensor components for lessons learnt *integrated optical encoder sensor *integrated dew point sensor *radiation detector *reflective pulse oximeter *pressure sensor *roughness sensor *optical hybrid encoder sensor *optoelectronical po 2 -sensor *optoelectronical NH 3 - sensor *particle sensor 4

5 0 CiS at a glance Business Unit amos: MORES Technology platform Particle Sensors Measurement of particle concentration in fluidics Customer specific solutions Simulation and design Levelling Sensors Levelling for balances +/- 10 accuracy for levelling Customer specific solution Life Science Sensors Monitoring of cardiovascular parameters Customer specific solutions Simulation and design Fluorescence Sensors Biological and chemical sensors Measurement in micro fluidic systems Customer specific solution 5

6 0 CiS at a glance Business Unit MEMS: piezoresistive & impedimetric platform Piezoresistive Sensors High stability pressure sensors Customer specific solutions Simulation and design Impedimetric Sensors Micro condensation / Dew point sensors sensitive layer based sensors in-line micro fluidic sensors Micro mechanical Components / Modules Cantilever, probe tips, force sensors Bi-stable zero power sensors 6

7 0 CiS at a glance Business Unit: Silicon Detectors Silicon-Photodiodes planar photodiodes and photodiode arrays: custom specific geometry / layout and housing Silicon-Photomultiplier Avalanche Photodiodes, Geiger-Mode-APD On-chip Filter Additional Services Multi-Project-Wafer Services Device and defect analysis Under-Bump-Metallization, coating & plating, Through-Silicon Vias Radiation and Particle Detection large area Micro-strip detector chips Pixel detector chips Thin detectors detection of high energy and cosmic radiation detection of low light flux and scintillator pulses detection of alpha, beta and gamma radiation X-ray detection instrumentation for high-energy and space astrophysics, nuclear medicine, nuclear safety, security, environment, material science 7

8 1 Lessons learnt from the MORES product driven technology platform Open for interfaces Filter Detection Transducer Signalpreprocessing Open for components Spray coating Technology platform of hybrid integration Chip-in-Chip Solgel layer Si- wafer Sensitive layer Lowered Bond pads 2D/3D- array FlipChip LED/VCSEL TSV UBM MCM Open for diversifaction Source: A.Steinke, A.Albrecht, O.Brodersen, Th.Ortlepp; MORES - an example of a product driven technology platform a key for SMEs featuring microsystem innovation, EPoSS Annual Forum 2013, Cork, Ireland, 26th September Turin, Italy, 25th September 2014

9 1 Lessons learnt from the MORES - product driven technology platform Product level Levelling Pressure RIfS Encoder Particle 2D 3D po 2 pnh 3 multimodal Fluorescence Interference Colorimetric Pulseoximetry Roughness Sensor principle level Reflection pco 2 Remission Transducer level Source: A.Steinke, A.Albrecht, O.Brodersen, Th.Ortlepp; MORES - an example of a product driven technology platform a key for SMEs featuring microsystem innovation, EPoSS Annual Forum 2013, Cork, Ireland, 26th September

10 1 Lessons learnt from the MORES - product driven technology platform Levelling sensors Levelling for balances +/- 10 accuracy for levelling Particle sensors Measurement of particle concentration in fluidics Oxygen sensors Fluorescence based sensors Measurement in micro fluidic systems Life science sensors Monitoring of cardiovascular parameters Linear encoder High interpolation Compensation of misalignment Source: A.Steinke, A.Albrecht, O.Brodersen, Th.Ortlepp; MORES - an example of a product driven technology platform a key for SMEs featuring microsystem innovation, EPoSS Annual Forum 2013, Cork, Ireland, 26th September

11 Content 0. CiS at a glance 1. Lessons learnt from the MORES -product driven technology platform - see EPoSS annual forum 2013/Cork too - 2. Polarimetric based glucose sensor system - Motivation/Challenges/Consequences 3. Micro system solution - System/building blocks/manufacturing 4. Results 5. Outlook and summary 6. Acknowledgment MORES - Microoptical Remission Sensor 11

12 2 Polarimetric based glucose monitoring Motivation: subcutaneous fluid (glucose) monitoring First: Germany: approx. 8 million diabetics Worldwide: approx. 350 million Diabetes has reached epidemic proportions Secondly: ( secondary damages and increased mortality of ICU patients In Germany approx. 1,3 million ICU patients p.a. ICU Thirdly: Increasing importance of human relevant closed-loop Exact control of blood glucose levels significantly increases the survival probability after a heart attack and strokes, heart attacks, amputations and many thousands of dialysis treatments Require multifunctional perception and multitude sensor signals for predictive reaction 12 12

13 2 Polarimetric based glucose monitoring Point of origin Optical rotation by optical active materials like glucose (source: K.Zirk; Refraktometrische Analyse der Glukose in Körperflüssigkeiten; Südwestdeutscher Verlag für Hochschulschriften,2010) Advantages Glucose-specific and physical measurement principle Absolute measurements (emergency medicine) Self-diagnosis Challenges Very small measuring effect ( α ca. 0, mg/dl) The costs for the technological solutions must be drastically reduced Necessary miniaturisation vs. of signal modulation, cost, accuracy Implementation into mass production is necessary Biocompatible stability of interface sensor (filter)-human Cross-sensitivity (mechanical, chemical, optical, ) 13

14 2 Polarimetric based glucose monitoring light source optics interaction light - sample optics detector Polarized light Angle turning a ~ c Beam splitting 45 (45+a) Light source & optics Cannula with membrane Opto electronical detector & signal preprocessing 14

15 2 Polarimetric based glucose monitoring light source optics interaction light - sample optics detector Optical activity Diode signals best S/Nratio Diode 1 normal level Diode 2 Polarized light Angle turning a ~ c Beam splitting Determination of glucose concentration: a c = const. ArcTan I I

16 2 Polarimetric based glucose monitoring Consequences of advantages and challenges in summary: Miniaturization Decreased size Sensitivity Non-recurring Engineering costs Smart System Integration Decreased manufacturing cost Signal modulation Reliability Stability 16

17 2 Polarimetric based glucose monitoring To bring all these needs under one roof Hybrid integration M-t-M Miniaturization Decreased size Sensitivity Selectivity Manufacturing Multisensoric M-M Technology Platform/ Building blocks Non-recurring Engineering costs Smart System Integration Decreased manufacturing cost Most of it batch process compatible Optoelectronic Microelectronic Signal modulation Reliability Stability Nanocomposite material Biocompatibility Integration of knowledge from different disciplines necessary 17

18 2 Polarimetric based glucose monitoring Particle Encoder po 2 pnh 3 2D RIfS 3D pco 2 Reflection Remission multimodal Fluorescence Interference Colorimetric Pulseoximetry Roughness Levelling Pressure Polarimetric 18

19 Content 0. CiS at a glance 1. Lessons learnt from the MORES -product driven technology platform - see EPoSS annual forum 2013/Cork too - 2. Polarimetric based glucose sensor system - Motivation/Challenges/Consequences 3. Micro system solution - System/building blocks/manufacturing 4. Results 5. Outlook and summary 6. Acknowledgment MORES - Microoptical Remission Sensor 19

20 3 Micro system solution 45 (45+α) Illumination components Filter Detection components Receiver components Building blocks 10mm 20

21 3 Micro system solution Building block: Cannula blanks Principle Microporous structure 50µm pores Separation of dispersive components (macromolecules, cells, ) by a membrane with gradient porosity (> 20 nm) Nanoporous structure through solgel coating (10nm pores) Biocompatibility: bioinert Manufacturing Arrangement in rows and columns (stack arrangement) The generative manufacturing process Selective Laser Melting (SLM) lends itself to cost-effective large-scale production Up to capillaries made from titanium can be manufactured at a time 21 21

22 3 Micro system solution Building block: Detection system Principle Detection of chiral molecules in complex or biological liquid medium (blood, waste water ) containing different small and larger molecules Chiral molecule Membrane D-glucose µ-hbs µ-hbs α Detector unit Angle turning α ~ c (45+α) Manufacturing Production of the highly complex steri-chamber applying the generative manufacturing process Selective Laser Scanning (SLA) Up to capillaries made from polyamide can be manufactured in one batch 22

23 3 Micro system solution Building block: illumination component Principle Optical design Technical features Beam diameter below to 30 mm Polarization ratio 1:10 5 Size: 0.6 x 0.7 x 1.4 mm 3 30 mm distance 45 Manufacturing Innovative technologies Polymer On Glass (POG) Bonding with reactive multilayers (RML) Metal to optics adjustment 8 inch wafer with over optic systems 23

24 3 Micro system solution Building block: Receiver component Principle µ-beam divider with high-performance photodiodes (45+α) c = const. ArcTan I I 1 2 Manufacturing Semi-finished beam splitter material Innovative technologies for batch processing polarizing beam splitters & batch assembly 24

25 Content 0. CiS at a glance 1. Lessons learnt from the MORES -product driven technology platform - see EPoSS annual forum 2013/Cork too - 2. Polarimetric based glucose sensor system - Motivation/Challenges/Consequences 3. Micro system solution - System/building blocks/manufacturing 4. Results 5. Outlook and summary 6. Acknowledgment MORES - Microoptical Remission Sensor 25

26 4 Results Calibration - Test 26

27 4 Results Calibration - Test Calibration Test Procedure: Sensor placed in sterilizisation chamber (chamber 1) Chamber 1 filled with water Chamber 2 filled with 0,2percentage glucose solution (volume chamber 1 = volume chamber 2) 27

28 Content 0. CiS at a glance 1. Lessons learnt from the MORES -product driven technology platform - see EPoSS annual forum 2013/Cork too - 2. Polarimetric based glucose sensor system - Motivation/Challenges/Consequences 3. Micro system solution - System/building blocks/manufacturing 4. Results 5. Outlook and summary 6. Acknowledgment MORES - Microoptical Remission Sensor 28

29 5 Summary and outlook First hopeful further application tests with building block Miniaturized optical film thickness monitor SiN 200 nm SiO nm Si -Wafer Miniaturized refractometer Measurement of concentration in pure medium e.g. 12 mm Sample liquid H 2 O 25% ethanol Angle of incidence Laser illumination Polarization sensitve detector Refractive index 29

30 5 Summary and outlook The results presented underline the strategy that an open (technological,commercial and international) platform has a high leverage for SMEs`strength With an open technology platform consisting of basic technology and building blocks the consideration of M-M and M-t-M technologies is possible and necessary With the new building blocks under development, the application field of polarimetry is in the focus of product innovation for SMEs and customers requiring medium and large quantities Let`s talk about it! 30

31 6 Acknowledgment We expressly acknowledge the efforts of the German states and the federal government within the framework of the Hightech Initiative Germany, the support programme Innovation Competence East as well as the efforts of the European Union. Selected research results was funded by the Federal Ministry of Research and Education FKZ 16SV3596 and by the Federal Ministry for Economic Affairs and Energy FKZ MF130023, MF The authors gratefully acknowledge the national and international partners from science and industry for sustainable collaboration. Ingenieurbüro Böge 31

32 Thank you very much for your attention 32