CapaciTorr D 50, D 100, D 200

Transcription

1 CapaciTorr D 5, D, D Geeral Features High pumpig speed for all active gases High sorptio capacity ad icreased lifetime Costat pumpig speed i HV, UHV ad XHV Reversible pumpig of hydroge ad its isotopes Possibility of operatio at room temperature after activatio, without power Operatio i the presece of high magetic fields Oil free ad vibratio free i ultra high vacuum The CapaciTorr D 5, D ad D are three miiature pumps that complemet the CapaciTorr family lie providig large performace i a extremely compact volume. I spite of their miimal chamber itrusio (less tha, ad 3 cc respectively) ad small weight (~3 g) they feature impressive pumpig speed for H ad the other active gases preset i UHV or XHV systems like H O, O, CO, CO ad N. This result is achieved through the adoptio of a ovel special pump desig ad the use of the high performace SAES St 7 sitered porous getter disks. All pumps come o a stadard CF 35 flage ad have a built i heater that directly coects to the flage power feed through (bakeable up to C). A suitable coector provides a easy ad fast coectio to the pump power supply for the activatio purposes. Oly miimal power cosumptio (3, 5 ad 6 W for ~ hour, respectively) is required durig the activatio. No power is ecessary durig ormal UHV XHV operatio at room temperature. Like other NEG (No Evaporable Getter) pumps they are vibratio free ad ca operate i presece of high magetic fields. These pumps are therefore the perfect choice i applicatios where space ad weight costraits, absece of vibratio ad miimal electromagetic iterferece must be coupled to excellet pumpig performaces ad UHV XHV stadards. Low weight Applicatios Improvig ultimate vacuum i combiatio with io, diffusio, cryogeetic or turbomolecular pumps Surface aalysis systems Particle accelerators, sychrotro radiatio sources ad related equipmet Process pumps for vacuum devices ad depositio chambers Portable vacuum istrumetatio Pumpig, storig ad releasig hydroge isotopes Impurities removal i rare gas filled devices makig iovatio happe, together Dimesios i mm CapaciTorr D 5 Pump CapaciTorr D 5 5H66 CapaciTorr D Pump CapaciTorr D 5H63 CapaciTorr D Pump CapaciTorr D 5H68 Power Supply ad Cables D 5 Power Supply CapaciTorr CF 35 D 5 Power Supply 3B38 D Power Supply CapaciTorr CF 35 D Power Supply 3B385 D Power Supply CapaciTorr CF 35 D Power Supply 3B Output Cable Cable supply output CF35 D5/D/D 3MT 3B386 Iput Cable Cable Mais iput CF35 3MT 3B338

2 8 6, CapaciTorr D5, D ad D sorptio test (accordig to ASTM F798-97) Sorptio Temperature: 5 C 7.5 V - 3W (D5) 9 V - 5 W (D) V - 6W (D) Sorptio pressure: 3E-6 Torr,,,, Sorbed Quatity (Torr l ) CapaciTorr D5 CapaciTorr D CapaciTorr D CapaciTorr D5 CapaciTorr D CapaciTorr D Heatig parameters CO H CapaciTorr D 5, D, D The SAES Group maufacturig compaies are ISO9 certified ad the Italia compaies are also ISO certified. Full iformatio about our certificatios for each compay of the Group are available o our website at: D.VS Temperature ( C) Note:The voltage ad curret vs temperature data, displayed i the graph, have bee achieved i ude cofiguratio (NEG Cartridge completely immersed i the chamber). Typical Pump Characteristics CapaciTorr D 5 CapaciTorr D CapaciTorr D Alloy Type St 7 St 7 St 7 Alloy Compositio ZrVFe ZrVFe ZrVFe Getter Mass (g) Getter Surface (cm ) Sorptio Capacity (Torr ll) H 55 CO 3 6 H CO at 5 C...56 CO total 7 5 Note: Pumpig speed data refer to the iitial values of the pump. CO capacity based o speed below 8 l/s (D 5) ad l/s (D ad D ) i ude cofiguratio. SAES Group. Prited i Italy. All rights reserved. SAES ad CapaciTorr are registered trademarks of SAES Group. SAES Group reserves the right to chage or modify product specificatios at ay timewithout otice. SAES Group eg_techology@saes.com

3 CapaciTorr D Geeral Features High pumpig speed for all active gases High sorptio capacity ad icreased lifetime Costat pumpig speed i HV, UHV ad XHV Reversible pumpig of hydroge ad its isotopes Possibility of operatio at room temperature after activatio, without power Operatio i the presece of high magetic fields Oil free ad vibratio free i ultra high vacuum Low weight The CapaciTorr D pump uses the high performig St 7 (Zr V Fe) material i the form of disks to achieve high pumpig performaces i a very compact cofiguratio. It is ideal whe maximum pumpig speed is eeded i a small package. The getter cartridge has a built i heater that directly coects to the flage power feedthrough. A bakeable coector provides a easy ad fast coectio to the pump power supply for activatio purposes. The CapaciTorr D pump offers its best performaces whe mouted directly i the vacuum system usig the stadard CF 35 flage. Alteratively the pump ca be mouted as a appedage usig a custom made pump body. The pumpig speed curves related to differet moutig positios ad the activatio curves are show i the followig page. Applicatios Improvig ultimate vacuum i combiatio with io, diffusio, cryogeetic or turbomolecular pumps Surface aalysis systems Particle accelerators, sychrotro radiatio sources ad related equipmet Process pumps for vacuum devices ad depositio chambers Portable vacuum istrumetatio Pumpig, storig ad releasig hydroge isotopes Impurities removal i rare gas filled devices makig iovatio happe, together Dimesios i mm Base flage with Coector CapaciTorr CF 35 H Base flage with Coector ad Body CapaciTorr CF 35 J H3 St 7 Cartridge with built i Heater C DSK H9 Pump Body Body CapaciTorr CF 35 H Power supply ad cables Pump Power Supply CapaciTorr CF 35 D /B Power Supply 3B389 Iput Cable Cable Mais Iput CF 35 3Mt 3B338 Output Cable Cable Supply Output CF35 D /B 3Mt 3B39

4 CapaciTorr D sorptio test (accordig to ASTM F798 97) CapaciTorr D 8 Sorptio Temperature: 5 C 5.75 V (85 W) Sorptio pressure: 3E 6 Torr,,, N Heatig parameters CO Sorbed Quatity (Torr l ) ude with body H 6 The SAES Group maufacturig compaies are ISO9 certified ad the Italia compaies are also ISO certified. Full iformatio about our certificatios for each compay of the Group are available o our website at: D.VS Temperature ( C) Note: The voltage ad curret vs temperature data, displayed i the graph, have bee achieved i ude cofiguratio (NEG Cartridge completely immersed i the chamber). Typical Pump Characteristics CapaciTorr D Alloy Type St 7 Alloy Compositio ZrVFe Getter Mass (g) 5 Getter Surface (cm ) 38 H CO 8 H 9 Sorptio Capacity (Torr ll) CO at 5 C.9 CO total Note: Pumpig speed data refer to the iitial values of the pump without the pump body. CO capacity based o speed below l/s i ude cofiguratio. SAES Group. Prited i Italy. All rights reserved. SAES ad CapaciTorr are registered trademarks of SAES Group. SAES Group reserves the right to chage or modify product specificatios at ay timewithout otice. SAES Group eg_techology@saes.com

5 CapaciTorr D Geeral Features High pumpig speed for all active gases High sorptio capacity ad icreased lifetime Costat pumpig speed i HV, UHV ad XHV Reversible pumpig of hydroge ad its isotopes The CapaciTorr D pump uses highly porous St 7 sitered getter disks (Zr V Fe alloy). The pump is able to reach l/s pumpig speed for hydroge i UHV coditios. The St 7 getter cartridge is mouted o a heater structure usig a sigle heater elemet, ad it is available o CF63 ad CF flages. The flages (AISI 36 LN) are coveietly supplied with a custom made bakeable electrical coector which combies power ad thermocouple pis, for best itegratio ad miimum footprit. St 7 material offers superior gas diffusivity characteristics ad allows operatio at room or itermediate temperatures ( C) to icrease the sorptio capacity i presece of high gas loads. The pump sorptio speed is at its maximum whe the pump is mouted directly i the vacuum system without a body. The pumpig speed curves related to differet moutig positios ad the activatio curves are show i the eclosed graphs. Possibility of operatio at room temperature after activatio, without power Operatio i the presece of high magetic fields Oil free ad vibratio free i ultra high vacuum Low weight Applicatios Improvig ultimate vacuum i combiatio with io, diffusio, cryogeetic or turbomolecular pumps Surface aalysis systems Particle accelerators, sychrotro radiatio sources ad related equipmet Process pumps for vacuum devices ad depositio chambers Portable vacuum istrumetatio Pumpig, storig ad releasig hydroge isotopes Impurities removal i rare gas filled devices makig iovatio happe, together Dimesios i mm St 7 Cartridge with built i Heater CapaciTorr D H68 CF63 base flage with Coector CapaciTorr base flage CF63 H67 CF base flage with Coector CapaciTorr base flage CF H69 Pump Body CF63 Body CF63 H Pump Body CF Body CF H

6 CapaciTorr D sorptio test (accordig to ASTM F798 97) CapaciTorr D H Sorptio Temperature: 5 C 5 V ( W) Sorptio pressure: 3E 6 Torr,,, N Sorbed Quatity (Torr l ) Heatig parameters Temperature ( C) CO 5,5 3,5 3,5,5,5 The SAES Group maufacturig compaies are ISO9 certified ad the Italia compaies are also ISO certified. Full iformatio about our certificatios for each compay of the Group are available o our website at: D.VS..3.5 Note:The voltage ad curret vs temperature data, displayed i the graph, have bee achieved i ude cofiguratio (NEG Cartridge completely immersed i the chamber). Typical Pump Characteristics CapaciTorr D Alloy Type St 7 Alloy Compositio ZrVFe Getter Mass (g) 36 Getter Surface (cm ) H CO 6 H 36 Sorptio Capacity (Torr ll) CO at 5 C CO total Note: Pumpig speed data refer to the iitial values of the pump without the pump body. CO capacity based o speed below 3 l/s i ude cofiguratio. Power supply ad cables Pump Power Supply NEG POWER C* 3B5 Output Cable Cable supply output with K TC/3Mt V. HT** 3B * Other NEG POWER models which ca simultaeously activate up to four pumps are available ** Other cables leghts are available o request SAES Group. Prited i Italy. All rights reserved. SAES ad CapaciTorr are registered trademarks of SAES Group. SAES Group reserves the right to chage or modify product specificatios at ay timewithout otice. SAES Group eg_techology@saes.com

7 CapaciTorr D Geeral Features High pumpig speed for all active gases High sorptio capacity ad icreased lifetime Costat pumpig speed i HV, UHV ad XHV Reversible pumpig of hydroge ad its isotopes Possibility of operatio at room temperature after activatio, without power The CapaciTorr D MK5 pump is the highest performig pump of the CapaciTorr series. With the use of a special highly porous sitered Zr V Fe getter material, St 7, the pump is able to reach l/s pumpig speed for hydroge i UHV coditios. The St 7 getter cartridge is mouted o a heater structure usig a sigle heater elemet, ad it is available o CF ad CF5 flages. The flages (AISI 36 LN) are coveietly supplied with a custom made bakeable electrical coector which combies power ad thermocouple pis, for best itegratio ad miimum footprit. St 7 material offers superior gas diffusivity characteristics ad allows operatio at room or itermediate temperatures ( C) to icrease the sorptio capacity i presece of high gas loads. The pump sorptio speed is at its maximum whe the pump is mouted directly i the vacuum system without a body. The pumpig speed curves related to differet moutig positios ad the activatio curves are show i the eclosed graphs. Operatio i the presece of high magetic fields Oil free ad vibratio free i ultra high vacuum Low weight Applicatios Improvig ultimate vacuum i combiatio with io, diffusio, cryogeetic or turbomolecular pumps Surface aalysis systems Particle accelerators, sychrotro radiatio sources ad related equipmet Process pumps for vacuum devices ad depositio chambers Portable vacuum istrumetatio Pumpig, storig ad releasig hydroge isotopes Impurities removal i rare gas filled devices Dimesios i mm Base flage with Coector ad Heater CapaciTorr CF MK5 H39 Base flage with Coector ad Heater CapaciTorr CF5 MK5 H38 Base flage with Coector, Heater ad Body CapaciTorr CF MK5 J H Base flage with Coector, Heater ad Body CapaciTorr CF5 MK5 J H St 7 Getter Cartridge C DSK H8 makig iovatio happe, together

8 CapaciTorr D sorptio test (accordig to ASTM F798 97) CapaciTorr D Sorptio Temperature: 5 C V (95 W) Sorptio pressure: 3E 6 Torr,,, 8 6 Sorbed Quatity (Torr l ) ude CF body Heatig parameters Temperature ( C) N H CO The SAES Group maufacturig compaies are ISO9 certified ad the Italia compaies are also ISO certified. Full iformatio about our certificatios for each compay of the Group are available o our website at: D.VS Note:The voltage ad curret vs temperature data, displayed i the graph, have bee achieved i ude cofiguratio (NEG Cartridge completely immersed i the chamber). Typical Pump Characteristics CapaciTorr D Alloy Type St 7 Alloy Compositio ZrVFe Getter Mass (g) 5 Getter Surface (cm ) 9 H CO H 5 Sorptio Capacity (Torr ll) CO at 5 C 5 CO total Note: Pumpig speed data refer to the iitial values of the pump without the pump body. CO capacity based o speed below 5 l/s i ude cofiguratio. Power supply ad cables Pump Power Supply NEG POWER C* 3B5 Output Cable 3Mt leght Cable supply output V. 5 3Mt** 3B337 * Other NEG POWER models which ca simultaeously activate up to four pumps are available ** Other cables leghts are available o request SAES Group. Prited i Italy. All rights reserved. SAES ad CapaciTorr are registered trademarks of SAES Group. SAES Group reserves the right to chage or modify product specificatios at ay timewithout otice. SAES Group eg_techology@saes.com

9 CapaciTorr D 35 Geeral Features High pumpig speed for all active gases High sorptio capacity ad icreased lifetime Costat pumpig speed i HV, UHV ad XHV Reversible pumpig of hydroge ad its isotopes Possibility of operatio at room temperature after activatio, without power The CapaciTorr D 35 pump is the highest performig pump of the CapaciTorr series. With the use of a special highly porous sitered Zr V Fe getter material, St 7, the pump is able to reach 36 l/s pumpig speed for hydroge i UHV coditios. The St 7 getter cartridge is mouted o a heater structure usig a sigle heater elemet, ad it comes o CF5 or CF flages. The flages (AISI 36 LN) are coveietly supplied with a custom made bakeable electrical coector which combies power ad thermocouple pis, for best itegratio ad miimum footprit. St 7 material offers superior gas diffusivity characteristics ad allows operatio at room or itermediate temperatures ( C) to icrease the sorptio capacity i presece of high gas loads. The pump sorptio speed is at its maximum whe the pump is mouted directly i the vacuum system without a body. The pumpig speed curves related to differet moutig positios are show i the attached graph. Operatio i the presece of high magetic fields Oil free ad vibratio free i ultra high vacuum Low weight Applicatios Improvig ultimate vacuum i combiatio with io, diffusio, cryogeetic or turbomolecular pumps Surface aalysis systems Particle accelerators, sychrotro radiatio sources ad related equipmet Process pumps for vacuum devices ad depositio chambers Portable vacuum istrumetatio Pumpig, storig ad releasig hydroge isotopes Impurities removal i rare gas filled devices makig iovatio happe, together Dimesios i mm Base flage with Coector ad Heater CapaciTorr Base Flage CF5 H8 Base flage with Coector ad Heater CapaciTorr Base Flage CF H8 Pump body CF5/CF Special body CF5/CF H33 Pump body CF/CF5 Special body CF/CF5 H3 St 7 Getter Cartridge CapaciTorr D35 H8

10 CapaciTorr D35 sorptio test (accordig to ASTM F798 97) CapaciTorr D 35,,, Sorptio Temperature: 5 C 9,V(365 W) Sorptio pressure: 3E 6 Torr Sorbed Quatity (Torr l ) ude cofiguratio with body 5mm (CF/CF5) Heatig parameters N CO H H O O 6 The SAES Group maufacturig compaies are ISO9 certified ad the Italia compaies are also ISO certified. Full iformatio about our certificatios for each compay of the Group are available o our website at: 5 D.VS Temperature ( C) Typical Pump Characteristics CapaciTorr D 35 Alloy Type St 7 Alloy Compositio ZrVFe Getter Mass (g) 395 Getter Surface (cm ) 96 H 36 H O 7 CO 8 N Sorptio Capacity (Torr ll) H 395 CO at 5 C CO total 3 Note: Pumpig speed data refer to the iitial values for the pump without i ude cofiguratio. CO capacity based o a miimum sorptio speed of l/s i ude cofiguratio. Power supply ad cables Pump Power Supply NEG POWER C* 3B5 Output Cable 3Mt leght Cable supply output V. 5 3Mt** 3B337 * Other NEG POWER models which ca simultaeously activate up to four pumps are available ** Other cables leghts are available o request SAES Group. Prited i Italy. All rights reserved. SAES ad CapaciTorr are registered trademarks of SAES Group. SAES Group reserves the right to chage or modify product specificatios at ay timewithout otice. SAES Group eg_techology@saes.com

11 CapaciTorr CF35 Power Supplies Lie Voltage Supply voltage: V AC Frequecy: 5 6 Hz Mais cord coector: IEC Type 6A 5V Over voltage class: Cat II Lie Protectio Required Supply protectio: 6 A Fuse or Circuit Breaker Differetial switch: 3 ma Isolatio type: Class I Output Output voltage V DC : ( ) V Output power : (. 6.) A Istrumet Protectio Iteral lie fuse: (. 3.5) A T Overload protectio: Electroic cotrol High Temp. Protectio: Electroic cotrol Dimesios Power Supplies for CapaciTorr D, D, D ad D 5 The CapaciTorr CF35 Power Supplies are electroic uits specifically desiged for cotrollig the activatio process of the CapaciTorr D, CapaciTorr D, CapaciTorr D ad CapaciTorr D 5 getter pumps. The istrumets receive lie voltage ( V AC, 5 6 Hz), covert it to DC voltage of ( ) V DC ad supply the getter pumps by way of a microprocessor based electroic cotrol card. The istrumets are desiged to cotrol the getter pumps i three differet modes: Activatio Timed Activatio Coditioig. I the activatio mode, the istrumets supply the power ecessary to heat up the getter pump to the activatio temperature (~5 C). I this operatig mode, the CapaciTorr CF 35 power supplies deliver % of the available power. I the timed activatio mode, the istrumets supply the power ecessary to heat up the getter pump to the activatio temperature (~5 C) for oe hour. I this operatig mode, the CapaciTorr CF 35 power supplies deliver % of the available power. I the coditioig mode, the istrumets supply the power ecessary to heat up the getter pump to the coditioig temperature (~5 C C). I this operatig mode, the CapaciTorr CF 35 power supplies deliver 3% of the available power, usig a duty cycle cotrol. 7 x x 3 mm (HxWxD) Weight, kg makig iovatio happe, together Product descriptio Code CapaciTorr CF 35 D 5 Power Supply 3B38 CapaciTorr CF 35 D Power Supply 3B385 CapaciTorr CF 35 D Power Supply 3B CapaciTorr CF 35 D /B Power Supply 3B389 Cable supply output CF35 D5/D/D 3MT* 3B386 Cable supply output CF35 D/B 3MT* 3B39 Cable mais iput CF 35 3Mt 3B338 *Other cables leghts available o request

12 NEG POWER Multicotroller Iput: Maximum power: 3.5 kw Supply voltage: V AC Frequecy: 5 6 Hz Iput curret: x 8.5/9 A Noise at mt: < dba Mais cord coector: IEC Type 6A 5V Output at V Output power: 7 W+overload Output voltage: V DC Overload: % for oe miute Supply curret A (at 7V DC ) Mai features of NEG POWER Switchig power cotroller Simultaeous activatio/coditioig of up to NEG pumps Local cotrol by user friedly touch scree cotroller Remote cotrol by RS3 iterface with ASCII protocol Remote cotrol by RS85 iterface with Modbus protocol (RTU) Remote cotrol by stadard Etheret iterface Temperature moitorig ad regulatio Automatic power regulatio for differet pump cofiguratios Diagostic features (ope/short coectio, broke thermocouple, broke heatig filamet, overheatig cotrol, etc.) Uit switches ito stad by mode after a log time of o operatio makig iovatio happe, together eg_techology@saes.com D.VS Multicotroller for NEXTorr, CapaciTorr ad SORB AC pumps The NEG POWER is a electroic uit specifically desiged to cotrol the activatio process of NEXTorr, CapaciTorr ad SORB AC pumps with or without a thermocouple. The NEG POWER ca simultaeously activate up to four differet NEXTorr, CapaciTorr ad SORB AC pumps. It supplies Adjustable DC voltage up to V Curret up to A Power up to 7 W per chael LAN, RS3 or RS85 remote cotrol. The uit has a user friedly touch scree display to cotrol the pumps. It is also possible to cotrol the NEG POWER by the SAES remote cotrol software. The parameters of the GP SORB AC, CapaciTorr ad NEXTorr pump series are preset i the software, makig the activatio as simple as selectig the pump. The activatio process ca be easily customized by iputtig the electrical parameters ad the desired temperature. The summary table below lists the pump models whose parameters are preset i the NEG POWER software. Cotrolled pumps models NEXTorr CapaciTorr Sorb AC NEXTorr D 5 CapaciTorr D GP 5 NEXTorr D 5 CapaciTorr D GP NEXTorr D 3 5 CapaciTorr D GP NEXTorr D 5 5 CapaciTorr D GP 5 NEXTorr D CapaciTorr D NEXTorr D CapaciTorr D 35 The NEG POWER is a switchig cotroller. It ca also cotrol the CapaciTorr HV pumps. Product descriptio Code NEG POWER C* 3B5 NEG POWER C* 3B5 NEG POWER C3* 3B53 NEG POWER C 3B5 Cable supply output V. 5 3MT** 3B337 Cable supply output V. 3MT** 3B35 Cable supply output with K TC/3MT V. HT** 3B *It ca be upgraded to NEG POWER Models cotrollig more pumps. ** Other cables leghts are available o request The SAES Group maufacturig compaies are ISO9 certified, the Asia ad Italia compaies are also ISO certified. Full iformatio about our certificatios for each compay of the Group is available o our website at: SAES Group. Prited i Italy. All rights reserved. SAES ad CapaciTorr are registered trademarks of SAES Group. SAES Group reserves the right to chage or modify product specificatios at ay timewithout otice.