POLY-SILICON thin-film transistors (TFTs) have been

Transcription

1 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 52, NO. 8, AUGUST A New Poly-Si TG-TFT With Diminished Pseudosubthreshold Region: Theoretical Investigation and Analysis Ali A. Orouji, Member, IEEE, and M. Jagadesh Kumar, Senior Member, IEEE Abstract In this paper, we have proposed a new poly-si triplegate thin-film transistor (TG-TFT) where the front gate consists of two materials and three sections in order to reduce the OFF state leakage current without affecting the ON state voltage. We have used one and three grain-boundaries in the channel for analyzing the electrical characteristics of the poly-si TG-TFT. The key idea in this paper is to make the dominant conduction mechanism in the channel to be controlled by the accumulation charge density modulation by the gate and not by the gate-induced grain barrier lowering. As a result, we demonstrate that the TG-TFT exhibits a highly diminished pseudosubthreshold region resulting in a substantial OFF state leakage current without any significant change in the ON voltage when compared to a conventional poly-si TFT (C-TFT). Using two-dimensional and two-carrier device simulation, we have examined various design issues of the TG-TFT and provided the reasons for the improved performance. Index Terms Grain boundary, leakage current, polysilicon, pseudosubthreshold, thin-film transistor (TFT), traps, two-dimensional (2-D) simulation. I. INTRODUCTION POLY-SILICON thin-film transistors (TFTs) have been studied extensively in recent years for their application in flat panel active-matrix liquid crystal displays (AMLCD) [1], [2]. For these applications, scaled-down poly-si TFTs with high performance and high reliability are required [3]. One of the problems of poly-si TFTs is the large OFF-state leakage current due to the presence of the grain boundaries in the channel [4] resulting in poor switching characteristics. Various solutions such as the offset gate, the p-n-p gate, and the lightly doped drain (LDD) poly-si TFT structures have been proposed to reduce the OFF-state leakage currents [5] [8]. In keeping with the general trends of the CMOS technology, the channel lengths of the poly-si TFTs are now aggressively scaled down to submicrometer lengths [9], [10]. Also, by scaling the channel of the device down to a length comparable to the poly-si grain size, using modern metal-induced lateral crystallization or excimer laser annealed methods to control the grain growth, it is possible to create devices where only a single or small number of discrete grain boundaries exist in the channel of the poly-si TFT [11], [12]. This ability to control the grain Manuscript received January 14, 2005; revised May 16, The review of this paper was arranged by Editor C.-Y. Lu. A. A. Orouji is with Semnan University, Semnan, Iran. M. J. Kumar is with the Department of Electrical Engineering, Indian Institute of Technology, Delhi , India ( mamidala@ieee.org). Digital Object Identifier /TED Fig. 1. Typical transfer characteristic of a conventional poly-si TFT operated in linear region [18]. size to form the well-arranged grains in the channel has resulted in high performance polysilicon TFTs [13] [15] typically with one or fewer grain boundaries in the channel [11], [15]. However, the OFF-state leakage currents in these advanced poly-si TFTs are orders of magnitude larger than those observed in conventional single-crystal silicon-on-insulator (SOI) MOSFETs. The conventional SOI MOSFET exhibits a steep subthreshold slope and a clear turn-on region in its transfer characteristic. The dominant conduction mechanism is due to the inversion charge density modulated by the gate [16]. On the other hand, there are two regions in the transfer characteristic of a poly-si TFT as shown in Fig. 1. The region below threshold condition is called the subthreshold region and the region between and the turn-on condition is called the pseudosubthreshold region. Unlike in the case of SOI MOSFETs, in which the curve is very sharp and quickly becomes linear, in the case of poly-tfts, the transition from the exponential to the linear region is much more gradual [17], [18]. The dominant conduction mechanism below the turn-on region is due to the gate-induced grain barrier lowering (GIGBL) and is not controlled by the accumulation charge density modulation by the gate (ACMG) [17]. The challenge that we have addressed in this paper, therefore, is to examine if we can convert the dominant conduction mechanism in a poly-si TFT with fewer grain boundaries, from GIGBL to ACMG so that the pseudosubthreshold region is significantly diminished in the transfer characteristic. In this paper, therefore, we have considered only one and three grain boundaries in the channel of the poly-si TFT [11] [15]. If we succeed in realizing a diminished pseudosubthreshold region, the poly-si TFT should behave almost like the conventional single-crystal SOI MOSFET with a steep subthreshold slope resulting in a significant reduction in the OFF state leakage current /$ IEEE

2 1816 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 52, NO. 8, AUGUST 2005 Fig. 2. Cross-sectional view of the TG-TFT. Based on the above idea, the aim of this paper is therefore to propose for the first time, a new device structure called the triple gate poly-si TFT (TG-TFT) in which the front gate consists of two side gates on both sides of the main gate. The work function of the side gates is different from that of the main gate resulting in a modified channel potential. Using two-dimensional (2-D) simulation [19], we demonstrate that this leads to a highly diminished pseudosubthreshold region in the transfer characteristics of the TG-TFT resulting in a significantly reduced OFF state leakage current compared to the conventional poly-si TFT (C-TFT). The effects of varying the side gate parameters, trap density at the grain boundaries, number of grain boundaries in the channel and temperature of the device are investigated. Our results demonstrate that the proposed TG-TFT exhibits significantly reduced leakage current thus making it a more reliable device configuration than the C-TFT for high-performance poly-si TFT circuit applications. II. TG-TFT STRUCTURE A schematic cross-sectional view of the TG-TFT implemented in the 2-D device simulator MEDICI is shown in Fig. 2. The gate region consists of p -poly and n -poly for the side gates and the main gate, respectively. The channel of the device is undoped poly-si with a single grain boundary (GB) in the center. The regions on both sides of GB are assumed to be completely defect-free meaning all the defect states are localized in the GB. The capture and emission processes are handled by the simulator using Shockley Read Hall recombination model and a conventional drift-diffusion method is used to model the carrier transport. Also, we have employed the Caughey Thomas model [20] for the mobility based on the work of Kitahara et al. [21]. The doping in the n source/drain regions is kept at cm. The effective trapping density at the grain boundary is taken to be cm and the trap energy relative to the conduction and valence bands are 0.51 ev and 0.51 ev for electron and hole traps, respectively. The capture rate for electrons and holes are identical and equal to cm /sec [9]. It is assumed that the trap density of the acceptor-like states and donor-like states are identical. The donor-like state is defined as a trap state that is positively charged when holes are captured and the acceptor-like state is negatively charged when electrons are captured. The width of the GB (i.e., distance between the two grains) is 10 nm [22]. The silicon thin film and the gate oxide thicknesses are 50 and 10 nm, respectively. The main gate and the side gate lengths ( and ) are identical and the channel Fig. 3. Conduction band potential distribution for (a) C-TFT (V =0V), (b) TG-TFT (V =0V), and (c) TG-TFT (V =0:52 V) with V =0V. length is kept constant at 0.4 m in our simulations. The work functions of the p -poly and the n -poly gates are chosen as 5.25 and 4.17 ev, respectively. All the device parameters of the TG-TFT are equivalent to those of the C-TFT unless mentioned. A similar simulation approach has been used by Walker et al. [9] to prove the validity of their model. The polarity between source and drain in poly-si TFTs in AMLCD applications is required to be altered to reduce the dc stress of liquid crystals [23]. Therefore, for such applications it is advantageous to have a symmetrical poly-si TFT structure by having identical side gates on both sides of the main gate as suggested in the proposed TG-TFT. III. SIMULATION RESULTS AND DISCUSSION A. Modifying Channel Potential Distribution The key idea behind the TG-TFT operation is to modify the channel potential so that the channel conduction is controlled by the accumulation charge density modulation by the gate (ACMG) and not by GIGBL. A typical MEDICI simulated 2-D conduction band potential distribution for TG-TFT and C-TFT structures for the drain to source voltage V is shown in Fig. 3. It can be seen from Fig. 3(a) that a potential barrier (central barrier) is formed at the GB because the carriers are immobilized by the traps due to the strain and the dangling bonds located at the grain boundary [24], [25]. Therefore, the dominant conduction mechanism of the C-TFT is determined by GIGBL. But, in the proposed TG-TFT due to its triple-gate structure, in addition to the central barrier, two extra barriers (side barriers) are created in the side gate regions due to the

3 OROUJI AND KUMAR: POLY-Si TG-TFT WITH DIMINISHED PSEUDOSUBTHRESHOLD REGION 1817 Fig. 4. Comparison of the transfer characteristics of TG-TFT, C-TFT, and C-SOI structures. work function difference between the side gate and the main gate as shown in Fig. 3(b) in which the side and central barriers not only differ in their height but also in their shape. Therefore, the dominant conduction mechanism of the TG-TFT should now be controlled by the side barriers since the central barrier does not play any significant role. In that case, we should have a steep subthreshold slope in the transfer characteristic of the device just as observed in a typical single crystal SOI MOSFET. With increasing gate voltage, however, the height of the side barrier will decrease and at some critical gate voltage, the side barrier height will become equal to the central barrier height as shown in Fig. 3(c) for V. After this critical gate voltage condition is reached, the channel conduction mechanism will be determined by GIGBL. B. Diminished Pseudo-Subthreshold Region In Fig. 4, the transfer characteristics of the TG-TFT are compared with that of the C-TFT and the single crystal SOI MOSFET. We notice from this figure that as speculated above, for all gate voltages less than the critical gate voltage ( V), the subthreshold slope of the TG-TFT is very steep similar to that commonly observed in SOI MOSFETs. For gate voltages greater than, the transfer characteristic of the TG-TFT matches with that of the C-TFT since now the height of the central barrier is larger than that of the side barriers. Therefore, it is clear that because of the steep subtrheshold slope, the TG-TFT will have several orders of magnitude lesser OFF-state leakage current when compared to the C-TFT. This has become possible by nullifying the effect of the central barrier associated with the grain boundary on the channel conduction mechanism so that the pseudosubthreshold region is almost eliminated. C. Effect of Side Gate Work Function on The value of critical gate voltage at which the central barrier height becomes equal to the side barrier height is very important in controlling the pseudosubthreshold region and Fig. 5. Transfer characteristic of TG-TFT structure for different work functions of side gates. hence the reduction in the OFF-state leakage current. If the critical gate voltage is near to zero or negative, the TG-TFT structure is not very useful in improving leakage current and will behave like the C-TFT. An important parameter that determines the value of is the work function of the side gate. Fig. 5 shows the transfer characteristic of the TG-TFT for different work functions of the side gate region. It can be seen from the figure that as the work function of the side gate decreases, the critical gate voltage will reduce forcing the behavior of TG-TFT approach that of the C-TFT. This is because if the work function of the side gate decreases for a given work function of the main gate, the height of the side barriers will also decrease. Therefore, it is very important to choose appropriate work function for the side gate for given main gate work function. D. Effect of Channel Length Fig. 6 shows the transfer characteristics of the TG-TFT compared with that of the C-TFT for channel lengths ranging from 0.3 to 1.0 m. Just as is commonly observed in the case of the single crystal SOI-MOSFET [16], the slope of the subthreshold region will improve as the channel length increases. What is important to note is that there is no significant change in the critical voltage with increase in the channel length because the interaction between side and central barriers will reduce as the channel length increases. However, it is important to note that the short channel effects in the TG-TFT structure need to be investigated further to understand how the improvement will hold good for shorter channel versions of TG-TFT. E. Effect of Trap Density The conductivity in polycrystalline TFT is strongly dependent on the trap density at the GBs and has been described by many authors [24] [27]. Fig. 7 shows the transfer characteristics of TG-TFT and C-TFT structures for different trap densities. It can be seen from the figure that the pseudosubthreshold region will be more gradual with increasing trap density at the GB and will increase. However, the subthreshold slope of

4 1818 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 52, NO. 8, AUGUST 2005 Fig. 6. lengths. Transfer characteristics of TG-TFT and C-TFT for different channel Fig. 8. Transfer characteristics of TG-TFT and C-TFT for different temperatures. Fig. 7. Transfer characteristics of TG-TFT and C-TFT for different grain boundary trap densities. the TG-TFT remains unchanged giving rise to a substantial reduction in the OFF-state current even if the trap density is large. F. Effect of Temperature One of the important concerns in the operation of poly-si TFTs is the temperature dependence of their performance. Due to the gradual subthreshold slope, the C-TFTs show stronger temperature dependence compared to the conventional SOI MOSFETs. Fig. 8 shows the temperature dependence of the TG-TFT and the C-TFT structures. We notice that even at 400 K, the OFF-state current of the TG-TFT is much smaller and the subthreshold slope is steeper than that of the C-TFT. This is an important advantage of the TG-TFT over that of the C-TFT at higher ambient temperatures. It is worth noting that in a real device it is difficult to control the position of the GB relative to the source and drain and therefore the position dependence of the GB in the channel is Fig. 9. Transfer characteristics of TG-TFT for different side gate lengths. L and L are the main and side gate lengths, respectively. very important in conventional poly-si TFTs. However, our simulation results suggest that there is no significant change in the transfer characteristic of TG-TFT even if there is a 20% shift in the position of the GB with respect to the center of the channel. IV. DESIGN ISSUES OF TG-TFT A. Choice of Side Gate Length In all our simulations above, we have chosen the main gate length equal to the side gate length as proposed by Kumar et al. for the dual material gate SOI MOSFET [28] [31]. They showed that if the side gate length is equal to the main gate length, the OFF-state leakage current is very small. To examine the effect of the side gate length on the leakage current, we have compared the transfer characteristic of the TG-TFT for different side gate lengths as shown in Fig. 9. As can be seen from the figure, there is no significant change in the critical gate voltage when the side gate length is reduced with respect to the

5 OROUJI AND KUMAR: POLY-Si TG-TFT WITH DIMINISHED PSEUDOSUBTHRESHOLD REGION 1819 Fig. 10. Transfer characteristics of TG-TFT and C-TFT for three grain boundaries in the channel with all three grain boundaries present under the main gate. main gate length. However, we conclude that the subthreshold slope is steeper and the leakage current is the lowest when the side gate length is equal to the main gate length for the fixed channel length. B. Effect of Multiple Grain Boundaries To examine the behavior of the TG-TFT in the presence of multiple grains in the channel, we have investigated the performance of the TG-TFT structure with three GBs in the channel. Fig. 10 shows a comparison of the transfer characteristic of the TG-TFT with the C-TFT with three GBs present in the main channel and for different distances between these grains. Three conclusions can be drawn from the figure. First, the TG-TFT structure works very well even in the presence of multiple grain boundaries in the channel. Second, when the distance between the GBs is large, due to an increase in the interaction between the side barriers and the trap barriers, the slope of transfer characteristic of the TG-TFT will increase. However, even in this case, the transfer characteristic of the TG-TFT is significantly better than that of the C-TFT. Third, in the presence of multiple GBs in the channel, the pseudosubthreshold slope in the C-TFT further deteriorates. For the chosen and values, if the distance between grain boundaries further increases, it is quite possible that GBs may appear under the side gates as shown in Fig. 11. Even in this case, we observe that by choosing appropriate and values, we can still realize diminished pseudosubthreshold region in the TG-TFT making its subthreshold slope very steep as can be seen from the transfer characteristic shown in Fig. 11. V. CONCLUSION To reduce the leakage current and for improving the performance of poly-si TFT in AMLCD or other applications, we have proposed a novel poly-si TG-TFT. In this structure, two side gates on either side of the main gate whose work functions are different from the main gate are used so that the dominant conduction mechanism in the channel is controlled by the Fig. 11. Transfer characteristics of TG-TFT and C-TFT for three grain boundaries in the channel with one grain boundary present under each side gate. ACMG and not by the GIGBL. The performance of the proposed TG-TFT has been evaluated using 2-D simulation and compared with that of a conventional poly-si TFT. Based on our simulation results, we demonstrate that due to the presence of side barriers which are more dominant than the central potential barrier associated with the grain boundaries, the pseudosubthreshold region is significantly diminished resulting in several orders of magnitude reduction in the OFF state leakage current with no detectable change in the ON voltage. We have also studied the different aspects of the device design such as the effect of varying the channel length, number of grain boundaries, trap density at the grain boundaries, temperature and the work function of the gate material, and the reasons for the improved performance are presented. The significantly reduced leakage current in the TG-TFT due to the diminished pseudosubthreshold region is expected to provide the incentive for experimental verification. REFERENCES [1] T. Tanaka, H. Asuma, K. Ogawa, Y. Shinagawa, and N. Konishi, An LCD addressed by a-si: H TFTs with peripheral poly-si TFT circuits, in IEDM Tech. Dig., 1993, pp [2] T. Aoyama, K. Ogawa, Y. Mochizuki, and N. Konishi, Inverse staggered poly-si and amorphous Si double structure TFTs for LCD panels with peripheral driver circuit integration, IEEE Trans. Electron Devices, vol. 43, no. 5, pp , May [3] A. Hara, Y. Mishima, T. Kakehi, F. Takeuchi, M. Takei, K. Yoshino, K. Suga, M. Chida, and N. Sasaki, High performance poly-si TFTs on a glass by a stable scanning CW laser lateral crystallization, in IEDM Tech. Dig., 2001, pp [4] J. G. Fossum, A. Oritz-Conde, H. Shichijo, and S. K. Banerjee, Anomalous leakage current in LPCVD polysilicon MOSFETs, IEEE Trans. Electron Devices, vol. ED-32, no. 12, pp , Dec [5] A. Kohno, T. Sameshima, N. Sano, M. Sekiya, and M. Hara, High performance poly-si TFT fabricated using pulsed laser annealing and remote plasma CVD with low temperature processing, IEEE Trans. Electron Devices, vol. 42, no. 2, pp , Feb [6] M. Yazaki, S. Takenaka, and H. Oshima, Conduction mechanism of leakage current observed in metal-oxide-semiconductor transistors and poly-si thin-film transistors, Jpn. J. Appl. Phys., vol. 31, pp , [7] B. Min, C. Park, and M. Han, A novel polysilicon thin-film transistor with a p-n-p structured gate electrode, IEEE Electron Device Lett., vol. 17, no. 12, pp , Dec

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Kumar, Investigation of the novel attributes of a fully depleted dual-material gate SOI MOSFET, IEEE Trans. Electron Devices, vol. 51, no. 9, pp , Sep [30], Controlling short-channel effects in deep submicron SOI MOS- FETs for improved reliability: A review, IEEE Trans. Device Mater. Reliab., vol. 4, no. 3, pp , Mar [31] G. V. Reddy and M. J. Kumar, A new dual-material double-gate (DMDG) nanoscale SOI MOSFET Two-dimensional analytical modeling and simulation, IEEE Trans. Nanotechnol., vol. 4, no. 3, pp , Mar design. Ali A. Orouji (M 05) was born in Neyshabour, Iran, in He received the B.S. and M.S. degrees in electronic engineering from the Iran University of Science and Technology (IUST), Tehran, Iran. He is currently pursuing the Ph.D. degree in the Department of Electrical Engineering, Indian Institute of Technology, Delhi, India. Since 1992, he has been working at the Semnan University, Semnan, Iran as a faculty member. His research interests are in modeling of SOI MOSFET, novel device structures, and analog integrated circuits M. Jagadesh Kumar (SM 99) was born in Mamidala, Andhra Pradesh, India. He received the M.S. and Ph.D degrees in electrical engineering from the Indian Institute of Technology (IIT), Madras, India. From 1991 to 1994, he did his post-doctoral research in modeling and processing of high-speed bipolar transistors in the Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, ON, Canada. While with the University of Waterloo, he also did research on amorphous silicon TFTs. From July 1994 to December 1995, he was initially with the Department of Electronics and Electrical Communication Engineering, IIT, Kharagpur, India, and then joined the Department of Electrical Engineering, IIT, Delhi, India, where he became an Associate Professor in July 1997 and a Professor in January His research interests are in VLSI device modeling and simulation for nanoscale applications, IC technology, and power semiconductor devices. He has been a Reviewer for the IEE Proceedings on Circuits, Devices and Systems, IEE Electronics Letters, and IEE Solid-State Electronics. His teaching has often been rated as outstanding by the Faculty Appraisal Committee, IIT, Delhi. Dr. Kumar is a Fellow of the Institute of Electronics and Telecommunication Engineers (IETE) of India. He has been a Reviewer for the IEEE TRANSACTIONS ON ELECTRON DEVICES. He was Chairman, Fellowship Committee, The 16th International Conference on VLSI Design, New Delhi, India, in He is Chairman of the Technical Committee for High Frequency Devices, International Workshop on the Physics of Semiconductor Devices, New Delhi, India, 2005.