James Watt Nanofabrication Centre

Transcription

1 James Watt Nanofabrication Centre Prof Douglas Paul Director

2 The University of Glasgow Established in Nobel Laureates 16,500 undergraduates, 5,000 graduates and 5,000 adult students 130M research income pa 400 years in High Street Moved to Gilmorehill in 1870 Neo-gothic buildings by Gilbert Scott

3 Famous Glasgow Scholars William Thomson (Lord Kelvin) James Watt William John Macquorn Rankine Rev Robert Stirling Rev John Kerr Adam Smith John Logie Baird Joseph Black

4 Nanoscale Glasgow 70M research grant portfolio in nanoscale technology demonstrate Glasgow University capability examples of present industrial engagement look for overlaps in interest networking to investigate possible future collaborations Major Funded Research Centres at Glasgow James Watt Nanofabrication Centre Kelvin Nanocharacterisation Centre Electronics Design Centre for Heterogeneous Systems Bioelectronics Research Centre Scottish Power Electronics & Electric Drives (SPEED) Consortium Kelvin Nanotechnology Limited (KNT) is a bridge to industry Provides commercial assess to University facilities

5 >30 Years Nanofabrication at Glasgow 1978 EBL on converted SEM in basement 1989 our first dedicated SEM for metrology 1990 Leica EBPG5 First UK Uni lab to run professional installation 2005 New James Watt Nanofabrication Centre built 2006 New EBL tool State-of-the-art 2007 Nanoforum formed Cross-disciplinary group of researchers

6 James Watt Nanofabrication In School of Engineering, multidisciplinary with many others including Physics, Chemistry, CS, Biology 53M active research grant portfolio ( 14M pa, industry ~ 1M) 2 nd highest cited Electronics School in UK after Cambridge World Bests: Smallest electron-beam lithography pattern 3 nm Best layer-to-layer alignment accuracy = 0.46 nm Smallest diamond transistor (50 nm gate length) Lowest loss silicon optical waveguide (< 0.9 db/cm) Fastest mode locked laser (2.1 THz) Highest Q silicon nanowire cavity (now beaten 2010)

7 James Watt Nanofabrication Vistec VB6 & EBPG5 750m 2 cleanroom - pseudo-industrial operation 18 technicians + 5 research technologists E-beam lithography Large number of process modules Processes include: MMICs, III-V, Si/SiGe/Ge, integrated photonics, metamaterials, MEMS (microfluidics) Commercial access through KNT Süss MA6 optical lith 9 RIE / PECVD 4 Metal dep tools 4 SEMs: Hitachi S4700 Veeco: AFMs

8 Electron Beam Lithography Capability 30 years experience of e-beam lithography Sub-5 nm single-line lithography for research Measured linewidth vs dose HSQ Dose (µc cm-2) 10nm Vistec VB6 Penrose tile: layer-to-layer alignment 0.46 nm rms Vistec EBPG5 Alignment allows 1 nm gaps between different layers

9 Manufacturing: Nanoimprint Lithography Electron beam lithography: serial process, appropriate for small area, high value products Nanoimprint: 1 stamp, many reproductions Cheap, large area, manufacturing technique 500 nm E. Martines et al., Nano Lett. 5, 2097 (2005) > EC project: development to rolling process

10 James Watt Nanofabrication Centre Technology III-V CMOS Resonant tunnelling diodes 22 nm T-gate InGaAs HEMT Hydrophobic patterns Optoelectronics Sensing: Si nanowires MEMS: THz optics MEMS: Microfluidics SiO2 drain source Al gates

11 Scaling T-gate Process to 10 nm 50 nm 22 nm 10 nm I. Thayne et al., Thin Solid Films 515, 4373 (2007) S. Bentley et al., Microelect. Eng. 85, 1375 (2008) S. Bentley et al., Microelect. Eng. 86, 1067 (2009)

12 Healthcare & Medical Applications Proton camera: ph sensors THz medical imaging Medical scaffolds Picture from TeraView Lab-on-a-pill Plasmon sensors Directed STEM cell growth Compton cameras: medical imaging

13 Energy Applications III-V Photovoltaics: intermediate bandgap Thermoelectrics: SiGe on-chip energy harvesting Bi2Te3 nanostructured alloys Bi2Te3 nanowire Si/SiGe superlattice

14 Security and Defence Applications mm-wave & THz security imaging 1.56 THz Absorption (AU and offset) Explosives identification Semtex PETN PE4 RDX HMX TNT HOSDB & TeraView Frequency (THz) 94 GHz Counter measures Peltier Coolers QinetiQ SPIE 6212, 62120Q (2006) MMICs: Design, fab, test 140 GHz LNA

15 Terahertz and mm-wave Sources: Gunn diodes (~0.1 mw 120 GHz), quantum cascade lasers (50 mw at 2 to 4 THz) room temperature and tunable THz sources in research Optics: metamaterial lenses, tunable filters, beam steerers, beamsplitters, polarisers, antireflective coatings Detectors: modulators, microbolometer arrays, liquid He Si bolometers (NEP ~ W/ Hz at 4K) Systems: heterodyne detection, time domain systems, vacuum FTIR (60 GHz to visible detectors)

16 ICT Applications µled comms. Photonics Integrated optoelectronics Fibre-to-the-home, chip-to-chip interconnects lab-on-a-chip!"#$%#!&'#()*(+%,+- Si photonics 16x16 GaN LED array Efficient LEDs Amplitude & phase modulation 2.0 High frequency measurements CRT 2.1 THz 1.6 Signal, A.U Delay, ps

17 Kelvin Nanocharacterisation Centre (KNC) KNC is a state-of-the-art electron microscopy research facility KNC facilities: Electron Microscopy Sample preparation Dualbeam FIB/SEM instrument provides a very wide range of capabilities 3 x Transmission electron microscopes (TEMs) optimised for specialist imaging and characterisation of materials at the nanoscale Specialise in structural/chemical characterisation of materials from micrometres to < 1 nm

18 6 Structure and composition at the nanoscale FEI T20 TEM & TF20 TEM/STEM HR-TEM - atomic resolution imaging Electron probe formation down to 0.3 nm X-ray analysis for elemental composition and mapping Electron energy loss spectroscopy (EELS) for elemental composition and bonding EELS spectrum imaging Our research: III-V heterostructures & MOSFETs, high-k stacks, ferroelectrics, magnetic tunnel junctions, steels, nanoparticles. Some collaborators recent past & present:

19 Electronics Design Centre l l l CAD and CAD support HSS, Cadence, Synopsys, Avant! Secure private HPC On-wafer probing l DC to 325 GHz Microwave/Millimetre Wave Test & Measurement l l VNA suite from MHz to 325 GHz 20 GHz nearfield test range - anechoic chamber THz Test & Measurement l l Very long wavelength FTIR - 60 GHz to visible Cooled detectors for mm-wave, THz, MIR

20 Industrial Partners and Customers!"#$%& &'&()"*+&(#(,-!"#$%%$&$#'()*!"#$"%$ Kymata! BAE SYSTEMS!"#$%&' QinetiQ "!!"#$%&'()*+"(,-!""#$%!""#$%&'$()")*

21 Commercial Engagement & Exploitation Most nanoscale research applied and / or industrially relevant Research collaborations with over 50 companies, provide nanofabrication services to over 175 companies Large portfolio of background IP, know-how, experience Mechanisms: cash!, III-V Facility, PhD student sponsorship, collaborative projects (EPSRC, EC, TSB), consultancy, KNT Kelvin Nanotechnology Ltd.: provides commercial access to facilities to industry Cash to help companies work with the University: Knowledge Transfer Account (KTA), First Step

22 Summary Formidable track record in Nanoscience and Nanoscale Technology stretching over 30 Years University-wide nanofabrication activity embracing many disciplines Global research ambition Close partnerships with universities and industry Knowledge transfer drive with cash available to work with industry Present collaborative programmes in UK, Europe, US, Canada, etc... Research capabilities overlap many research sectors Welcome extending partnership with universities, research institutes and especially companies Tel: