Introduction of Plasma Indicator "PLAZMARK "

Transcription

1 SEMICON TAIWAN 2017 Introduction of Plasma Indicator "PLAZMARK " Thursday, September 14, 2017 Plasma Indicator Division SEISAKU OHSHIRO 1

2 Concept of Plasma Indicator An Evaluation tool made from functional colorants which react on active species (radicals or ions) Plasma Intensity Before Plasma After Plasma Color changes gradually per plasma intensity. Visualize plasma treatment effect handy 2

3 Visualize The Plasma Process The Conventional Method to Evaluate Plasma Processing Etching Measurement Contact Angle Measurement Before Plasma Process After Before After Plasma Process Expensive equipment required Time-consuming operation required Low accuracy, Time-consuming operation required 3

4 Visualize The Plasma Process By Using the Plasma Indicator Before Plasma Process After You can judge by visual inspection and easily quantified by color meter Grayish Purple Dark Green Green 4

5 Visualize The Plasma Process The Plasma Process Uniformity Evaluation Card Type Spectrometer Card 2-D uniformity evaluation is difficult to be measure by the optical method, but it can be easily evaluated by using PLAZMARK. Wafer Type Probe Measurement Wafer You can evaluate a larger area (entire surface of the wafer) than the electrical probe measurement. 5

6 Check of Plasma Equipment Daily or Periodic Check Check after Maintenance Check of Same Type Equipment Check of Manufacturing Sites Difference etc. Green Deep Green Grayish Green Parameter Adjustment Parameter Adjustment Green Green 6

7 Other applications Can be used for a difficult location to other measurement. Can be used for 3-D works. Can be used for a detection of abnormal discharge. 7

8 PLAZMARK Line-up For O 2 /Ar Cleaning Heat-Resistant For Atmospheric Plasma Wafer Type 8

9 PLAZMARK for O 2 cleaning / Ar cleaning Best for mounting process and assembly process; Surface treatment of wire/flip-chip bonding Cleaning before under-filling Cleaning before sealing of electronic components, such as LSIs, memories, MEMS, or LEDs Before Plasma Sheet After Plasma Card It is applicable to UV or UV Ozone cleaning. Label 9

10 PLAZMARK for atmospheric plasma By a newly developed organic colorant, radicals in atmospheric plasma can be checked. It is optimal for check of large area treatments of atmospheric (normal-pressure) plasma process, PCB industry, FPD Industry and surface modification of film. It is applicable to UV cleaning and UV Ozone cleaning. Electrode Plasma Indicator 10

11 PLAZMARK Heat-resistant, Label type It has low outgassing rates and high heat resistance (200 ) composed of newly developed inorganic colorants and polyimide substrates. Protection film Color change part Separator film Polyimide film Label type has a flexibility and adhesion, as a result, you can evaluate easily plasma processing effects. 11

12 PLAZMARK Heat-resistant, Label type Color Changes by the Plasma of Various Gases Initial H 2 Ar Cl 2 SF 6 12

13 Color difference E*ab PLAZMARK Heat-resistant, Label type Correlation with the Electron Density by the Langmuir Probe Measurement ICP(Ar) : 10Pa, W, 90sec No.101 No E E E E E+12 Electron density (cm -3 ) 13

14 PLAZMARK Wafer Type Under Development Ceramic Type (Φ4inch/6inch) Ceramic coat without organic materials enable heat resistivity up to 400, can be used in high temperature process. Clean product, good for LED or MEMS manufacturing process. Si and Sapphire Substrate available. Example of color change by O 2 plasma 14

15 Application for uniformity check PLAZMARK Wafer type ( ceramic type) Under Development Under Development Example of Ar gas Plasma The Uniformity can be visually and numerically evaluated easily Example of evaluation by automatic mapping system

16 PLAZMARK Wafer Type Under Development Metal Free (Φ200mm/300mm) Eliminate metal ingredient to utmost level to achieve higher level of cleanness. good for clean process, such as Si semiconductor front end process. 16

17 Our Proposal to Electronic Industry Visualize the Plasma Process Design or Grade-up of Plasma Equipment Development of Plasma Recipes Trouble Shooting for Plasma System Daily or Periodic check of Plasma Equipment Quality Management of Products etc. Label Card Wafer 17

18 Contact PI Division Or, Local Distributor in Taiwan Nami Tseng 曾碧珊 18

19 BOOTH# and location BOOTH #2044 1F K Area Entrance 19

20 Thank you for your attention 20